US5589737A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Plasma processor for large workpieces
Assignee: Lam Research Corp
•
Filing: 1994-12-06
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Granted: 1996-12-31
•
Expires: 2014-12-06
Abstract
Abstract A plasma processor for large workpieces includes a vacuum chamber having plural individually supported dielectric windows for coupling an r.f. field originating outside of the chamber into the chamber to excite the plasma. A planar coil for inductively deriving the field has plural segments with the same electrical length, each including an element connected in parallel with an element of another segment.
Inventors
- 👤 Michael Barnes
- 👤 Neil Benjamin
- 👤 John Holland
- 👤 Richard Beer
- 👤 Robert Veltrop
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:15
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32192; H01J37/32211; H01J37/3222; H10; H10P; H10P95/00; H01J37/32082; H01J37/321; H01J37/32238
Claims Analysis
Total Claims: 38
Claim 1
Independent Claim
130 words
A device for treating a workpiece with a plasma comprising a vacuum chamber in which the workpiece is adapted to be mounted, means for introducing into the chamber a gas which can be converted into the plasma for treating the workpiece, means for converting the gas into the plasma including an electric source for producing an r.f. field originating outside of the chamber, plural individually supported dielectric windows on an exterior surface of the chamber positioned to couple the r.f. field to the gas so the field coupled through the windows excites the plasma, the windows having a thickness substantially less than the thickness of a single window having the same combined area as the plural windows to withstand the differential pressure between the interior and exterior of the chamber.
Claim 2
Independent Claim
130 words
A device for treating a workpiece with a plasma comprising a vacuum chamber in which the workpiece is adapted to be mounted, means for introducing into the chamber a gas which can be converted into the plasma for treating the workpiece, means for converting the gas into the plasma including an electric source for producing an r.f. field originating outside of the chamber, plural individually supported dielectric windows on an exterior surface of the chamber positioned to couple the r.f. field to the gas so the field coupled through the windows excites the plasma, the windows having a thickness substantially less than the thickness of a single window having the same combined area as the plural windows to withstand the differential pressure between the interior and exterior of the chamber.
Claim 3
Dependent Claim
26 words
The device of claim 1 wherein the electric source includes a single excitation device for producing the r.f. field that is coupled through the plural windows.
Claim 4
Dependent Claim
31 words
The device of claim 2 wherein the excitation device includes a single coil array that extends over the plural windows, the r.f. field being a magnetic field derived from the array.
Claim 5
Dependent Claim
19 words
The device of claim 3 wherein the coil array includes a planar coil that extends over the plural windows.
Claim 6
Dependent Claim
43 words
The device of claim 3 wherein the coil array has a pair of terminals connected to several electrically parallel segments via a pair of leads, the electrical length for current flow from the terminals through each of the segments being about the same.
Claim 7
Dependent Claim
44 words
The device of claim 3 wherein the coil has a pair of terminals connected to several electrically parallel segments via a pair of leads, the electrical and physical lengths for current flow from the terminals through each of the segments being about the same.
Claim 8
Dependent Claim
37 words
The device of claim 1 wherein the electric source includes plural excitation devices, one for and associated with each window, each excitation device being positioned to produce the r.f. field that is coupled through the associated window.
Claim 9
Dependent Claim
42 words
The device of claim 7 wherein each of the excitation devices includes a coil array positioned adjacent the window associated with the excitation device, the r.f. field including magnetic lines of flux derived from the coil arrays associated with the plural windows.
Claim 10
Dependent Claim
21 words
The device of claim 8 wherein each coil array includes a substantially planar coil that is positioned adjacent a particular window.
Claim 11
Dependent Claim
14 words
The device of claim 8 wherein the coil arrays are electrically connected in parallel.
Claim 12
Dependent Claim
17 words
The device of claim 10 wherein each of the coil arrays has about the same electrical length.
Claim 13
Dependent Claim
43 words
The device of claim 11 wherein each coil array has a pair of terminals connected to several electrically parallel segments via a pair of leads, the electrical length for current flow from the terminals through each of the segments being about the same.
Claim 14
Dependent Claim
45 words
The device of claim 11 wherein each coil array has a pair of terminals connected to several electrically parallel segments via a pair of leads, the electrical and physical lengths for current flow from the terminals through each of the segments being about the same.
Claim 15
Dependent Claim
43 words
The device of claim 1 wherein the surface includes a frame having plural openings, each with a separate window support structure, one of the windows being located in each of the openings and being carried by the support structure of the associated opening.
Claim 16
Dependent Claim
47 words
The device of claim 1 wherein the surface includes a frame having four openings arranged in quadrants, each opening including a separate window support structure, one of the windows being located in each of the openings and being carried by the support structure of the associated opening.
Claim 17
Independent Claim
142 words
A device for treating a workpiece with a plasma comprising a vacuum chamber in which the workpiece is adapted to be mounted, means for introducing into the chamber a gas which can be converted into the plasma for treating the workpiece, means for converting the gas into the plasma including a dielectric window on an exterior surface of the chamber, a coil positioned to couple an r.f. magnetic field to the gas via the window for exciting the gas to a plasma state, the coil including first and second terminals adapted to be connected to an r.f. source that causes the r.f. magnetic field to be derived and plural winding segments connected in parallel between the first and second terminals, at least two of the winding segments being in paths having about the same electric length between the first and second terminals.
