Semiconductor device with conductive connecting layer and abutting insulator section made of oxide of same material

Claim 2

A semiconductor device comprising: a semiconductor substrate; a diffused region extending from a surface of said semiconductor substrate to inside said semiconductor substrate; a first insulating layer formed on said semiconductor substrate and having a first contact hole exposing said diffused region; a first conductor layer formed on a portion of said first insulating layer and directly contacting said diffused region through said first contact hole; and an insulator section made of an oxide of the substance of said first conductor layer and formed on another portion of said first insulating layer to surround said first conductor layer.

Claim 3

A semiconductor device according to claim 1, further comprising: a second insulating layer formed on and in direct contact with each of said first conductor layer and said insulator section, and having a second contact hole exposing said first conductor layer; and a second conductor layer formed on said second insulating layer and directly contacting said first conductor layer through said second contact hole.

Claim 4

A semiconductor device comprising: a semiconductor substrate; a first diffused region formed from a surface of said semiconductor substrate to inside said semiconductor substrate; a second diffused region formed from said surface of said semiconductor substrate to inside said semiconductor substrate; a first insulator section formed on said semiconductor substrate between said first diffused region and said second diffused region; an electrode made of a conductive substance and formed on a top surface of said first insulator section, said top surface being opposite a lower surface of said first insulator section which is on said semiconductor substrate; a first insulating layer formed on said semiconductor substrate defining a first contact hole exposing said first diffused region; a second insulating layer formed on said semiconductor substrate defining a second contact hole exposing said second diffused region; a first conductor layer formed on a portion of said first insulating layer and directly contacting said first diffused region through said first contact hole; a second conductor layer formed on a portion of said second insulating layer and directly contacting said second diffused region through said second contact hole; a second insulator section made of an oxide of the same substance of each of said first conductor layer and said second conductor layer and formed on said electrode, said second insulator section facing a first surface of said electrode which is opposite a second surface of said electrode facing said semiconductor substrate, and being between said first and second conductor layers; a third insulating layer formed on said first conductor layer, said second conductor layer and said second insulator section and having a third contact hole exposing, from above, said first conductor layer and a fourth contact hole exposing, from above, said second conductor layer; a third conductor layer formed on said third insulating layer and directly contacting said first conductor layer through said third contact hole; and a fourth conductor layer formed on said third insulating layer and directly contacting said second conductor layer through said fourth contact hole.

Claim 5

A semiconductor device comprising: a semiconductor substrate; a first diffused region formed from a surface of said semiconductor substrate to inside said semiconductor substrate; a second diffused region formed from said surface of said semiconductor substrate to inside said semiconductor substrate; a first insulator section formed on said semiconductor substrate between said first diffused region and said second diffused region; an electrode made of a conductive substance and formed on a top surface of said first insulator section, said top surface being opposite a lower surface of said first insulator section which is on said semiconductor substrate; a first insulating layer formed on said semiconductor substrate defining a first contact hole exposing said first diffused region; a second insulating layer formed on said semiconductor substrate defining a second contact hole exposing said second diffused region; a first conductor layer formed on a portion of said first insulating layer and directly contacting said first diffused region through said first contact hole; a second conductor layer formed on a portion of said second insulating layer and directly contacting said second diffused region through said second contact hole; a second insulator section made of an oxide of the same substance of each of said first conductor layer and said second conductor layer and formed on said electrode, said second insulator section facing a first surface of said electrode which is opposite a second surface of said electrode facing said semiconductor substrate, and being between said first and second conductor layers; a third insulating layer formed on said first conductor layer, said second conductor layer and said second insulator section and having a third contact hole exposing, from above, said first conductor layer and a fourth contact hole exposing, from above, said second conductor layer; a third conductor layer formed on said third insulating layer and directly contacting said first conductor layer through said third contact hole; and a fourth conductor layer formed on said third insulating layer and directly contacting said second conductor layer through said fourth contact hole.

Claim 6

A semiconductor device according to claim 3, further comprising a third insulator section disposed on said electrode and under said third insulating layer.

