US5897374A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Vertical via/contact with undercut dielectric
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1997-06-04
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Granted: 1999-04-27
•
Expires: 2017-06-04
Abstract
Abstract A new method of metallization of an integrated circuit is described. A dielectric layer is provided over a first conducting layer over an insulating layer over a semiconductor substrate. The dielectric layer is covered with a layer of photoresist which is patterned to provide a photoresist mask. At least one via hole is etched through the dielectric layer to the first conducting layer. The photoresist mask is removed. The via hole is etched through the first conducting layer resulting in an undercutting of the dielectric layer. The exposed surfaces of the first conducting layer are cleaned. The insulating layer overhang protects the exposed surfaces from damage or contamination. A second conducting layer is deposited over the surface of the dielectric layer and within the via hole completing the metallization in the fabrication of the integrated circuit.
Inventors
- 👤 Yung-Fa Lin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 19:59
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/081; H10W20/082
Claims Analysis
Total Claims: 40
Claim 1
Independent Claim
172 words
A method of metallization of an integrated circuit comprising: providing a first conducting layer over an insulating layer on the surface of a semiconductor substrate wherein said first conducting layer comprises an anti-reflective coating overlying a contact metal layer overlying a barrier metal layer; forming a dielectric layer overlying said first conducting layer; covering said dielectric layer with a layer of photoresist and patterning said photoresist to provide a photoresist mask; etching at least one via hole through said dielectric layer to said first conducting layer; removing said photoresist mask; extending said via hole downward through said first conducting layer to said insulating layer wherein an undercut is formed under said intermetal dielectric layer overlying said first conducting layer wherein portions of said first conducting layer are exposed; cleaning the exposed portions of said first conducting layer; and depositing a second conducting layer over the surface of said dielectric layer and within said via hole wherein said second conducting layer contains aluminum completing said metallization in the fabrication of said integrated circuit.
Claim 2
Independent Claim
172 words
A method of metallization of an integrated circuit comprising: providing a first conducting layer over an insulating layer on the surface of a semiconductor substrate wherein said first conducting layer comprises an anti-reflective coating overlying a contact metal layer overlying a barrier metal layer; forming a dielectric layer overlying said first conducting layer; covering said dielectric layer with a layer of photoresist and patterning said photoresist to provide a photoresist mask; etching at least one via hole through said dielectric layer to said first conducting layer; removing said photoresist mask; extending said via hole downward through said first conducting layer to said insulating layer wherein an undercut is formed under said intermetal dielectric layer overlying said first conducting layer wherein portions of said first conducting layer are exposed; cleaning the exposed portions of said first conducting layer; and depositing a second conducting layer over the surface of said dielectric layer and within said via hole wherein said second conducting layer contains aluminum completing said metallization in the fabrication of said integrated circuit.
Claim 3
Dependent Claim
20 words
A method according to claim 1 wherein said semiconductor substrate comprises semiconductor device structures in and on a semiconductor substrate.
Claim 4
Dependent Claim
19 words
A method according to claim 1 wherein said etching through said dielectric layer is a CF 4 plasma etching.
Claim 5
Dependent Claim
19 words
A method according to claim 1 wherein said etching through said dielectric layer is a CHF 3 plasma etching.
Claim 6
Dependent Claim
21 words
A method according to claim 1 wherein said extending said via hole is done by etching with an isotropic plasma etch.
Claim 7
Dependent Claim
31 words
A method according to claim 5 wherein said isotropic plasma etch is done using a C12/CF4 base and is performed at a low power of between about 20 to 100 watts.
Claim 8
Dependent Claim
42 words
A method according to claim 5 wherein said removing said photoresist mask results in a polymer residue on the surface of said dielectric layer and a surface of said first conducting layer and wherein said isotropic plasma etch removes said polymer residue.
Claim 9
Dependent Claim
30 words
A method according to claim 1 wherein said undercut of said dielectric layer protects said exposed portions of said first conducting layer from polymer buildup or damage during subsequent processes.
Claim 10
Dependent Claim
34 words
A method according to claim 1 wherein said extending said via hole through said first conducting layer is a partial etch wherein a portion of said first conducting layer remains underlying said via hole.
Claim 11
Dependent Claim
29 words
A method according to claim 1 wherein said extending said via hole through said first conducting layer results in a via hole which contacts the underlying said insulating layer.
