Field-effect transistor

Claim 2

A transistor having a cross-section comprising: a p-type substrate having a first surface; a gate disposed adjacent the first surface of the substrate; first and second n-doped source-drain regions formed within the substrate adjacent the gate, each source-drain region having a first doping concentration and extending into said substrate at a selected depth; a channel region within said substrate and abutting both said first and second source-drain regions; a first contact pad formed over a portion of said first source-drain region; and a first lightly doped n-region formed within the substrate, said lightly doped n-region spaced from said first surface by said first source-drain region, said lightly doped n-region having a doping concentration less than said first doping concentration, said lightly doped n-region disposed entirely below a continuous portion of said first source-drain region.

Claim 3

The transistor of claim 1 further comprising: a second contact pad formed over a portion of the second source-drain region: and a lightly doped n-region below the second contact pad.

Claim 4

The transistor of claim 1 wherein said first source-drain region extends a first selected depth from the surface of said substrate and said lightly doped n-region extends a second selected depth from the first surface of said substrate, wherein said second selected is depth five to seven times deeper than the depth of said first selected depth.

Claim 5

The transistor of claim 1 wherein said substrate comprises silicon.

Claim 6

The transistor of claim 1 wherein said n-doped source drain regions are doped with arsenic dopants.

Claim 7

The transistor of claim 1 and further comprising field insulation regions adjacent said source-drain regions.

Claim 8

The transistor of claim 1 wherein said gate comprises aluminum.

Claim 9

The transistor of claim 4 and further comprising a lightly doped drain region formed adjacent said channel.

Claim 10

The transistor of claim 1 and further comprising a double diffused drain region formed in said substrate.

Claim 11

A semiconductor device, comprising of: a conductive region disposed at an upper surface of a semiconductor region of a first conductivity type; first and second doped regions formed within said semiconductor region adjacent said conductive region and separated by an underlying region, said underlying region disposed beneath said conductive region, wherein each of said first and second doped regions abuts said underlying region, said doped regions having a selected first doping concentration of a second conductivity type opposite said first conductivity type; a first contact pad formed over a portion of said first doped region and laterally extending a selected length across an upper surface of said first doped region; a first well region of said second conductivity type formed within said first doped region and laterally extending beyond said selected length, said first well region extending through said first doped region into said semiconductor region, said first well region spaced from said underlying region, said first well region having a doping concentration which is less than said first doping concentration; a second contact pad formed over a portion of said second doped region; and a second well region of said second conductivity type formed within said second doped region, said second well region extending through said second doped region into said semiconductor region, said second well region spaced from said underlying region.

Claim 12

A semiconductor device, comprising of: a conductive region disposed at an upper surface of a semiconductor region of a first conductivity type; first and second doped regions formed within said semiconductor region adjacent said conductive region and separated by an underlying region, said underlying region disposed beneath said conductive region, wherein each of said first and second doped regions abuts said underlying region, said doped regions having a selected first doping concentration of a second conductivity type opposite said first conductivity type; a first contact pad formed over a portion of said first doped region and laterally extending a selected length across an upper surface of said first doped region; a first well region of said second conductivity type formed within said first doped region and laterally extending beyond said selected length, said first well region extending through said first doped region into said semiconductor region, said first well region spaced from said underlying region, said first well region having a doping concentration which is less than said first doping concentration; a second contact pad formed over a portion of said second doped region; and a second well region of said second conductivity type formed within said second doped region, said second well region extending through said second doped region into said semiconductor region, said second well region spaced from said underlying region.

Claim 13

The device of claim 10 wherein said first conductivity type comprises a p-doped material and said second conductivity type comprises an n-doped material.

Claim 14

The device of claim 11 wherein said doped regions are doped with arsenic dopants.

Claim 15

The device of claim 10 wherein said first source-drain region extends a first selected depth from the upper surface of said semiconductor and said well first region extends a second selected depth from the upper surface of said semiconductor region, said second selected depth is five to seven times the depth of said first selected depth.

Claim 16

The device of claim 10 wherein said semiconductor region comprises silicon.

Claim 17

The device of claim 10 and further comprising field insulation regions adjacent said doped regions.

Claim 18

The device of claim 10 wherein said conductive region comprises aluminum.

Claim 19

The device of claim 10 wherein said conductive region comprises polysilicon.

Claim 20

The device of claim 10 where said second well region has a doping concentration less than said selected first doping concentration.