Claim 7

A semiconductor device comprising: a semiconductor substrate: a diffused layer formed from a surface of said semiconductor substrate to inside said semiconductor substrate; a first insulator section formed on said semiconductor substrate; an electrode made of a conductive substance and formed on a top surface of said first insulator section, said top surface being opposite a lower surface of said first insulator section which is on said semiconductor substrate; a first insulating layer formed on said semiconductor substrate and having a first contact hole exposing said diffused layer; a first conductor layer formed on a portion of said first insulating layer and in direct contact with said diffused region through said first contact hole; a second insulator section made of an oxide of the same substance of said first conductor layer and formed on said electrode, said second insulator section facing a first surface of said electrode which is opposite a second surface of said electrode facing said semiconductor substrate, and being between said first and second conductor layers; a second insulating layer formed on said first conductor layer and having a second contact hole exposing, from above, said first conductor layer; and a second conductor layer formed on said second insulating layer and in direct contact with said first conductor layer through said second contact hole.

Claim 8

A semiconductor device comprising: a semiconductor substrate: a diffused layer formed from a surface of said semiconductor substrate to inside said semiconductor substrate; a first insulator section formed on said semiconductor substrate; an electrode made of a conductive substance and formed on a top surface of said first insulator section, said top surface being opposite a lower surface of said first insulator section which is on said semiconductor substrate; a first insulating layer formed on said semiconductor substrate and having a first contact hole exposing said diffused layer; a first conductor layer formed on a portion of said first insulating layer and in direct contact with said diffused region through said first contact hole; a second insulator section made of an oxide of the same substance of said first conductor layer and formed on said electrode, said second insulator section facing a first surface of said electrode which is opposite a second surface of said electrode facing said semiconductor substrate, and being between said first and second conductor layers; a second insulating layer formed on said first conductor layer and having a second contact hole exposing, from above, said first conductor layer; and a second conductor layer formed on said second insulating layer and in direct contact with said first conductor layer through said second contact hole.

Claim 9

A semiconductor device according to any one of claim 3, wherein said conductor layer consists of a polycrystalline semiconductor substance.

Claim 10

A semiconductor device according to any one of claim 3, wherein said diffused layer is the source or drain of a MIS transistor.

Claim 11

A semiconductor device comprising: a semiconductor substrate; a diffused region extending from a surface of said semiconductor substrate to inside said semiconductor substrate; a first insulating layer formed on said semiconductor substrate and having a first contact hole exposing said diffused region; a first conductor layer formed on a portion of said first insulating layer and directly contacting said diffused region through said first contact hole; an insulator section made of an oxide of the substance of said first conductor layer and formed on another portion of said first insulating layer to surround said first conductor layer; a diffusion-preventing film covering said conductor layer; a second insulating layer doped with an impurity and formed on said diffusion-preventing film, said diffusion-preventing film preventing diffusion of impurities from said second insulating layer to said conductor layer.

Claim 12

A semiconductor device comprising: a semiconductor substrate; a diffused region extending from a surface of said semiconductor substrate to inside said semiconductor substrate; a first insulating layer formed on said semiconductor substrate and having a first contact hole exposing said diffused region; a first conductor layer formed on a portion of said first insulating layer and directly contacting said diffused region through said first contact hole; an insulator section made of an oxide of the substance of said first conductor layer and formed on another portion of said first insulating layer to surround said first conductor layer; a diffusion-preventing film covering said conductor layer; a second insulating layer doped with an impurity and formed on said diffusion-preventing film, said diffusion-preventing film preventing diffusion of impurities from said second insulating layer to said conductor layer.

Claim 13

A semiconductor device according to claim 8, wherein said diffusion-preventing film is a nitride film.

Claim 14

A semiconductor device according to claim 8, wherein said diffusion-preventing film consists of a silicide composite having a high melting point.

