Patent US5735960A successfully refreshed from Google Patents.
US5735960A
Expired / Lapsed
US
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Apparatus and method to increase gas residence time in a reactor
Assignee: Micron Technology Inc
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Filing: 1996-04-02
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Granted: 1998-04-07
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Expires: 2016-04-02
Abstract
Abstract An apparatus is provided for controlling the flow of gaseous reactants in a CVD reactor through the use of a body having interior and exterior regions, in which the body defines at least one flow path between the interior and exterior regions so as to create a pressure drop from the interior to the exterior of the body within the chamber. The body is disposed in a reaction chamber with a first area proximate a gaseous reactant inlet and a second area proximate a substrate support such that the substrate is positioned in proximity to the interior of the body. As such, gaseous reactants introduced into the interior of said chamber through the inlet create a pressure drop between the interior and the exterior of the body. In a preferred embodiment, the body is cylindrically shaped and contains perforations providing the flow paths. Preferably, the perforations are either more numerous or larger in the second area than the first area to create a pressure gradient in the interior of the body. Alternatively, the perforations may be uniform in size and uniformly distributed over the body or the perforations can be configured to create a desired pressure differential in the body to support a plasma created in the body and control its location.
Inventors
- 👤 Gurtej S. Sandhu
- 👤 Ravi Iyer
- 👤 Sujit Sharan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:13
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45517; C23C16/4412; C23C16/45587; C23C16/45591; C23C16/50; C23C16/505; C23C16/509
Claims Analysis
Total Claims: 33
Claim 1
Independent Claim
72 words
An apparatus for controlling the flow of gaseous reactants in a reaction chamber having a gaseous reactant inlet and a substrate support disposed within the reaction chamber, said apparatus comprising: a hollow body disposed between the substrate support and the gaseous reactant inlet, said hollow body having a first end and a second end, defining an interior and an exterior, and containing a plurality of perforations nonuniformly distributed over said hollow body.
Claim 2
Independent Claim
72 words
An apparatus for controlling the flow of gaseous reactants in a reaction chamber having a gaseous reactant inlet and a substrate support disposed within the reaction chamber, said apparatus comprising: a hollow body disposed between the substrate support and the gaseous reactant inlet, said hollow body having a first end and a second end, defining an interior and an exterior, and containing a plurality of perforations nonuniformly distributed over said hollow body.
Claim 3
Dependent Claim
35 words
The apparatus of claim 1 further comprising a second body disposed in said interior and defining a flow path between said second body and said hollow body communicating with said exterior of said hollow body.
Claim 4
Dependent Claim
12 words
The apparatus of claim 1 wherein said hollow body is cylindrically shaped.
Claim 5
Dependent Claim
17 words
The apparatus of claim 1 wherein said first end extends at least to the gaseous reactant inlet.
Claim 6
Dependent Claim
21 words
The apparatus of claim 4 wherein said first end encloses the gaseous reactant inlet in said interior of said hollow body.
Claim 7
Dependent Claim
28 words
The apparatus of claim 1 wherein said perforations are configured to provide more flow area through said hollow body near said first end than near said second end.
Claim 8
Dependent Claim
28 words
The apparatus of claim 1 wherein said perforations are configured to provide more flow area through said hollow body near said second end than near said first end.
Claim 9
Dependent Claim
18 words
The apparatus of claim 1 wherein said second end of said hollow body extends to the substrate support.
Claim 10
Dependent Claim
21 words
The apparatus of claim 1 wherein said perforations near said second end are larger than said perforations near said first end.
Claim 11
Dependent Claim
23 words
The apparatus of claim 1 wherein said perforations are distributed in a greater number near said second end than near said first end.
Claim 12
Dependent Claim
34 words
The apparatus of claim 1, further comprising a plasma generator disposed around said hollow body, wherein said perforations are configured to maintain a plasma in said hollow body at a location in said interior.
Claim 13
Dependent Claim
12 words
The apparatus of claim 1 wherein said body comprises a quartz body.
Claim 14
Dependent Claim
16 words
The apparatus of claim 1 wherein said body comprises a plurality of materials along its length.
Claim 15
Dependent Claim
19 words
The apparatus of claim 13 wherein at least one of said materials comprises an inductively coupled plasma generating coil.
Claim 16
Dependent Claim
24 words
The apparatus of claim 14 wherein: said body comprises a quartz body; and, said coil comprises a radio frequency inductively coupled conductive metal coil.
Claim 17
Dependent Claim
12 words
The apparatus of claim 14 wherein said coil comprises a copper coil.
Claim 18
Dependent Claim
18 words
The apparatus of claim 1 further comprising an inductively coupled plasma generating coil disposed around said hollow body.
