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US5973404A Expired / Lapsed US ⏱️ 0.0 years remaining

Underfill of bumped or raised die using a barrier adjacent to the sidewall of semiconductor device

Assignee: Micron Technology Inc
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Filing: 1997-08-11
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Granted: 1999-10-26
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Expires: 2017-08-11
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Abstract

Abstract A method and apparatus for attaching a semiconductor device to a substrate. One end of the substrate is elevated to position the substrate and the coupled semiconductor device on an inclined plane. An underfill material is introduced along a wall of the semiconductor device located at the elevated end of the inclined substrate with the underfill material being placed between the substrate and the semiconductor device. An optional but preferred additional step of the invention includes coupling a barrier means to the substrate at a point on the substrate adjacent to a sidewall of the semiconductor device located at the lowest point of the slope created by the inclined substrate. The barrier means prevents the underfill material from spreading beyond the sidewalls of the semiconductor device, particularly in instances where the substrate is inclined at a steep angle.

Inventors

  • 👤 Salman Akram
  • 👤 James M. Wark

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-03 08:16
CPC Classifications
H; H10; H10W; H10W72/00; H10W72/30; H10W74/00; H10W74/01; H10W74/012; H10W74/10; H10W74/15; H10W70/00; H10W70/60; H10W70/67; H10W70/68; H10W70/681; H10W72/01; H10W72/013; H10W72/01308; H10W72/071; H10W72/072; H10W72/073; H10W72/07311; H10W72/851; H10W72/853; H10W72/856; H10W90/00; H10W90/701; H10W90/721; H10W90/724; H10W90/731; H10W90/734