Claim 12
Dependent Claim
24 words
A method according to claim 1 wherein said exposed portions of said first conducting layer are cleaned by flushing said surfaces with deionized water.
Claim 13
Dependent Claim
31 words
A method according to claim 1 wherein said second conducting layer comprises Aluminum and wherein said Aluminum is flowed at between about 400 to 600° C. to fill said via hole.
Claim 14
Dependent Claim
34 words
A method according to claim 1 wherein said second conducting layer comprises an Aluminum alloy and wherein said Aluminum alloy is flowed at between about 400 to 600° C. to fill said via hole.
Claim 15
Independent Claim
173 words
The method of metallization of an integrated circuit comprising: providing an insulating layer over semiconductor device structures in and on a semiconductor substrate; providing a first conducting layer over said insulating layer; depositing an intermetal dielectric layer over said first conducting layer; covering said intermetal dielectric layer with a layer of photoresist and patterning said photoresist to provide a photoresist mask; etching at least one via hole through said intermetal dielectric layer to said first conducting layer; removing said photoresist mask; extending said via hole downward through said first conducting layer using an isotropic plasma etch wherein an undercut is formed under said intermetal dielectric layer overlying said first conducting layer and wherein portions of said first conducting layer along the sidewalls of said via hole are exposed; cleaning said exposed portions of said first conducting layer; and depositing a second conducting layer over the surface of said intermetal dielectric layer and within said via hole wherein said second conducting layer contains aluminum completing said metallization in the fabrication of said integrated circuit.
Claim 16
Independent Claim
173 words
The method of metallization of an integrated circuit comprising: providing an insulating layer over semiconductor device structures in and on a semiconductor substrate; providing a first conducting layer over said insulating layer; depositing an intermetal dielectric layer over said first conducting layer; covering said intermetal dielectric layer with a layer of photoresist and patterning said photoresist to provide a photoresist mask; etching at least one via hole through said intermetal dielectric layer to said first conducting layer; removing said photoresist mask; extending said via hole downward through said first conducting layer using an isotropic plasma etch wherein an undercut is formed under said intermetal dielectric layer overlying said first conducting layer and wherein portions of said first conducting layer along the sidewalls of said via hole are exposed; cleaning said exposed portions of said first conducting layer; and depositing a second conducting layer over the surface of said intermetal dielectric layer and within said via hole wherein said second conducting layer contains aluminum completing said metallization in the fabrication of said integrated circuit.
Claim 17
Dependent Claim
21 words
A method according to claim 14 wherein said first conducting layer comprises a contact metal layer overlying a barrier metal layer.
Claim 18
Dependent Claim
22 words
A method according to claim 15 wherein said first conducting layer further comprises an anti-reflective coating layer overlying said contact metal layer.
Claim 19
Dependent Claim
19 words
The method of claim 14 wherein said etching through said intermetal dielectric layer is a CF 4 plasma etching.
Claim 20
Dependent Claim
20 words
A method according to claim 14 wherein said etching through said intermetal dielectric layer is a CHF 3 plasma etching.
Claim 21
Dependent Claim
21 words
A method according to claim 14 wherein said extending said via hole is done by etching with an isotropic plasma etch.
Claim 22
Dependent Claim
31 words
A method according to claim 19 wherein said isotropic plasma etch is done using a C12/CF4 base and is performed at a low power of between about 20 to 100 watts.
Claim 23
Dependent Claim
45 words
A method according to claim 19 wherein said removing said photoresist mask results in a polymer residue on the surface of said intermetal dielectric layer and on a top surface of said first conducting layer and wherein said isotropic plasma etch removes said polymer residue.
Claim 24
Dependent Claim
26 words
A method according to claim 14 wherein said undercut protects said exposed portions of said first conducting layer from polymer buildup or damage during subsequent processes.
Claim 25
Dependent Claim
34 words
A method according to claim 14 wherein said extending said via hole through said first conducting layer is a partial etch wherein a portion of said first conducting layer remains underlying said via hole.
Claim 26
Dependent Claim
29 words
A method according to claim 14 wherein said extending said via hole through said first conducting layer results in a via hole which contacts the underlying said insulating layer.
Claim 27
Dependent Claim
24 words
A method according to claim 14 wherein said exposed portions of said first conducting layer are cleaned by flushing said surfaces with deionized water.
