US5006192A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for producing semiconductor devices
Assignee: Mitsubishi Electric Corp
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Filing: 1988-11-21
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Granted: 1991-04-09
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Expires: 2008-11-21
Abstract
Abstract An apparatus for treating wafers utilizing the plasma produced by a gas discharge and a method of cleaning such apparatus are disclosed. The apparatus is equipped with a device for forming a high voltage electric field in a space outside of the discharge space in which the wafer treating plasma is generated. The cleaning of the inner surfaces of the vacuum vessel of the apparatus is effected during the periods between the treatments by means of the plasma generated by the gas discharge started and sustained by the electric field device as well as by a main electrode for maintaining the treating discharge. The device for forming a high voltage electric field as mentioned above may comprise a limiter electrode surrounding the treating discharge space; alternatively, it may comprise an auxiliary electrode disposed in the space outside the treating discharge space. First, an etching gas capable of etching the films deposited on the inner surfaces of the vessel of the apparatus is introduced into the vessel as the discharge gas in the cleaning process; next, hydrogen is introduced into the vessel to remove the impurities adsorbed on the surfaces of the vessel. The etching gas may comprise hydrogen or argon.
Inventors
- 👤 Mikio Deguchi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 06:35
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32798; H01J37/32853; H01J37/32862; Y; Y10; Y10S; Y10S438/00; Y10S438/905
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
214 words
An apparatus for treating wafers utilizing a plasma produced by a gas discharge comprising: an electrically conductive, grounded vacuum vessel; a main electrode, an opposing electrode, means for supporting a wafer, said means for supporting a wafer being disposed on one of said main and opposing electrodes, and a limiter electrode disposed between said main and opposing electrodes, said main, opposing, and limiter electrodes being disposed within said vacuum vessel and generally enclosing a first discharge space and defining a second discharge space outside the first discharge space within said vacuum vessel; means for introducing a gas into said vacuum vessel; a high voltage source having a high voltage terminal and a ground terminal for forming a high voltage electrical field in the first discharge space and generating a plasma in the first discharge space in a gas introduced into said vacuum vessel, one of said main and opposing electrodes being electrically connected to said high voltage terminal and the other of said main and opposing electrodes being electrically connected to said ground terminal; and means for selectively alternatively electrically connecting said limiter electrode to said ground terminal for generating the plasma in the first discharge space and to said high voltage terminal for generating a plasma in the first and second discharge spaces.
Claim 2
Independent Claim
214 words
An apparatus for treating wafers utilizing a plasma produced by a gas discharge comprising: an electrically conductive, grounded vacuum vessel; a main electrode, an opposing electrode, means for supporting a wafer, said means for supporting a wafer being disposed on one of said main and opposing electrodes, and a limiter electrode disposed between said main and opposing electrodes, said main, opposing, and limiter electrodes being disposed within said vacuum vessel and generally enclosing a first discharge space and defining a second discharge space outside the first discharge space within said vacuum vessel; means for introducing a gas into said vacuum vessel; a high voltage source having a high voltage terminal and a ground terminal for forming a high voltage electrical field in the first discharge space and generating a plasma in the first discharge space in a gas introduced into said vacuum vessel, one of said main and opposing electrodes being electrically connected to said high voltage terminal and the other of said main and opposing electrodes being electrically connected to said ground terminal; and means for selectively alternatively electrically connecting said limiter electrode to said ground terminal for generating the plasma in the first discharge space and to said high voltage terminal for generating a plasma in the first and second discharge spaces.
Claim 3
Dependent Claim
41 words
An apparatus for treating wafers as claimed in claim 1 comprising: an electrical shield disposed adjacent said main electrode outside of the first discharge space; and means for alternatively electrically connecting said electrical shield to said high voltage and ground terminals.
Claim 4
Dependent Claim
22 words
An apparatus for treating wafers as claimed in claim 1 wherein said high voltage source comprises a high frequency electrical signal generator.
Claim 5
Dependent Claim
27 words
An apparatus for treating wafers as claimed in claim 3 wherein said high frequency electrical signal generator produces an electrical field at a frequency of 13.56 MHz.
Claim 6
Dependent Claim
22 words
An apparatus for treating wafers as claimed in claim 1 wherein said high voltage source comprises a D.C. electrical field signal generator.
Claim 7
Dependent Claim
20 words
An apparatus for treating wafers as claimed in claim 1 wherein said high voltage source comprises a microwave signal generator.
Claim 8
Independent Claim
227 words
An apparatus for treating wafers utilizing a plasma produced by a gas discharge comprising: an electrically conductive, grounded vacuum vessel; a main electrode, an opposing electrode, means for supporting a wafer, said means for supporting a wafer being disposed on one of said main and opposing electrodes, and a grounded limiter electrode disposed between said main and opposing electrodes, said main, opposing, and limiter electrodes being disposed within said vacuum vessel and generally enclosing a first discharge space; means for introducing a gas into said vacuum vessel; a high voltage source having a high voltage terminal and a ground terminal for forming a high voltage electrical field in the first discharge space and generating a plasma in the first discharge space in a gas introduced into said vacuum vessel, one of said main and opposing electrodes being electrically connected to said high voltage terminal and the other of said main and opposing electrodes being electrically connected to said ground terminal; an auxiliary electrode disposed in said vacuum vessel outside the first discharge space and defining a second discharge space between said auxiliary electrode and said vacuum vessel; and means for selectively alternatively electrically connecting said auxiliary electrode to said ground terminal for generating the plasma in the first discharge space and to said high voltage terminal for generating a plasma in the first and second discharge spaces.
Claim 9
Independent Claim
227 words
An apparatus for treating wafers utilizing a plasma produced by a gas discharge comprising: an electrically conductive, grounded vacuum vessel; a main electrode, an opposing electrode, means for supporting a wafer, said means for supporting a wafer being disposed on one of said main and opposing electrodes, and a grounded limiter electrode disposed between said main and opposing electrodes, said main, opposing, and limiter electrodes being disposed within said vacuum vessel and generally enclosing a first discharge space; means for introducing a gas into said vacuum vessel; a high voltage source having a high voltage terminal and a ground terminal for forming a high voltage electrical field in the first discharge space and generating a plasma in the first discharge space in a gas introduced into said vacuum vessel, one of said main and opposing electrodes being electrically connected to said high voltage terminal and the other of said main and opposing electrodes being electrically connected to said ground terminal; an auxiliary electrode disposed in said vacuum vessel outside the first discharge space and defining a second discharge space between said auxiliary electrode and said vacuum vessel; and means for selectively alternatively electrically connecting said auxiliary electrode to said ground terminal for generating the plasma in the first discharge space and to said high voltage terminal for generating a plasma in the first and second discharge spaces.
References Cited (Backward Citations)
US4134817A
Cited
US4352725A
Cited
EP0034706A2
Cited
US4512283A
Cited
US4464223B1
Cited
US4464223A
Cited
US4585516A
Cited
JPS622619A
Cited
JPS6218030A
Cited
US4767641A
Cited
JPS63221620A
Cited
US4786392A
Cited
JPS6411872A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-04-08 | 1994-10-08 | 1995-04-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-04-08 | 1998-10-08 | 1999-04-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-04-08 | 2002-10-08 | 2003-04-09 | $7700.00 | Window Closed / Lapsed |