US6001706A
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Method for making improved shallow trench isolation for semiconductor integrated circuits
Assignee: GlobalFoundries Singapore Pte Ltd
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Filing: 1997-12-08
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Granted: 1999-12-14
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Expires: 2017-12-08
Abstract
Abstract A method was achieved for fabricating field oxide regions (shallow trench isolation) having raised portions which are self-aligned and extend over edges of device areas. This results in FETs with improved sub-threshold characteristics and lower sub-threshold leakage currents. The method consists of forming a pad oxide and depositing a doped polysilicon layer and a hard mask layer on a silicon substrate. Shallow trenches are etched through the hard mask, doped polysilicon layer and partially into the silicon substrate. A thermal oxidation is used to form a liner oxide in the trenches and to oxidize, at a higher oxidation rate, the sidewalls of the doped polysilicon layer to form an oxide over the edges of the device areas. A gap-fill oxide is deposited in the trenches and chemical mechanical polished (CMP) back to the polysilicon layer. The remaining polysilicon layer over the device areas is selectively removed to provide a field oxide having raised portions formed over the edges of the device areas. This eliminates the wrap-around corner effect which in the prior art resulted in enhanced corner conduction and increased sub-threshold leakage currents at substrate back bias. This improved method also provides greater processing latitude during the chemical mechanical polish step.
Inventors
- 👤 Poh Suan Tan
- 👤 Lap Chan
- 👤 Qinghua Zhong
- 👤 Qian Gang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 01:18
CPC Classifications
H; H10; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/014; H10W10/0145; H10W10/10; H10W10/17
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
194 words
A method for fabricating shallow trench isolation on a semiconductor substrate having raised field oxide regions extending over edges of device areas comprising the steps of: forming a pad oxide layer by thermal oxidation on said substrate; depositing a polysilicon layer on said pad oxide layer; depositing a silicon nitride hard mask layer on said polysilicon layer; forming trenches in said substrate by photoresist masking and anisotropic etching said hard mask, said polysilicon layer, said pad oxide layer and partially into said substrate, while leaving portions of said polysilicon layer over said device areas; forming a liner oxide by thermal oxidation in said trenches on exposed surface of said substrate and further concurrently forming a thicker silicon oxide on sidewalls of said polysilicon layer extending over said edges of said device areas; depositing a conformal chemical vapor deposited silicon oxide and filling said trenches, thereby forming a gap fill oxide; chemical mechanical polishing back said gap fill oxide to said hard mask removing said hard mask layer by selective etching; removing said polysilicon layer over said device areas, thereby completing said shallow trench isolation having raised field oxide regions extending over said device areas.
Claim 2
Independent Claim
194 words
A method for fabricating shallow trench isolation on a semiconductor substrate having raised field oxide regions extending over edges of device areas comprising the steps of: forming a pad oxide layer by thermal oxidation on said substrate; depositing a polysilicon layer on said pad oxide layer; depositing a silicon nitride hard mask layer on said polysilicon layer; forming trenches in said substrate by photoresist masking and anisotropic etching said hard mask, said polysilicon layer, said pad oxide layer and partially into said substrate, while leaving portions of said polysilicon layer over said device areas; forming a liner oxide by thermal oxidation in said trenches on exposed surface of said substrate and further concurrently forming a thicker silicon oxide on sidewalls of said polysilicon layer extending over said edges of said device areas; depositing a conformal chemical vapor deposited silicon oxide and filling said trenches, thereby forming a gap fill oxide; chemical mechanical polishing back said gap fill oxide to said hard mask removing said hard mask layer by selective etching; removing said polysilicon layer over said device areas, thereby completing said shallow trench isolation having raised field oxide regions extending over said device areas.
Claim 3
Dependent Claim
20 words
The method of claim 1, wherein said pad oxide layer has a thickness of between about 50 and 400 Angstroms.
Claim 4
Dependent Claim
19 words
The method of claim 1, wherein said polysilicon layer has a thickness of between about 1000 and 3000 Angstroms.
Claim 5
Dependent Claim
28 words
The method of claim 1, wherein said silicon nitride hard mask layer is deposited by chemical vapor deposition to a thickness of between about 1000 and 3000 Angstroms.
Claim 6
Dependent Claim
31 words
The method of claim 1, wherein said substrate is single crystal silicon and said trenches are etched to a depth of between about 0.3 and 1.0 micrometers (um) in said substrate.
Claim 7
Dependent Claim
21 words
The method of claim 1, wherein said liner oxide is grown to a thickness of between about 300 and 500 Angstroms.
Claim 8
Dependent Claim
21 words
The method of claim 1, wherein said gap fill oxide is deposited to a thickness sufficient to completely fill said trenches.