Claims Analysis

Total Claims: 16
Claim 1
Independent Claim 245 words
An assembly of a semiconductor device attached to a substrate, said assembly comprising: a substrate having a front edge, back edge, first lateral edge, second lateral edge, and a plurality of electrical contact pads located thereon; a semiconductor device having a plurality of sides forming a periphery therearound, the periphery of the semiconductor device formed by a front side, back side, first lateral edge, second lateral edge, the semiconductor device having a plurality of electrical contact pads located on the active surface thereof; a dam located on the substrate at a location adjacent one side of the plurality of sides of the semiconductor device outside the periphery of the semiconductor device, the dam extending substantially parallel to the one side of the plurality of sides of the semiconductor device, said other sides of said plurality of sides having no dam located adjacent thereto; a plurality of electrical connectors interposed between the electrical contact pads located on the substrate and the electrical contact pads located on the semiconductor device thereby electrically and mechanically interconnecting the semiconductor device to the substrate, the plurality of electrical connectors interconnecting the substrate to the semiconductor device thereby spacing the substrate from the semiconductor device causing a gap to be formed therebetween; and an underfill material substantially filling the gap formed between the substrate and the semiconductor device, the underfill material extending to the dam located on the substrate adjacent a side of the plurality of sides of the semiconductor device.
Claim 2
Dependent Claim 245 words
An assembly of a semiconductor device attached to a substrate, said assembly comprising: a substrate having a front edge, back edge, first lateral edge, second lateral edge, and a plurality of electrical contact pads located thereon; a semiconductor device having a plurality of sides forming a periphery therearound, the periphery of the semiconductor device formed by a front side, back side, first lateral edge, second lateral edge, the semiconductor device having a plurality of electrical contact pads located on the active surface thereof; a dam located on the substrate at a location adjacent one side of the plurality of sides of the semiconductor device outside the periphery of the semiconductor device, the dam extending substantially parallel to the one side of the plurality of sides of the semiconductor device, said other sides of said plurality of sides having no dam located adjacent thereto; a plurality of electrical connectors interposed between the electrical contact pads located on the substrate and the electrical contact pads located on the semiconductor device thereby electrically and mechanically interconnecting the semiconductor device to the substrate, the plurality of electrical connectors interconnecting the substrate to the semiconductor device thereby spacing the substrate from the semiconductor device causing a gap to be formed therebetween; and an underfill material substantially filling the gap formed between the substrate and the semiconductor device, the underfill material extending to the dam located on the substrate adjacent a side of the plurality of sides of the semiconductor device.
Claim 3
Dependent Claim 71 words
The assembly of claim 1, wherein the assembly further comprises: a second dam located adjacent another side of the plurality of sides of the semiconductor device outside the periphery of the semiconductor device, the second dam extending substantially parallel to the another side of the plurality of sides of the semiconductor device, the remaining other sides of said plurality of sides of the semiconductor device having no dam located adjacent thereto.
Claim 4
Dependent Claim 46 words
The assembly of claim 1, wherein the assembly further comprises: an aperture extending through the substrate at a location adjacent the semiconductor device extending between at least two of the electrical connectors of the plurality of electrical connectors extending between the substrate and the semiconductor device.
Claim 5
Dependent Claim 244 words
An assembly of a semiconductor device attached to a substrate, said assembly comprising: an inclined support, the inclined support being at an angle with respect to the horizontal; a substrate having a front edge, back edge, first lateral edge, second lateral edge, and a plurality of electrical contact pads located thereon, the substrate being located on the inclined support; a semiconductor device having a plurality of sides forming a periphery, the periphery of the semiconductor device formed by a front side, back side, first lateral edge, second lateral edge, the semiconductor device having a plurality of electrical contact pads located on the active surface thereof; a plurality of electrical connectors interposed between the electrical contact pads located on the substrate and the electrical contact pads located on the semiconductor device thereby electrically and mechanically interconnecting the semiconductor device to the substrate, the plurality of electrical connectors interconnecting the substrate to the semiconductor device spacing the substrate from the semiconductor device causing a gap to be formed therebetween; an underfill material substantially filling the gap formed between the substrate and the semiconductor device; and a dam located on the substrate adjacent the back side of the semiconductor device outside the periphery of the semiconductor device, the dam extending substantially parallel to the back side of the semiconductor device, at least the front side and one of the first lateral edge and the second lateral edge of the semiconductor device having no dam located adjacent thereto.
Claim 6
Dependent Claim 244 words
An assembly of a semiconductor device attached to a substrate, said assembly comprising: an inclined support, the inclined support being at an angle with respect to the horizontal; a substrate having a front edge, back edge, first lateral edge, second lateral edge, and a plurality of electrical contact pads located thereon, the substrate being located on the inclined support; a semiconductor device having a plurality of sides forming a periphery, the periphery of the semiconductor device formed by a front side, back side, first lateral edge, second lateral edge, the semiconductor device having a plurality of electrical contact pads located on the active surface thereof; a plurality of electrical connectors interposed between the electrical contact pads located on the substrate and the electrical contact pads located on the semiconductor device thereby electrically and mechanically interconnecting the semiconductor device to the substrate, the plurality of electrical connectors interconnecting the substrate to the semiconductor device spacing the substrate from the semiconductor device causing a gap to be formed therebetween; an underfill material substantially filling the gap formed between the substrate and the semiconductor device; and a dam located on the substrate adjacent the back side of the semiconductor device outside the periphery of the semiconductor device, the dam extending substantially parallel to the back side of the semiconductor device, at least the front side and one of the first lateral edge and the second lateral edge of the semiconductor device having no dam located adjacent thereto.
