Recessed gate field effect transistor

Claim 2

A semiconductor device comprising: a compound semiconductor body having a surface and a recess at the surface, the recess having a bottom and a hollow in the center of the bottom; and a refractory metal gate electrode having a lower portion disposed within the hollow, the compound semiconductor body comprising: a compound semiconductor structure having a surface; a channel layer comprising a compound semiconductor of a first conductivity type, containing a dopant impurity, and having a dopant impurity concentration, the channel layer being located at a region of the surface of the compound semiconductor substrate directly between the gate electrode and the compound semiconductor substrate; first active layers comprising the compound semiconductor, of first conductivity type, containing the dopant impurity, and having a dopant impurity concentration, the first active layers being located on regions of the surface of the compound semiconductor substrate in the recess where the channel layer is not present; and second active layers comprising the compound semiconductor, of the first conductivity type, containing the dopant impurity, and having a dopant impurity concentration, the second active layers being located on regions of the surface of the compound semiconductor substrate sandwiching the recess, wherein the dopant impurity concentration of the first active layers is higher than the dopant impurity concentration of the channel layer, and the dopant impurity concentration of the second active layers is higher than the dopant impurity concentration of the first active layers.

Claim 3

The semiconductor device of claim 1 wherein the compound semiconductor body further comprises a first compound semiconductor layer having a second conductivity type, opposite the first conductivity type, containing a dopant impurity, and having a dopant impurity concentration, the first compound semiconductor layer being disposed on a side of the channel layer and the first active layers opposite a side where the refractory metal gate electrode is located.

Claim 4

The semiconductor device of claim 1 wherein the compound semiconductor body comprises: a first compound semiconductor layer having a second conductivity type, opposite the first conductivity type, containing a dopant impurity, and having a dopant impurity concentration, the first compound semiconductor layer being disposed on a side of the channel layer opposite a side where the refractory metal gate electrode is located; and second compound semiconductor layers having the second conductivity type, containing a dopant impurity, and having a dopant impurity concentration, the second compound semiconductor layers being disposed on a side of the first active layers opposite a side where the refractory metal gate electrode is located.

Claim 5

The semiconductor device of claim 3 wherein the dopant impurity concentration of the first compound semiconductor layer is higher than the dopant impurity concentration of the second compound semiconductor layers.

Claim 6

The semiconductor device of claim 3 wherein the dopant impurity concentration of the second compound semiconductor layers is higher than the dopant impurity concentration of the first compound semiconductor layer.

Claim 7

A semiconductor device comprising: a compound semiconductor body having a surface and a recess at the surface, the recess having a bottom and a hollow in the center of the bottom; and a refractory metal gate electrode having a lower portion disposed within the hollow, the compound semiconductor body comprising: a compound semiconductor structure having a surface; a channel layer comprising a compound semiconductor of a first conductivity type, containing a dopant impurity, and having a dopant impurity concentration, the channel layer being located at a region of the surface of the compound semiconductor substrate directly between the gate electrode and the compound semiconductor substrate; first active layers comprising the compound semiconductor, of first conductivity type, containing the dopant impurity, and having a dopant impurity concentration, the first active layers being located on regions of the surface of the compound semiconductor substrate in the recess where the channel layer is not present; and second active layers comprising the compound semiconductor, of the first conductivity type, containing the dopant impurity, and having a dopant impurity concentration, the second active layers being located on regions of the surface of the compound semiconductor substrate sandwiching the recess, wherein the compound semiconductor body further comprises a first compound semiconductor layer having a second conductivity type, opposite the first conductivity type, containing a dopant impurity, and having a dopant impurity concentration, the first compound semiconductor layer being disposed on a side of the channel layer and the first active layers opposite a side where the refractory metal gate electrode is located.

Claim 8

A semiconductor device comprising: a compound semiconductor body having a surface and a recess at the surface, the recess having a bottom and a hollow in the center of the bottom; and a refractory metal gate electrode having a lower portion disposed within the hollow, the compound semiconductor body comprising: a compound semiconductor structure having a surface; a channel layer comprising a compound semiconductor of a first conductivity type, containing a dopant impurity, and having a dopant impurity concentration, the channel layer being located at a region of the surface of the compound semiconductor substrate directly between the gate electrode and the compound semiconductor substrate; first active layers comprising the compound semiconductor, of first conductivity type, containing the dopant impurity, and having a dopant impurity concentration, the first active layers being located on regions of the surface of the compound semiconductor substrate in the recess where the channel layer is not present; and second active layers comprising the compound semiconductor, of the first conductivity type, containing the dopant impurity, and having a dopant impurity concentration, the second active layers being located on regions of the surface of the compound semiconductor substrate sandwiching the recess, wherein the compound semiconductor body further comprises a first compound semiconductor layer having a second conductivity type, opposite the first conductivity type, containing a dopant impurity, and having a dopant impurity concentration, the first compound semiconductor layer being disposed on a side of the channel layer and the first active layers opposite a side where the refractory metal gate electrode is located.