Claim 28
Dependent Claim
31 words
A method according to claim 14 wherein said second conducting layer comprises Aluminum and wherein said Aluminum is flowed at between about 400 to 600° C. to fill said via hole.
Claim 29
Dependent Claim
34 words
A method according to claim 14 wherein said second conducting layer comprises an Aluminum alloy and wherein said Aluminum alloy is flowed at between about 400 to 600° C. to fill said via hole.
Claim 30
Independent Claim
212 words
The method of metallization of an integrated circuit comprising: providing an insulating layer over semiconductor device structures in and on a semiconductor substrate; providing a first conducting layer over said insulating layer; depositing an intermetal dielectric layer over said first conducting layer; covering said intermetal dielectric layer with a layer of photoresist and patterning said photoresist to provide a photoresist mask; etching at least one via hole through said intermetal dielectric layer to said first conducting layer whereby a surface of said first conducting layer is exposed; removing said photoresist mask whereby a polymer residue is formed on the surface of said intermetal dielectric layer and said exposed surface of said first conducting layer; extending said via hole downward through said first conducting layer to said insulating layer using a Cl 2 /CF 4 isotropic plasma etch wherein an undercut is formed under said intermetal dielectric layer overlying said first conducting layer and whereby said polymer residue is removed from the surface of said intermetal dielectric layer and said exposed surface of said first conducting layer; and depositing a second conducting layer over the surface of said intermetal dielectric layer and within said via hole wherein said second conducting layer contains aluminum completing said metallization in the fabrication of said integrated circuit.
Claim 31
Independent Claim
212 words
The method of metallization of an integrated circuit comprising: providing an insulating layer over semiconductor device structures in and on a semiconductor substrate; providing a first conducting layer over said insulating layer; depositing an intermetal dielectric layer over said first conducting layer; covering said intermetal dielectric layer with a layer of photoresist and patterning said photoresist to provide a photoresist mask; etching at least one via hole through said intermetal dielectric layer to said first conducting layer whereby a surface of said first conducting layer is exposed; removing said photoresist mask whereby a polymer residue is formed on the surface of said intermetal dielectric layer and said exposed surface of said first conducting layer; extending said via hole downward through said first conducting layer to said insulating layer using a Cl 2 /CF 4 isotropic plasma etch wherein an undercut is formed under said intermetal dielectric layer overlying said first conducting layer and whereby said polymer residue is removed from the surface of said intermetal dielectric layer and said exposed surface of said first conducting layer; and depositing a second conducting layer over the surface of said intermetal dielectric layer and within said via hole wherein said second conducting layer contains aluminum completing said metallization in the fabrication of said integrated circuit.
Claim 32
Dependent Claim
21 words
A method according to claim 28 wherein said first conducting layer comprises a contact metal layer overlying a barrier metal layer.
Claim 33
Dependent Claim
22 words
A method according to claim 29 wherein said first conducting layer further comprises an anti-reflective coating layer overlying said contact metal layer.
Claim 34
Dependent Claim
19 words
The method of claim 28 wherein said etching through said intermetal dielectric layer is a CF 4 plasma etching.
Claim 35
Dependent Claim
20 words
A method according to claim 28 wherein said etching through said intermetal dielectric layer is a CHF 3 plasma etching.
Claim 36
Dependent Claim
31 words
A method according to claim 28 wherein said isotropic plasma etch is done using a C12/CF4 base and is performed at a low power of between about 20 to 100 watts.
Claim 37
Dependent Claim
26 words
A method according to claim 28 wherein said undercut protects said exposed surface of said first conducting layer from polymer buildup or damage during subsequent processes.
Claim 38
Dependent Claim
28 words
A method according to claim 28 wherein said isotropic plasma etch is a partial etch wherein a portion of said first conducting layer remains underlying said via hole.
Claim 39
Dependent Claim
23 words
A method according to claim 28 wherein said isotropic plasma etch results in a via hole which contacts the underlying said insulating layer.
Claim 40
Dependent Claim
31 words
A method according to claim 28 wherein said second conducting layer comprises Aluminum and wherein said Aluminum is flowed at between about 400 to 600° C. to fill said via hole.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-04-26 | 2002-10-26 | 2003-04-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-04-26 | 2006-10-26 | 2007-04-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-04-26 | 2010-10-26 | 2011-04-27 | $7700.00 | Window Closed / Lapsed |