Claim 7
Dependent Claim 77 words
The assembly of claim 4, further comprising: a second dam located adjacent one of the first lateral edge and the second lateral edge of the semiconductor device outside the periphery of the semiconductor device, the second dam extending substantially parallel to the one of the first lateral edge and the second lateral edge of the semiconductor device, the other lateral edge of the first lateral edge and the second lateral edge having no dam located adjacent thereto.
Claim 8
Dependent Claim 18 words
The assembly of claim 4, wherein the assembly further comprises: a vibrator in contact with the inclined support.
Claim 9
Dependent Claim 46 words
The assembly of claim 4, wherein the assembly further comprises: an aperture extending through the substrate at a location adjacent the semiconductor device extending between at least two of the electrical connectors of the plurality of electrical connectors extending between the substrate and the semiconductor device.
Claim 10
Dependent Claim 44 words
The assembly of claim 4, wherein the underfill flows into and through the gap by the substrate being supported on the inclined support with the underfill thereby flowing downwardly from the front side of the semiconductor device in the direction of the back side.
Claim 11
Dependent Claim 252 words
An assembly of a semiconductor device attached to a substrate, said assembly comprising: an inclined support, the inclined support being inclined at an angle with respect to the horizontal; a substrate having a front edge, back edge, first lateral edge, second lateral edge, and a plurality of electrical contact pads located thereon, the substrate being located on the inclined support; a semiconductor device having a plurality of sides forming a peripheral, the periphery of the semiconductor device formed by a front side, back side, first lateral edge, second lateral edge, the semiconductor device having a plurality of electrical pads located on the active surface thereof; a plurality of electrical connectors interposed between the electrical contact pads located on the substrate and the electrical contact pads located on the semiconductor device thereby electrically and mechanically interconnecting the semiconductor device to the substrate, the plurality of electrically connectors interconnecting the substrate to the semiconductor device thereby spacing the substrate from the semiconductor device causing a gap to be formed therebetween; an underfill material substantially filling the gap formed between the substrate and the semiconductor device, the underfill substantially uniformly filling the gap by including the force of gravity acting thereon during the underfilling of the gap; and a dam located on the substrate adjacent the back side of the semiconductor device outside the periphery thereof, the dam extending substantially parallel to the back side of the semiconductor device, the front side, first lateral edge, and second lateral edge having no dam located adjacent thereto.
Claim 12
Dependent Claim 252 words
An assembly of a semiconductor device attached to a substrate, said assembly comprising: an inclined support, the inclined support being inclined at an angle with respect to the horizontal; a substrate having a front edge, back edge, first lateral edge, second lateral edge, and a plurality of electrical contact pads located thereon, the substrate being located on the inclined support; a semiconductor device having a plurality of sides forming a peripheral, the periphery of the semiconductor device formed by a front side, back side, first lateral edge, second lateral edge, the semiconductor device having a plurality of electrical pads located on the active surface thereof; a plurality of electrical connectors interposed between the electrical contact pads located on the substrate and the electrical contact pads located on the semiconductor device thereby electrically and mechanically interconnecting the semiconductor device to the substrate, the plurality of electrically connectors interconnecting the substrate to the semiconductor device thereby spacing the substrate from the semiconductor device causing a gap to be formed therebetween; an underfill material substantially filling the gap formed between the substrate and the semiconductor device, the underfill substantially uniformly filling the gap by including the force of gravity acting thereon during the underfilling of the gap; and a dam located on the substrate adjacent the back side of the semiconductor device outside the periphery thereof, the dam extending substantially parallel to the back side of the semiconductor device, the front side, first lateral edge, and second lateral edge having no dam located adjacent thereto.
Claim 13
Dependent Claim 74 words
The assembly of claim 9, further comprising: a second dam located adjacent one of the first lateral edge and the second lateral edge of the semiconductor device outside the periphery thereof, the second dam extending substantially parallel to the one of the first lateral edge and the second lateral edge of the semiconductor device, the other lateral edge of the first lateral edge and the second lateral edge having no dam located adjacent thereto.
Claim 14
Dependent Claim 17 words
The assembly of claim 9, wherein the assembly further comprises: a vibrator in contact with the substrate.
Claim 15
Dependent Claim 46 words
The assembly of claim 9, wherein the assembly further comprises: an aperture extending through the substrate at a location adjacent the semiconductor device extending between at least two of the electrical connectors of the plurality of electrical connectors extending between the substrate and the semiconductor device.
Claim 16
Dependent Claim 44 words
The assembly of claim 9, wherein the underfill flows into and through the gap by the substrate being supported on an inclined support with the underfill thereby flowing downwardly from the front side of the semiconductor device in the direction of the back side.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2002-10-25 2003-04-26 2003-10-26 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2006-10-25 2007-04-26 2007-10-26 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2010-10-25 2011-04-26 2011-10-26 $7700.00 Window Closed / Lapsed

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