US5309063A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Inductive coil for inductively coupled plasma production apparatus
Assignee: Sarnoff Corp
•
Filing: 1993-03-04
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Granted: 1994-05-03
•
Expires: 2013-03-04
Abstract
Abstract The invention is directed to an induction coil which includes a flat spirally wound portion and a tubular spirally wound portion extending from the outer edge of the flat portion. The axis of the tubular portion is substantially perpendicular to the flat portion. The coil is useful in a plasma production apparatus which includes a chamber having walls and adapted to be evacuated. A window extends into the chamber from one of the walls. The coil is in the window with the flat portion being at the bottom of the window.
Inventors
- 👤 Bawa Singh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 15:36
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32082; H01J37/321
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
43 words
An induction coil comprising a flat coil portion having a plurality of turns and a tubular coil portion extending from the outer edge of the flat coil portion, the axis of the tubular coil portion being substantially perpendicular to the flat coil portion.
Claim 2
Dependent Claim
43 words
An induction coil comprising a flat coil portion having a plurality of turns and a tubular coil portion extending from the outer edge of the flat coil portion, the axis of the tubular coil portion being substantially perpendicular to the flat coil portion.
Claim 3
Dependent Claim
35 words
The coil of claim 1 wherein the coil is of a conductor material wound in a flat spiral to form the flat coil portion and in a tubular spiral to form the tubular coil portion.
Claim 4
Dependent Claim
15 words
The coil of claim 2 in which the coil is of a solid conductive material.
Claim 5
Dependent Claim
14 words
The coil of claim 2 in which the coil is of a hollow tube.
Claim 6
Dependent Claim
13 words
The coil of claim 2 in which the tubular coil portion is cylindrical.
Claim 7
Dependent Claim
13 words
The coil of claim 2 in which the tubular coil portion is conical.
Claim 8
Dependent Claim
24 words
The coil of claim 2 in which the coil has a pair of ends and terminals are connected to the ends of the coil.
Claim 9
Dependent Claim
72 words
A plasma production apparatus comprising: a chamber having walls and adapted to be placed under a vacuum; an electrode in the chamber; a cup-shaped window extending into the chamber through one of the walls; and an induction coil in the well formed by the window, said coil having a flat coil portion with a plurality of turns at the bottom of the well and a tubular portion extending from the flat portion.
Claim 10
Dependent Claim
72 words
A plasma production apparatus comprising: a chamber having walls and adapted to be placed under a vacuum; an electrode in the chamber; a cup-shaped window extending into the chamber through one of the walls; and an induction coil in the well formed by the window, said coil having a flat coil portion with a plurality of turns at the bottom of the well and a tubular portion extending from the flat portion.
Claim 11
Dependent Claim
36 words
The apparatus of claim 8 in which the induction coil is of a conductor material wound in a flat spiral to form the flat portion and then in a tubular spiral to form the tubular portion.
Claim 12
Dependent Claim
16 words
The apparatus of claim 9 in which the induction coil is of a solid conductive material.
Claim 13
Dependent Claim
15 words
The apparatus of claim 9 in which the induction coil is of a hollow tube.
Claim 14
Dependent Claim
16 words
The apparatus of claim 9 in which the tubular portion of the induction coil is cylindrical.
Claim 15
Dependent Claim
16 words
The apparatus of claim 9 in which the tubular portion of the induction coil is conical.
Claim 16
Dependent Claim
26 words
The apparatus of claim 9 in which the induction coil has a pair of ends and a terminal is attached to each end of the coil.
Claim 17
Dependent Claim
14 words
The apparatus of claim 8 in which the window is of a conductive material.
Claim 18
Dependent Claim
25 words
The apparatus of claim 8 in which the window is of an insulating material and is coated on its outer surface with a conductive material.
References Cited (Backward Citations)
US2015885A
Cited
US3384773A
Cited
US3546522A
Cited
US4206387A
Cited
US4836140A
Cited
US4844775A
Cited
US4894589A
Cited
US5007373A
Cited
US4948458A
Cited
US4982140A
Cited
US5047693A
Cited
US5140227A
Cited
US5162699A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-05-02 | 1997-11-01 | 1998-05-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-05-02 | 2001-11-01 | 2002-05-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-05-02 | 2005-11-01 | 2006-05-03 | $7700.00 | Window Closed / Lapsed |