US5976641A
Expired / Lapsed
US
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A1 alloy films and melting A1 alloy sputtering targets for depositing A1 alloy films
Assignee: Kobe Steel Ltd
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Filing: 1997-07-07
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Granted: 1999-11-02
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Expires: 2017-07-07
Abstract
Abstract An Al alloy film containing one kind or two or more kinds of alloy components selected from a group of Ti, Zr, Hf, V, Nb, Ta, Cr, Mo and Mn in a total amount of 0.1 to 10 at %, and a melting Al alloy sputtering target for depositing the Al alloy film, wherein the above-mentioned film is used as a reflection film for an optical recording medium, a shading film for a liquid crystal display panel or for a solid image pickup device, and an Al alloy thin film line or electrode material for a semiconductor device.
Inventors
- 👤 Takashi Onishi
- 👤 Kazuo Yoshikawa
- 👤 Seiji Nishi
- 👤 Seigou Yamamoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 16:04
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06; C23C14/14; C23C14/20; C23C14/205; C23C14/22; C23C14/34; C23C14/3407; C23C14/3414; G; G02; G02F; G02F1/00; G02F1/01; G02F1/13; G02F1/133; G02F1/1333; G02F1/1335; G02F1/133509; G02F1/133512; G02F1/136; G02F1/1362; G02F1/136286; G11; G11B; G11B11/00; G11B11/10; G11B11/105; G11B11/10582; G11B11/10586; G11B11/10589; G11B7/00; G11B7/24; G11B7/241; G11B7/252; G11B7/258; H; H10; H10D; H10D30/00; H10D30/60; H10D30/67; H10D30/6704; H10D30/6723; H10D62/00; H10D62/80; H10D62/83; H10D64/00; H10D64/60; H10D64/62; C09; C09K; C09K2323/00; C09K2323/03; G02F1/136295; G11B7/253; G11B7/2531; G11B7/2585; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/44; H10W20/4403; H10W20/4405; H10W20/4407; Y; Y10; Y10T; Y10T428/00; Y10T428/12; Y10T428/12431; Y10T428/12493; Y10T428/12528; Y10T428/12736; Y10T428/31504; Y10T428/31678
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
74 words
A sputtering target, comprising Al and 0.1 to 10 at. % of at least one alloy component selected from the group consisting of V, Nb, Ta, Cr, Mo and Mn, wherein said target comprises one or more intermetallic compounds comprising said at least one alloy component and Al, homogeneously distributed in said Al, and said one or more intermetallic compounds are needle-shaped or elliptical-shaped and have a lateral dimension of less than 200 μm.
Claim 2
Dependent Claim
74 words
A sputtering target, comprising Al and 0.1 to 10 at. % of at least one alloy component selected from the group consisting of V, Nb, Ta, Cr, Mo and Mn, wherein said target comprises one or more intermetallic compounds comprising said at least one alloy component and Al, homogeneously distributed in said Al, and said one or more intermetallic compounds are needle-shaped or elliptical-shaped and have a lateral dimension of less than 200 μm.
Claim 3
Dependent Claim
62 words
A sputtering target, comprising Al and 0.1 to 10 at. % of at least one alloy component selected from the group consisting of V, Nb, Ta, Cr, Mo and Mn, wherein said target comprises one or more intermetallic compounds comprising said at least one alloy component and Al, homogeneously distributed in said Al, and said target comprises less than 400 ppm oxygen.
Claim 4
Dependent Claim
62 words
A sputtering target, comprising Al and 0.1 to 10 at. % of at least one alloy component selected from the group consisting of V, Nb, Ta, Cr, Mo and Mn, wherein said target comprises one or more intermetallic compounds comprising said at least one alloy component and Al, homogeneously distributed in said Al, and said target comprises less than 400 ppm oxygen.
Claim 5
Dependent Claim
15 words
The sputtering target of claim 1, wherein said at least one alloy component is Ta.
Claim 6
Dependent Claim
15 words
The sputtering target of claim 2 wherein said at least one alloy component is Ta.
Claim 7
Dependent Claim
23 words
The sputtering target of claim 1, wherein said at least one alloy component is selected from the group consisting of Cr and Ta.
Claim 8
Dependent Claim
23 words
The sputtering target of claim 2 wherein said at least one ally component is selected from the group consisting of Cr and Ta.
Claim 9
Dependent Claim
35 words
The sputtering target of claim 1, wherein said at least one alloy component is: (i) Ta, and (ii) an alloy component selected from the group consisting of Ti, Zr, V, Nb, Cr, Mo and Mn.
Claim 10
Dependent Claim
35 words
The sputtering target of claim 2, wherein said at least one alloy component is: (i) Ta, and (ii) an alloy component selected from the group consisting of Ti, Zr, V, Nb, Cr, Mo and Mn.
Claim 11
Dependent Claim
22 words
The sputtering target of claim 1, wherein said target comprises 0.2 to 5 at. % of said at least one alloy component.
Claim 12
Dependent Claim
22 words
The sputtering target of claim 2, wherein said target comprises 0.2 to 5 at. % of said at least one alloy component.
Claim 13
Dependent Claim
24 words
The sputtering target of claim 1, wherein said at least one alloy component is selected from the group consisting of Ta, Mn and Cr.
Claim 14
Dependent Claim
24 words
The sputtering target of claim 2, wherein said at least one alloy component is selected from the group consisting of Ta, Mn and Cr.
Claim 15
Dependent Claim
14 words
A method of forming a film, comprising sputtering the sputtering target of claim 1.
Claim 16
Dependent Claim
14 words
A method of forming a film, comprising sputtering the sputtering target of claim 2.
Claim 17
Dependent Claim
26 words
A method for forming the sputtering target of claim 1, comprising melting and casting a composition comprising said Al and said at least one alloy component.
Claim 18
Dependent Claim
26 words
A method for forming the sputtering target of claim 2, comprising melting and casting a composition comprising said Al and said at least one alloy component.
Claim 19
Dependent Claim
26 words
A method of making a shading film of a liquid crystal display panel, comprising sputtering the sputtering target of claim 1, to form said shading film.
Claim 20
Dependent Claim
26 words
A method of making a shading film of a liquid crystal display panel, comprising sputtering the sputtering target of claim 2, to form said shading film.
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