Claim 9

A semiconductor device comprising: a compound semiconductor body having a surface and a recess at the surface, the recess having a bottom and a hollow in the center of the bottom; and a refractory metal gate electrode having a lower portion disposed within the hollow, the compound semiconductor body comprising: a compound semiconductor structure having a surface; a channel layer comprising a compound semiconductor of a first conductivity type, containing a dopant impurity, and having a dopant impurity concentration, the channel layer being located at a region of the surface of the compound semiconductor substrate directly between the gate electrode and the compound semiconductor substrate; first active layers comprising the compound semiconductor, of first conductivity type, containing the dopant impurity, and having a dopant impurity concentration, the first active layers being located on regions of the surface of the compound semiconductor substrate in the recess where the channel layer is not present; second active layers comprising the compound semiconductor, of the first conductivity type, containing the dopant impurity, and having a dopant impurity concentration, the second active layers being located on regions of the surface of the compound semiconductor substrate sandwiching the recess; a first compound semiconductor layer having a second conductivity type, opposite the first conductivity type, containing a dopant impurity, and having a dopant impurity concentration, the first compound semiconductor layer being disposed on a side of the channel layer opposite a side where the refractory metal gate electrode is located; and second compound semiconductor layers having the second conductivity type, containing a dopant impurity, and having a dopant impurity concentration, the second compound semiconductor layers being disposed on a side of the first active layers opposite a side where the refractory metal gate electrode is located.

Claim 10

A semiconductor device comprising: a compound semiconductor body having a surface and a recess at the surface, the recess having a bottom and a hollow in the center of the bottom; and a refractory metal gate electrode having a lower portion disposed within the hollow, the compound semiconductor body comprising: a compound semiconductor structure having a surface; a channel layer comprising a compound semiconductor of a first conductivity type, containing a dopant impurity, and having a dopant impurity concentration, the channel layer being located at a region of the surface of the compound semiconductor substrate directly between the gate electrode and the compound semiconductor substrate; first active layers comprising the compound semiconductor, of first conductivity type, containing the dopant impurity, and having a dopant impurity concentration, the first active layers being located on regions of the surface of the compound semiconductor substrate in the recess where the channel layer is not present; second active layers comprising the compound semiconductor, of the first conductivity type, containing the dopant impurity, and having a dopant impurity concentration, the second active layers being located on regions of the surface of the compound semiconductor substrate sandwiching the recess; a first compound semiconductor layer having a second conductivity type, opposite the first conductivity type, containing a dopant impurity, and having a dopant impurity concentration, the first compound semiconductor layer being disposed on a side of the channel layer opposite a side where the refractory metal gate electrode is located; and second compound semiconductor layers having the second conductivity type, containing a dopant impurity, and having a dopant impurity concentration, the second compound semiconductor layers being disposed on a side of the first active layers opposite a side where the refractory metal gate electrode is located.

Claim 11

The semiconductor device of claim 7 wherein the dopant impurity concentration of the first compound semiconductor layer is higher than the dopant impurity concentration of the second compound semiconductor layers.

Claim 12

The semiconductor device of claim 7 wherein the dopant impurity concentration of the second compound semiconductor layers is higher than the dopant impurity concentration of the first compound semiconductor layer.

Claim 13

A semiconductor device comprising: a compound semiconductor body having a surface and a recess at the surface, the recess having a bottom and a hollow in the center of the bottom; and a refractory metal gate electrode having a lower portion disposed within the hollow, the compound semiconductor body comprising : a compound semiconductor structure having a surface; a channel layer comprising a compound semiconductor of a first conductivity type, containing a dopant impurity, and having a dopant impurity concentration, the channel layer being located at a region of the surface of the compound semiconductor substrate directly between the gate electrode and the compound semiconductor substrate; first active layers comprising the compound semiconductor, of first conductivity type, containing the dopant impurity, and having a dopant impurity concentration, the first active layers being located on regions of the surface of the compound semiconductor substrate in the recess where the channel layer is not present; and second active layers comprising the compound semiconductor, of the first conductivity type, containing the dopant impurity, and having a dopant impurity concentration, the second active layers being located on regions of the surface of the compound semiconductor substrate sandwiching the recess, wherein each of the first active layers includes a recess at a surface of the respective first active layers opposite the semiconductor substrate and adjacent the hollow, extending from an interface of the channel layer and a refractory metal gate electrode into only part of the respective first active layer.

Claim 14

A semiconductor device comprising: a compound semiconductor body having a surface and a recess at the surface, the recess having a bottom and a hollow in the center of the bottom; and a refractory metal gate electrode having a lower portion disposed within the hollow, the compound semiconductor body comprising : a compound semiconductor structure having a surface; a channel layer comprising a compound semiconductor of a first conductivity type, containing a dopant impurity, and having a dopant impurity concentration, the channel layer being located at a region of the surface of the compound semiconductor substrate directly between the gate electrode and the compound semiconductor substrate; first active layers comprising the compound semiconductor, of first conductivity type, containing the dopant impurity, and having a dopant impurity concentration, the first active layers being located on regions of the surface of the compound semiconductor substrate in the recess where the channel layer is not present; and second active layers comprising the compound semiconductor, of the first conductivity type, containing the dopant impurity, and having a dopant impurity concentration, the second active layers being located on regions of the surface of the compound semiconductor substrate sandwiching the recess, wherein each of the first active layers includes a recess at a surface of the respective first active layers opposite the semiconductor substrate and adjacent the hollow, extending from an interface of the channel layer and a refractory metal gate electrode into only part of the respective first active layer.

Claim 15

The semiconductor device of claim 10 wherein each recess has a width in the respective first active layer smaller than a depth of the hollow relative to the surfaces of the first active layers opposite the semiconductor substrate.