Claim 18
Independent Claim
142 words
A device for treating a workpiece with a plasma comprising a vacuum chamber in which the workpiece is adapted to be mounted, means for introducing into the chamber a gas which can be converted into the plasma for treating the workpiece, means for converting the gas into the plasma including a dielectric window on an exterior surface of the chamber, a coil positioned to couple an r.f. magnetic field to the gas via the window for exciting the gas to a plasma state, the coil including first and second terminals adapted to be connected to an r.f. source that causes the r.f. magnetic field to be derived and plural winding segments connected in parallel between the first and second terminals, at least two of the winding segments being in paths having about the same electric length between the first and second terminals.
Claim 19
Dependent Claim
21 words
The device of claim 16 wherein a plurality of dielectric windows are included, the coil extending over said plural dielectric windows.
Claim 20
Dependent Claim
25 words
The device of claim 16 wherein a plurality of dielectric windows are included, a separate one of said coils being adjacent each of said windows.
Claim 21
Dependent Claim
20 words
The device of claim 18 wherein said separate coils are connected in parallel with each other to said r.f. source.
Claim 22
Dependent Claim
20 words
The device of claim 16 wherein the paths have about the same physical lengths between the first and second terminals.
Claim 23
Dependent Claim
32 words
The device of claim 20 wherein there are several of said winding segments and an equal number of said paths having about the same electric length between the first and second terminals.
Claim 24
Dependent Claim
35 words
The device of claim 21 wherein said several paths and winding segments are arranged so current from the r.f. source generally flows in the same direction through all of the segments at a particular time.
Claim 25
Dependent Claim
71 words
The device of claim 22 wherein the coil includes first and second elongated spatially parallel leads having the same cross section geometry, the first and second terminals being at opposite ends of the first and second leads, respectively, each of the several segments including an elongated element extending between the leads and having opposite ends connected to the leads, each of the elements having the same length and cross section geometry.
Claim 26
Dependent Claim
32 words
The device of claim 23 wherein each element has a length of no greater than about a 1/16 of a wavelength of a wave applied by the r.f. source to the coil.
Claim 27
Dependent Claim
61 words
The device of claim 21 wherein each segment includes at least one element, the paths, segments and elements being arranged so the elements extend generally parallel to each other and being arranged so the elements extend generally parallel to each other and current from the r.f. source generally flows in opposite directions in the elements that are next to each other.
Claim 28
Dependent Claim
72 words
The device of claim 25 wherein the coil includes first and second elongated spatially parallel leads having the same cross section geometry, the first and second terminals being at opposite ends of the first and second leads, respectively, each of the several segments including a pair of series connected elongated elements, the leads, elements and segments being arranged so the leads are adjacent each other generally to one side of the elements.
Claim 29
Dependent Claim
63 words
The device of claim 20 wherein the two paths having about the same physical and electrical lengths include: (a) first and second generally parallel elongated leads respectively connected to the first and second terminals, and (b) first and second coil elements that extend between the first and second leads, the terminals being connected to the leads at locations between the two coil segments.
Claim 30
Dependent Claim
53 words
The device of claim 16 wherein at least some of the paths having about the same electrical lengths have substantially different physical lengths across the terminals, the paths having substantially different physical lengths and about the same electrical lengths having reactances with different values causing the electrical lengths to be about the same.
Claim 31
Dependent Claim
33 words
The device of claim 25 wherein each of the paths has the same type of dominant reactive impedance value at the frequency of the current applied by the r.f. source to the coil.
Claim 32
Dependent Claim
36 words
The device of claim 29 wherein each of the paths includes an element connected between a pair of leads connected to the first and second terminals, each element having about the same physical and electrical length.
Claim 33
Dependent Claim
32 words
The device of claim 30 wherein each element has a length of no greater than about a 1/16 of a wavelength of a wave applied by the r.f. source to the coil.
Claim 34
Dependent Claim
25 words
The device of claim 29 wherein at least one of said leads has differing values of inductance between connections with adjacent pairs of said elements.
Claim 35
Dependent Claim
30 words
The device of claim 32 wherein the differing values of inductance are attained by providing the leads with different cross sectional areas between connections with adjacent pairs of said elements.
Claim 36
Dependent Claim
47 words
The device of claim 29 wherein at least some of the paths include a series capacitor having a reactive impedance value at the frequency of the current applied by the r.f. source to the coil, the series capacitors causing the paths to have about the same lengths.
Claim 37
Dependent Claim
35 words
The device of claim 34 wherein the series capacitors have values causing each path to have a dominant capacitive impedance value at the frequency of the current applied by the r.f. source to the coil.
Claim 38
Dependent Claim
35 words
The device of claim 34 wherein the series capacitors have values causing each path to have a dominant inductive impedance value at the frequency of the current applied by the r.f. source to the coil.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-12-31 | 2000-07-01 | 2000-12-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-12-31 | 2004-07-01 | 2004-12-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-12-31 | 2008-07-01 | 2008-12-31 | $7700.00 | Window Closed / Lapsed |