Claim 15

A semiconductor device comprising: a semiconductor substrate; a first diffused region formed from a surface of said semiconductor substrate to inside said semiconductor substrate; a second diffused region formed from said surface of said semiconductor substrate to inside said semiconductor substrate; a first insulator section formed on said semiconductor substrate between said first diffused region and said second diffused region; an electrode made of a conductive substance and formed on a top surface of said insulator section, said top surface being opposite a lower surface of said first insulator section which is on said semiconductor substrate; a first insulating layer formed on said semiconductor substrate defining a first contact hole exposing said first diffused region; a second insulating layer formed on said semiconductor substrate defining a second contact hole exposing said second diffused region; a first conductor layer formed on a portion of said first insulating layer and directly contacting said first diffused region through said first contact hole; a second conductor layer formed on a portion of said second insulating layer and directly contacting said second diffused region through said second contact hole; a second insulator section made of an oxide of the same substance of each of said first conductor layer and said second conductor layer and formed on said electrode, said second insulator section facing a first surface of said electrode which is opposite a second surface of said electrode facing said semiconductor substrate, and being between said first and second conductor layers; a third insulating layer formed on said first conductor layer, said second conductor layer, and said second insulator section and having a third contact hole exposing, from above, said first conductor layer and a fourth contact hole exposing, from above, said second conductor layer; a third conductor layer formed on said third insulating layer and directly contacting said first conductor layer through said third contact hole; a fourth conductor layer formed on said third insulating layer and directly contacting said second conductor layer through said fourth contact hole; a diffusion-preventing film covering each of said first and second conductor layers, said third insulating layer being doped with an impurity and formed on said diffusion-preventing film, said diffusion-preventing film preventing diffusion of impurities from said third insulating layer to each of said first and second conductor layers.

Claim 16

A semiconductor device comprising: a semiconductor substrate; a first diffused region formed from a surface of said semiconductor substrate to inside said semiconductor substrate; a second diffused region formed from said surface of said semiconductor substrate to inside said semiconductor substrate; a first insulator section formed on said semiconductor substrate between said first diffused region and said second diffused region; an electrode made of a conductive substance and formed on a top surface of said insulator section, said top surface being opposite a lower surface of said first insulator section which is on said semiconductor substrate; a first insulating layer formed on said semiconductor substrate defining a first contact hole exposing said first diffused region; a second insulating layer formed on said semiconductor substrate defining a second contact hole exposing said second diffused region; a first conductor layer formed on a portion of said first insulating layer and directly contacting said first diffused region through said first contact hole; a second conductor layer formed on a portion of said second insulating layer and directly contacting said second diffused region through said second contact hole; a second insulator section made of an oxide of the same substance of each of said first conductor layer and said second conductor layer and formed on said electrode, said second insulator section facing a first surface of said electrode which is opposite a second surface of said electrode facing said semiconductor substrate, and being between said first and second conductor layers; a third insulating layer formed on said first conductor layer, said second conductor layer, and said second insulator section and having a third contact hole exposing, from above, said first conductor layer and a fourth contact hole exposing, from above, said second conductor layer; a third conductor layer formed on said third insulating layer and directly contacting said first conductor layer through said third contact hole; a fourth conductor layer formed on said third insulating layer and directly contacting said second conductor layer through said fourth contact hole; a diffusion-preventing film covering each of said first and second conductor layers, said third insulating layer being doped with an impurity and formed on said diffusion-preventing film, said diffusion-preventing film preventing diffusion of impurities from said third insulating layer to each of said first and second conductor layers.

Claim 17

A semiconductor device according to claim 11, wherein said diffusion-preventing film is a nitride film.

Claim 18

A semiconductor device according to claim 11, wherein said diffusion-preventing film consists of a silicide composite having a high melting point.

Claim 19

A semiconductor device comprising: a semiconductor substrate; a diffused layer formed from a surface of said semiconductor substrate to inside said semiconductor substrate; a first insulator section formed on said semiconductor substrate; an electrode made of a conductive substance and formed on a top surface of said first insulator section, said top surface being opposite a lower surface of said first insulator section which is on said semiconductor substrate; a first insulating layer formed on said semiconductor substrate and having a first contact hole exposing said diffused layer; a first conductor layer formed on a portion of said first insulating layer in direct contact with said diffused region through said first contact hole; a second insulator section made of an oxide of the same substance of said first conductor layer and formed on said electrode, said second insulator section facing a first surface of said electrode which is opposite a second surface of said electrode facing said semiconductor substrate, and being between said first and second conductor layers; a second insulating layer formed on said first conductor layer and having a second contact hole exposing, from above, said first conductor layer; a second conductor layer formed on said second insulating layer and in direct contact with said first conductor layer through said second contact hole; and a diffusion-preventing film covering each of said first and second conductor layers, said second insulating layer being doped with an impurity and formed on said diffusion-preventing film, said diffusion-preventing film preventing diffusion of impurities from said second insulating layer to each of said first and second conductor layers.

