US5336371A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor wafer cleaning and rinsing techniques using re-ionized water and tank overflow
Assignee: Nokia Bell Labs
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Filing: 1993-03-18
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Granted: 1994-08-09
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Expires: 2013-03-18
Abstract
Abstract In a wafer fabrication process in which a photoresist stripper must be removed from the surface of a semiconductor wafer, the photoresist stripper is rinsed by inserting the wafer in a vessel (23, FIG. 3) filled with water and simultaneously pumping carbon dioxide and water into the vessel to cause the water to overflow the vessel. Preferably, the wafer is contained within the vessel for at least five minutes, and, during the rinsing step, the water completely fills the vessel and overflows at a rate of at least fifty percent of the volume of the vessel each minute. We have found that this method of rinsing photoresist stripper from semiconductor wafers significantly reduces or eliminates the incidence of corrosion pitting on aluminum conductors (12, FIG. 1) of the wafer (11).
Inventors
- 👤 Bryan C. Chung
- 👤 Gerald N. DiBello
- 👤 Charles W. Pearce
- 👤 Kevin P. Yanders
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 11:09
CPC Classifications
H; H10; H10P; H10P70/00; H10P70/20; H10P70/27; H10P70/273; G; G03; G03F; G03F7/00; G03F7/26; G03F7/42; G03F7/422; H10P70/10; H10P70/15
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
102 words
A method for removing a photoresist layer from a semiconductor wafer having aluminum-containing structures thereon comprising the steps of: exposing the photoresist layer to a photoresist stripper to remove the photoresist layer; rinsing the photoresist stripper from the semiconductor wafer comprising the step of inserting the wafer in a vessel filled with water; pumping carbon dioxide into the vessel and simultaneously pumping water into the vessel to cause the water to overflow the vessel; during the rinsing step, the water completely filling the vessel and overflowing at a rate of at least fifty percent of the volume of the vessel each minute.
Claim 2
Independent Claim
102 words
A method for removing a photoresist layer from a semiconductor wafer having aluminum-containing structures thereon comprising the steps of: exposing the photoresist layer to a photoresist stripper to remove the photoresist layer; rinsing the photoresist stripper from the semiconductor wafer comprising the step of inserting the wafer in a vessel filled with water; pumping carbon dioxide into the vessel and simultaneously pumping water into the vessel to cause the water to overflow the vessel; during the rinsing step, the water completely filling the vessel and overflowing at a rate of at least fifty percent of the volume of the vessel each minute.
Claim 3
Dependent Claim
22 words
The method of claim 1 wherein: during the rinsing step, the wafer is contained within the vessel for at least five minutes.
Claim 4
Dependent Claim
31 words
The method of claim 1 wherein: the volume of the vessel is approximately four gallons, and the rate of flow of water into the vessel is approximately 2.5 gallons per minute.
Claim 5
Dependent Claim
22 words
The method of claim 1 wherein: during the rinsing step, the wafer is contained within the vessel for at least five minutes.
Claim 6
Dependent Claim
22 words
The method of claim 4 wherein: during the rinsing step, the wafer is contained within the vessel for less than twenty minutes.
Claim 7
Dependent Claim
17 words
The method of claim 5 wherein: the wafer is contained within the vessel for approximately ten minutes.
Claim 8
Dependent Claim
19 words
The method of claim 6 wherein: a plurality of wafers are contained within the vessel during the rinsing step.
Claim 9
Independent Claim
134 words
A method for fabricating semiconductor devices from a semiconductor wafer containing aluminum conductors on one surface thereof comprising the steps of: coating the wafer with a photoresist layer; selectively exposing the photoresist to actinic light; developing the photoresist; using the developed photoresist as a mask to permit selective processing of the wafer; removing the photoresist mask by exposing the wafer to a photoresist stripper; rinsing the photoresist stripper from the semiconductor wafer comprising the step of inserting the wafer in a vessel filled with water; wherein the improvement comprises: simultaneously pumping carbon dioxide and water into the vessel to cause the water to overflow the vessel; during the rinsing step, the water completely filling the vessel and overflowing at a rate of at least fifty percent of the volume of the vessel each minute.
Claim 10
Independent Claim
134 words
A method for fabricating semiconductor devices from a semiconductor wafer containing aluminum conductors on one surface thereof comprising the steps of: coating the wafer with a photoresist layer; selectively exposing the photoresist to actinic light; developing the photoresist; using the developed photoresist as a mask to permit selective processing of the wafer; removing the photoresist mask by exposing the wafer to a photoresist stripper; rinsing the photoresist stripper from the semiconductor wafer comprising the step of inserting the wafer in a vessel filled with water; wherein the improvement comprises: simultaneously pumping carbon dioxide and water into the vessel to cause the water to overflow the vessel; during the rinsing step, the water completely filling the vessel and overflowing at a rate of at least fifty percent of the volume of the vessel each minute.
Claim 11
Dependent Claim
23 words
The method of claim 8 wherein: during the rinsing step, the wafer is contained within the vessel for between five and twenty minutes.
Claim 12
Dependent Claim
45 words
The method of claim 9 wherein: the volume of the vessel is approximately four gallons, and the rate of flow of water into the vessel is approximately 2.5 gallons per minute; and a plurality of wafers are contained within the vessel during the rinsing step.
Claim 13
Dependent Claim
19 words
The method of claim 9 wherein: the aluminum conductors comprise an aluminum alloy comprising more than ninety percent aluminum.
Claim 14
Dependent Claim
24 words
The method of claim 11 wherein: the aluminum conductors comprise about ninety-five percent aluminum, four to five percent copper, and a trace of silicon.
References Cited (Backward Citations)
US5175124A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-08-08 | 1998-02-07 | 1998-08-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-08-08 | 2002-02-07 | 2002-08-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-08-08 | 2006-02-07 | 2006-08-09 | $7700.00 | Window Closed / Lapsed |