Claim 19
Dependent Claim
77 words
The apparatus of claim 1 wherein the gaseous reactant inlet is a shower head assembly extending into the reaction chamber and the substrate support is a reciprocally movable susceptor in the direction of the shower head assembly, and wherein: said hollow body comprises a cylindrically shaped body disposed between the shower head and the susceptor and said hollow body extending to be in close proximity with the susceptor, when the susceptor is extended toward the shower head.
Claim 20
Dependent Claim
17 words
The apparatus of claim 18 wherein said first end extends to at least the gaseous reactant inlet.
Claim 21
Independent Claim
135 words
A method of introducing gaseous reactants to a surface of a substrate comprising: placing a substrate having a surface into a reaction chamber; positioning a body in the chamber, the body having an interior, an exterior and cross sectional dimensions larger than the dimensions of the substrate such that the substrate is in close proximity to the interior of the body; providing a plurality of flow paths nonuniformly distributed between the interior and the exterior of the body to produce a desired flow pattern within the interior of the body near the surface of the substrate and a desired pressure drop from the interior to the exterior of the body when gaseous reactants are introduced into the interior of the body; and, introducing gaseous reactants into the interior of the body in the reaction chamber.
Claim 22
Independent Claim
135 words
A method of introducing gaseous reactants to a surface of a substrate comprising: placing a substrate having a surface into a reaction chamber; positioning a body in the chamber, the body having an interior, an exterior and cross sectional dimensions larger than the dimensions of the substrate such that the substrate is in close proximity to the interior of the body; providing a plurality of flow paths nonuniformly distributed between the interior and the exterior of the body to produce a desired flow pattern within the interior of the body near the surface of the substrate and a desired pressure drop from the interior to the exterior of the body when gaseous reactants are introduced into the interior of the body; and, introducing gaseous reactants into the interior of the body in the reaction chamber.
Claim 23
Dependent Claim
19 words
The method of claim 20 further comprising controlling the temperature and pressure within the reaction chamber to prespecified conditions.
Claim 24
Dependent Claim
24 words
The method of claim 20 wherein said step of introducing gaseous reactants further comprises introducing gaseous reactants directly into the interior of the body.
Claim 25
Dependent Claim
21 words
The method of claim 22 wherein said step of introducing gaseous reactants further comprises directing the gaseous reactants toward the substrate.
Claim 26
Dependent Claim
37 words
The method of claim 20 wherein said step of providing further comprises providing the plurality of flow paths as perforations in the body that are configured to cause a pressure differential within the interior of the body.
Claim 27
Dependent Claim
39 words
The method of claim 20 wherein said step of providing further comprises providing the plurality of flow paths as perforations in the body that are configured to support a plasma at a location in the interior of the body.
Claim 28
Dependent Claim
25 words
The method of claim 20 wherein said method comprises a method of performing chemical vapor deposition of gaseous reactants on a surface of a substrate.
Claim 29
Independent Claim
107 words
A method of controlling the flow of gaseous reactants in a reaction chamber comprising: positioning a body having an interior and an exterior in the reaction chamber between a gaseous reactants inlet into the chamber and a substrate support; providing a plurality of flow paths nonuniformly distributed between the interior and the exterior of the body to produce a desired flow pattern within the interior of the body and a desired pressure drop from the interior to the exterior of the body when gaseous reactants are introduced into the interior of the body; and, introducing gaseous reactants into the interior of the body in the reaction chamber.
Claim 30
Independent Claim
107 words
A method of controlling the flow of gaseous reactants in a reaction chamber comprising: positioning a body having an interior and an exterior in the reaction chamber between a gaseous reactants inlet into the chamber and a substrate support; providing a plurality of flow paths nonuniformly distributed between the interior and the exterior of the body to produce a desired flow pattern within the interior of the body and a desired pressure drop from the interior to the exterior of the body when gaseous reactants are introduced into the interior of the body; and, introducing gaseous reactants into the interior of the body in the reaction chamber.
Claim 31
Dependent Claim
34 words
The method of claim 27 wherein said step of providing further comprises providing the plurality of flow paths as perforations in the body that are configured to produce a pressure differential within said interior.
Claim 32
Dependent Claim
36 words
The method of claim 27 wherein said step of providing further comprises providing the plurality of flow paths as perforations in the body that are configured to support a plasma at a location in said interior.
Claim 33
Dependent Claim
25 words
The method of claim 27 wherein said method comprises a method of controlling the flow of gaseous reactants in a chemical vapor deposition reaction chamber.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-04-06 | 2001-10-06 | 2002-04-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-04-06 | 2005-10-06 | 2006-04-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-04-06 | 2009-10-06 | 2010-04-07 | $7700.00 | Window Closed / Lapsed |