US6001693A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of making a metal to metal antifuse
Assignee: Microsemi SoC Corp
•
Filing: 1995-09-01
•
Granted: 1999-12-14
•
Expires: 2015-09-01
Abstract
Abstract The antifuse structure of the present invention includes a bottom planarized electrode, an ILD disposed over the bottom electrode, an antifuse cell opening in and through the ILD exposing the bottom electrode, a first barrier metal layer disposed in the antifuse cell opening to protect the antifuse material layer from diffusion from the bottom electrode and to form an effective bottom electrode of reduced area, hence reducing the capacitance of the device, an antifuse material layer disposed in the antifuse cell opening and over the first barrier metal layer, a second barrier metal layer disposed over the antifuse material layer, and a top electrode disposed over the second barrier metal layer.
Inventors
- 👤 Yen Yeouchung
- 👤 Shih-Oh Chen
- 👤 Leuh Fang
- 👤 Elaine K. Poon
- 👤 James B. Kruger
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 05:51
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/49; H10W20/491
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
206 words
A process for fabricating a metal-to-metal antifuse comprising the following steps: (a) forming a bottom electrode having an upper surface over an insulating portion of a microcircuit structure; (b) forming an interlayer dielectric layer over said bottom electrode; (c) etching an antifuse cell opening in and through said interlayer dielectric layer so as to expose a portion of said upper surface of said bottom electrode; (d) blanket depositing a first barrier metal layer over said interlayer dielectric layer and in said antifuse cell opening and over and in physical and electrical contact with said bottom electrode; (e) spin depositing a layer of photoresist over said first barrier metal layer; (f) etching back said photoresist and said first barrier metal layer so as to leave only a cup-shaped portion of said first barrier metal layer disposed in said antifuse cell opening; (g) stripping the remaining photoresist from within said cup-shaped portion; (h) depositing an antifuse material layer over and in said cup-shaped portion and over said interlayer dielectric layer; (i) depositing a second barrier metal layer over said antifuse material layer; (j) patterning and etching said antifuse material layer and said second barrier metal layer; and (k) forming a top electrode over said second barrier metal layer.
Claim 2
Dependent Claim
206 words
A process for fabricating a metal-to-metal antifuse comprising the following steps: (a) forming a bottom electrode having an upper surface over an insulating portion of a microcircuit structure; (b) forming an interlayer dielectric layer over said bottom electrode; (c) etching an antifuse cell opening in and through said interlayer dielectric layer so as to expose a portion of said upper surface of said bottom electrode; (d) blanket depositing a first barrier metal layer over said interlayer dielectric layer and in said antifuse cell opening and over and in physical and electrical contact with said bottom electrode; (e) spin depositing a layer of photoresist over said first barrier metal layer; (f) etching back said photoresist and said first barrier metal layer so as to leave only a cup-shaped portion of said first barrier metal layer disposed in said antifuse cell opening; (g) stripping the remaining photoresist from within said cup-shaped portion; (h) depositing an antifuse material layer over and in said cup-shaped portion and over said interlayer dielectric layer; (i) depositing a second barrier metal layer over said antifuse material layer; (j) patterning and etching said antifuse material layer and said second barrier metal layer; and (k) forming a top electrode over said second barrier metal layer.
Claim 3
Dependent Claim
50 words
A process for fabricating a metal-to-metal antifuse according to claim 1 further including the following step which takes place between step (j) and step (k): (l) forming a spacer of an insulating material adjacent edges formed by step (j) in said antifuse material layer and said second barrier metal layer.
Claim 4
Dependent Claim
50 words
A process for fabricating a metal-to-metal antifuse according to claim 1 further including the following step which takes place between step (g) and step (h): (l) forming spacers of an insulating material in internal corners formed in said cup-shaped portion and between said cup-shaped portion and said antifuse cell opening.
Claim 5
Dependent Claim
50 words
A process for fabricating a metal-to-metal antifuse according to claim 2 further including the following step which takes place between step (g) and step (h): (m) forming spacers of an insulating material in internal corners formed in said cup-shaped portion and between said cup-shaped portion and said antifuse cell opening.
References Cited (Backward Citations)
US4847732A
Cited
US4796075A
Cited
US4651409A
Cited
US4870302A
Cited
US4912066A
Cited
US4751197A
Cited
US4748490A
Cited
WO1987002827A1
Cited
US4943538A
Cited
US4899205A
Cited
US5266829A
Cited
US5134457A
Cited
US4822753A
Cited
US4933576A
Cited
US5093711A
Cited
US4914055A
Cited
US5191550A
Cited
US5070384A
Cited
US5404029A
Cited
US5272101A
Cited
EP0455414A1
Cited
US5194759A
Cited
US5095362A
Cited
WO1992013359A1
Cited
US5166556A
Cited
US5100827A
Cited
US5322812A
Cited
US5196724A
Cited
US5233217A
Cited
US5219982A
Cited
US5290734A
Cited
US5120679A
Cited
US5242851A
Cited
WO1993003499A1
Cited
US5302546A
Cited
US5241496A
Cited
US5328865A
Cited
US5286993A
Cited
US5341267A
Cited
US5353246A
Cited
US5272666A
Cited
US5171715A
Cited
US5233206A
Cited
US5298784A
Cited
US5329153A
Cited
US5250459A
Cited
US5327024A
Cited
US5293133A
Cited
US5284788A
Cited
US5248632A
Cited
US5308795A
Cited
US5270251A
Cited
US5300456A
Cited
US5412593A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-12-13 | 2003-06-14 | 2003-12-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-12-13 | 2007-06-14 | 2007-12-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-12-13 | 2011-06-14 | 2011-12-14 | $7700.00 | Window Closed / Lapsed |