Claim 20

A semiconductor device comprising: a semiconductor substrate; a diffused layer formed from a surface of said semiconductor substrate to inside said semiconductor substrate; a first insulator section formed on said semiconductor substrate; an electrode made of a conductive substance and formed on a top surface of said first insulator section, said top surface being opposite a lower surface of said first insulator section which is on said semiconductor substrate; a first insulating layer formed on said semiconductor substrate and having a first contact hole exposing said diffused layer; a first conductor layer formed on a portion of said first insulating layer in direct contact with said diffused region through said first contact hole; a second insulator section made of an oxide of the same substance of said first conductor layer and formed on said electrode, said second insulator section facing a first surface of said electrode which is opposite a second surface of said electrode facing said semiconductor substrate, and being between said first and second conductor layers; a second insulating layer formed on said first conductor layer and having a second contact hole exposing, from above, said first conductor layer; a second conductor layer formed on said second insulating layer and in direct contact with said first conductor layer through said second contact hole; and a diffusion-preventing film covering each of said first and second conductor layers, said second insulating layer being doped with an impurity and formed on said diffusion-preventing film, said diffusion-preventing film preventing diffusion of impurities from said second insulating layer to each of said first and second conductor layers.

Claim 21

A semiconductor device according to claim 14, wherein said diffusion-preventing film is a nitride film.

Claim 22

A semiconductor device according to claim 14, wherein said diffusion-preventing film consists of a silicide composite having a high melting point.

Claim 23

A semiconductor device according to claim 8, further comprising an interface between said first conductor layer and said insulator section, said interface lying in a plane and being between a first surface of said diffusion-preventing film and said surface of said semiconductor substrate, said first surface facing said first conductor layer, said diffusion-preventing film overlapping and extending beyond said interface in each of two opposing directions generally perpendicular to said plane.

Claim 24

A semiconductor device according to claim 17, wherein said interface is substantially orthogonal to said surface of said semiconductor substrate.

Claim 25

A semiconductor device according to claim 11, further comprising a first interface between said first conductor layer and said second insulator section and a second interface between said second conductor layer and said second insulator section, said first interface lying in a first plane and being between a first surface of said diffusion-preventing film and said surface of said semiconductor substrate, said first surface facing said first conductor layer, said diffusion-preventing film overlapping and extending beyond said first interface in each of two opposing directions generally perpendicular to said first plane, said second interface lying in a second plane and being between a second surface of said diffusion-preventing film and said surface of said semiconductor substrate, said first surface facing said first conductor layer, said diffusion-preventing film overlapping and extending beyond said second interface in each of two opposing directions generally perpendicular to said second plane.

Claim 26

A semiconductor device according to claim 19, wherein each of said first and second interfaces is substantially orthogonal to said surface of said semiconductor substrate.

Claim 27

A semiconductor device according to claim 14, further comprising an interface between said first conductor layer and said second insulator section, said interface lying in a plane and being between a first surface of said diffusion-preventing film and said surface of said semiconductor substrate, said first surface facing said first conductor layer, said diffusion-preventing film overlapping and extending beyond said interface in each of two opposing directions generally perpendicular to said plane.

Claim 28

A semiconductor device according to claim 21, wherein each of said first and second interfaces is substantially orthogonal to said surface of said semiconductor substrate.

Claim 29

A semiconductor device according to claim 1, further comprising an oxidation-resistant film covering said first conductor layer.

Claim 30

A semiconductor device according to claim 1, wherein said insulator section is positioned at a first distance from said first contact hole, said first distance being larger than a second distance from said first contact hole to said first conductor layer.

Claim 31

A semiconductor device according to claim 3, further comprising an oxidation-resistant film covering each of said first and second conductor layers.

Claim 32

A semiconductor device according to claim 5, further comprising an oxidation-resistant film covering each of said first and second conductor layers.

Claim 33

A semiconductor device according to claim 8, wherein said diffusion-preventing film comprises an oxidation-resistant film.

Claim 34

A semiconductor device according to claim 11, wherein said diffusion-preventing film comprises an oxidation-resistant film.

Claim 35

A semiconductor device according to claim 14, wherein said diffusion-preventing film comprises an oxidation-resistant film.