Claim 9
Dependent Claim
36 words
The method of claim 1, wherein said chemical mechanical polishing back is carried out using a polishing slurry having a polish rate ratio of silicon oxide to hard mask in a range of 6:1 to 10:1.
Claim 10
Dependent Claim
33 words
The method of claim 1, wherein said removing of said portions of said polysilicon layer is by plasma etching having an etch rate ratio of polysilicon to silicon oxide of greater than 10:1.
Claim 11
Dependent Claim
37 words
The method of claim 1, wherein said removing of said portions of said polysilicon layer is by wet etching in potassium hydroxide (KOH) having an etch rate ratio of polysilicon to silicon oxide of greater than 10:1.
Claim 12
Independent Claim
199 words
A method for fabricating shallow trench isolation on a semiconductor substrate having raised field oxide regions extending over edges of device areas comprising the steps of: forming a pad oxide layer by thermal oxidation on said substrate; depositing a polysilicon layer on said pad oxide layer; depositing a silicon nitride hard mask layer on said polysilicon layer; forming trenches in said substrate by photoresist masking and anisotropic etching said hard mask, said polysilicon layer, said pad oxide layer and partially into said substrate, while leaving portions of said polysilicon layer over said device areas; removing said hard mask; forming a liner oxide by thermal oxidation in said trenches on exposed surface of said substrate and further concurrently forming a thicker silicon oxide on sidewalls of said polysilicon layer extending over said edge of said device areas; depositing a conformal chemical vapor deposited silicon oxide and filling said trenches, thereby forming a gap fill oxide; chemical mechanical polishing back said gap fill oxide to said portions of said polysilicon layer; removing said portions of said polysilicon layer over said device areas, thereby completing said shallow trench isolation having raised field oxide regions extending over the edges of said device areas.
Claim 13
Independent Claim
199 words
A method for fabricating shallow trench isolation on a semiconductor substrate having raised field oxide regions extending over edges of device areas comprising the steps of: forming a pad oxide layer by thermal oxidation on said substrate; depositing a polysilicon layer on said pad oxide layer; depositing a silicon nitride hard mask layer on said polysilicon layer; forming trenches in said substrate by photoresist masking and anisotropic etching said hard mask, said polysilicon layer, said pad oxide layer and partially into said substrate, while leaving portions of said polysilicon layer over said device areas; removing said hard mask; forming a liner oxide by thermal oxidation in said trenches on exposed surface of said substrate and further concurrently forming a thicker silicon oxide on sidewalls of said polysilicon layer extending over said edge of said device areas; depositing a conformal chemical vapor deposited silicon oxide and filling said trenches, thereby forming a gap fill oxide; chemical mechanical polishing back said gap fill oxide to said portions of said polysilicon layer; removing said portions of said polysilicon layer over said device areas, thereby completing said shallow trench isolation having raised field oxide regions extending over the edges of said device areas.
Claim 14
Dependent Claim
20 words
The method of claim 11, wherein said pad oxide layer has a thickness of between about 50 and 400 Angstroms.
Claim 15
Dependent Claim
19 words
The method of claim 11, wherein said polysilicon layer has a thickness of between about 1000 and 3000 Angstroms.
Claim 16
Dependent Claim
28 words
The method of claim 11, wherein said silicon nitride hard mask layer is deposited by chemical vapor deposition to a thickness of between about 1000 and 3000 Angstroms.
Claim 17
Dependent Claim
31 words
The method of claim 11, wherein said substrate is single crystal silicon and said trenches are etched to a depth of between about 0.3 and 1.0 micrometers (um) in said substrate.
Claim 18
Dependent Claim
21 words
The method of claim 11, wherein said liner oxide is grown to a thickness of between about 300 and 500 Angstroms.
Claim 19
Dependent Claim
21 words
The method of claim 11, wherein said gap fill oxide is deposited to a thickness sufficient to completely fill said trenches.
Claim 20
Dependent Claim
34 words
The method of claim 11, wherein said chemical/mechanical polishing back is carried out using a polishing slurry having a polish rate ratio of silicon oxide to polysilicon in a range of 6:1 to 10:1.
Claim 21
Dependent Claim
33 words
The method of claim 11, wherein said removing of said portions of said polysilicon layer is by plasma etching having an etch rate ratio of polysilicon to silicon oxide of greater than 10:1.
Claim 22
Dependent Claim
37 words
The method of claim 11, wherein said removing of said portions of said polysilicon layer is by wet etching in potassium hydroxide (KOH) having an etch rate ratio of polysilicon to silicon oxide of greater than 10:1.
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| 3.5 Years (Year 4) | 2002-12-13 | 2003-06-14 | 2003-12-14 | $2000.00 | Window Closed / Lapsed |
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