US5206117A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Photosensitive polyamic alkyl ester composition and process for its use
Assignee: International Business Machines Corp
•
Filing: 1992-03-13
•
Granted: 1993-04-27
•
Expires: 2012-03-13
Abstract
Abstract The present invention relates to photosensitive negative and positive tone compositions for imagewise deposition of polyimide on a substrate.
Inventors
- 👤 Jeffrey W. Labadie
- 👤 Dennis R. McKean
- 👤 Willi Volksen
- 👤 Gregory M. Wallraff
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 15:09
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/038; G03F7/0387; G03F7/0045; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/106; Y10S430/107; Y10S430/109; Y10S430/114; Y10S430/12
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
45 words
A process for generating a negative tone image of polyimide on a substrate comprising the steps of: (a) coating the substrate with a film comprising polyamic alkyl ester and a photosensitive base generator; (b) imagewise exposing the film to radiation; and (c) developing the image.
Claim 2
Dependent Claim
45 words
A process for generating a negative tone image of polyimide on a substrate comprising the steps of: (a) coating the substrate with a film comprising polyamic alkyl ester and a photosensitive base generator; (b) imagewise exposing the film to radiation; and (c) developing the image.
Claim 3
Dependent Claim
39 words
The process of claim 1 wherein said polyimide is selected from poly(p-phenylene biphenyltetracarboximide), poly(p-oxydiphenylene pyromellitimide), poly [bis (trifluoromethyl biphenylene) pyromellitimide], poly [bis (trifluoromethyl biphenylene) biphenyltetracarboximide], poly (oxydiphenylene biphenyl tetracarboximide) poly (p-phenylene oxydiphthalimide) poly(hexafluoroisopropyldene diphenylene biphenyl tetracarboximide) or copolymers therof.
Claim 4
Dependent Claim
12 words
The process of claim 1 wherein the base generator is benzyl carbamate.
References Cited (Backward Citations)
US2880230A
Cited
US3179633A
Cited
US3179630A
Cited
US3179632A
Cited
US3179631A
Cited
US3261811A
Cited
US3282898A
Cited
US3316212A
Cited
US3376260A
Cited
US3423366A
Cited
US3518219A
Cited
US4252707A
Cited
US4218555A
Cited
US4242437A
Cited
US4451551A
Cited
US4898806A
Cited
US4847359A
Cited
US4849501A
Cited
EP0425142A2
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1996-04-26 | 1996-10-26 | 1997-04-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2000-04-26 | 2000-10-26 | 2001-04-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2004-04-26 | 2004-10-26 | 2005-04-27 | $7700.00 | Window Closed / Lapsed |