Patent US5722162A successfully refreshed from Google Patents.
US5722162A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Fabrication procedure for a stable post
Assignee: Fujitsu Ltd
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Filing: 1995-10-12
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Granted: 1998-03-03
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Expires: 2015-10-12
Abstract
Abstract An interconnecting post for mounting a microelectronic device such as an integral circuit chip is fabricated with generally uniform cross-section, by forming a first layer of positive photoresist on a substrate, soft-baking that first layer and exposing it for a short time with a wide-apertured mask or simply a UV blank flood exposure. Without developing the first layer, a second layer of positive resist is then applied over the first layer, soft-baked, and then exposed with a narrow-apertured mask. During the soft-baking of the second layer, some of its activator in the photoresist compound diffuses into the exposed portion of the first layer and modifies its solubility in such a way that, when the layers are subsequently developed, the developer partially undercuts the unexposed portion of the first layer to form in the photoresist an opening of generally uniform cross-section. This opening can then be filled by plating to produce a strong, integral interconnect post.
Inventors
- 👤 William T. Chou
- 👤 Solomon I. Beilin
- 👤 David A. Horine
- 👤 David Kudzuma
- 👤 Michael G. Lee
- 👤 Larry Louis Moresco
- 👤 Wen-chou Vincent Wang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 21:46
CPC Classifications
H; H05; H05K; H05K3/00; H05K3/40; H05K3/4007; H10; H10W; H10W70/00; H10W70/099; H05K2201/00; H05K2201/03; H05K2201/0332; H05K2201/0335; H05K2201/0347; H05K2201/0364; H05K2201/0367; H05K2203/00; H05K2203/05; H05K2203/0562; H05K2203/0577; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/49155; Y10T29/49165; Y10T29/49204
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
197 words
A method of forming an aperture, which may be used to fabricate a post on a substrate, said method comprising the steps of: a) forming on said substrate a first layer of positive photoresist; b) after step (a) has been performed, exposing a first portion of said first layer to an amount of actinic radiation which is insufficient to render the exposed first portion fully soluble in a developing solution; c) after step (b) has been performed, applying a second layer of positive photoresist over said first layer, said second layer having a second portion which overlies said first portion of said first layer; d) after step (c) has been performed, pattern exposing said second portion to an amount of actinic radiation which is sufficient to render said second portion soluble in a developing solution, said pattern exposing step further exposing a part of said first portion which is beneath said second portion to render it soluble in said developing solution; and e) after step (d) have been performed, developing said first and second layers to remove photoresist material from said first and second portions and to thereby form an aperture in said first and second layers.
Claim 2
Independent Claim
197 words
A method of forming an aperture, which may be used to fabricate a post on a substrate, said method comprising the steps of: a) forming on said substrate a first layer of positive photoresist; b) after step (a) has been performed, exposing a first portion of said first layer to an amount of actinic radiation which is insufficient to render the exposed first portion fully soluble in a developing solution; c) after step (b) has been performed, applying a second layer of positive photoresist over said first layer, said second layer having a second portion which overlies said first portion of said first layer; d) after step (c) has been performed, pattern exposing said second portion to an amount of actinic radiation which is sufficient to render said second portion soluble in a developing solution, said pattern exposing step further exposing a part of said first portion which is beneath said second portion to render it soluble in said developing solution; and e) after step (d) have been performed, developing said first and second layers to remove photoresist material from said first and second portions and to thereby form an aperture in said first and second layers.
Claim 3
Dependent Claim
24 words
The method of claim 1 further comprising the steps of filling said aperture with electrically conductive material to form a post in said aperture.
Claim 4
Dependent Claim
15 words
The method of claim 2 wherein said filling step comprises the steps of plating material.
Claim 5
Dependent Claim
18 words
The method of claim 2, further comprising the step of removing said photoresist layers after said filling step.
Claim 6
Dependent Claim
17 words
The method of claim 1, in which said second layer is substantially thicker than said first layer.
Claim 7
Dependent Claim
38 words
The method of claim 5, in which said first layer has a thickness of between about 5 μm and about 15 μm, and said second layer has a thickness of between about 35 μm and about 50 μm.
Claim 8
Dependent Claim
25 words
The method of claim 5, in which said first layer is exposed substantially for less than five seconds at substantially 40 mW/cm2 with ultraviolet radiation.
Claim 9
Dependent Claim
45 words
The method of claim 1, in which said first layer is exposed for a period sufficiently short to prevent interfering with the mixing of photoactive compounds from said first and second layers when said second layer is applied over exposed areas of said first layer.
Claim 10
Dependent Claim
30 words
The method of claim 8, in which said first layer is exposed substantially for a period of less than 20 seconds at an ultraviolet light intensity of substantially 40 mW/cm2.
Claim 11
Dependent Claim
22 words
The method of claim 1, in which said step (b) of exposing said first layer comprises the step of blank flood exposure.
Claim 12
Dependent Claim
23 words
The method of claim 1 wherein the aperture area of said first portion is larger than the aperture area of said second portion.
Claim 13
Dependent Claim
27 words
The method of claim 1, in which the step (b) exposes said first layer to an integrated dosage of actinic radiation of not more than 800 mW/cm2-seconds.
Claim 14
Independent Claim
181 words
A method of forming a structure of substantially uniform cross-sectional area on a substrate, comprising sequentially the steps of: a) forming a first layer of a material not normally soluble in a developing solution but becoming soluble therein upon exposure to actinic radiation, said material including an insolubilizing compound capable of diffusing into solubilized portions of said material to modify their solubility; b) exposing, a first selected area of said first layer to a first dosage of said actinic radiation; c) forming a second layer of said material over said first layer; d) diffusing said insolubilizing compound of said second layer into a portion of said selected area of said first layer; e) exposing a second selected area of said first and second layers to a second dosage of said actinic radiation which is greater than said first dosage, said second selected area being within said first selected area; f) developing said material with said developing solution to form aligned openings in said first and second layers; and g) filling said openings simultaneously with a second material to form said structure.
Claim 15
Independent Claim
181 words
A method of forming a structure of substantially uniform cross-sectional area on a substrate, comprising sequentially the steps of: a) forming a first layer of a material not normally soluble in a developing solution but becoming soluble therein upon exposure to actinic radiation, said material including an insolubilizing compound capable of diffusing into solubilized portions of said material to modify their solubility; b) exposing, a first selected area of said first layer to a first dosage of said actinic radiation; c) forming a second layer of said material over said first layer; d) diffusing said insolubilizing compound of said second layer into a portion of said selected area of said first layer; e) exposing a second selected area of said first and second layers to a second dosage of said actinic radiation which is greater than said first dosage, said second selected area being within said first selected area; f) developing said material with said developing solution to form aligned openings in said first and second layers; and g) filling said openings simultaneously with a second material to form said structure.
Claim 16
Dependent Claim
16 words
The method of claim 13, in which said filling step includes plating said material with metal.
Claim 17
Dependent Claim
19 words
The method of claim 13, in which said first selected area is substantially larger than said second selected area.
Claim 18
Dependent Claim
21 words
The method of claim 13, wherein the step (d) of diffusing comprises the step of heating the first and second layers.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2001-03-02 | 2001-09-01 | 2002-03-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2005-03-02 | 2005-09-01 | 2006-03-03 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2009-03-02 | 2009-09-01 | 2010-03-03 | $7700.00 | Window Closed / Lapsed |