US5628870A
Expired / Lapsed
US
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Method for marking a substrate using ionized gas
Assignee: Applied Materials Inc
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Filing: 1995-06-05
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Granted: 1997-05-13
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Expires: 2015-06-05
Abstract
Abstract An apparatus suitable for marking a substrate comprises a holder for holding a substrate and a ground for electrically grounding the substrate. At least one needle electrode has a tip located proximate to the substrate so that there is a gap between the substrate and the tip. A high voltage source provides a current to the electrode tip to ionize the gas in the gap so that the ionized gas can impinge upon and mark the substrate.
Inventors
- 👤 Yan Ye
- 👤 Anand Gupta
- 👤 Yuri S. Uritsky
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 19:19
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/06; H10P72/0614; H01; H01J; H01J37/00; H01J37/30; H01J37/304; H01J37/3045; H10W; H10W46/00; H10W46/501
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
90 words
A method for marking a semiconductor substrate, the method comprising the steps of: (a) electrically grounding the substrate; (b) placing at least one needle electrode tip proximate to the substrate to form a gap between the electrode tip and the substrate, the gap having a gas therein; and (c) electrically biasing the needle electrode tip with respect to the electrically grounded substrate by applying a sufficiently high voltage to the electrode tip to ionize the gas in the gap so that the ionized gas impinges upon and marks the substrate.
Claim 2
Independent Claim
90 words
A method for marking a semiconductor substrate, the method comprising the steps of: (a) electrically grounding the substrate; (b) placing at least one needle electrode tip proximate to the substrate to form a gap between the electrode tip and the substrate, the gap having a gas therein; and (c) electrically biasing the needle electrode tip with respect to the electrically grounded substrate by applying a sufficiently high voltage to the electrode tip to ionize the gas in the gap so that the ionized gas impinges upon and marks the substrate.
Claim 3
Dependent Claim
22 words
The method of claim 1 wherein the step of electrically grounding the substrate comprises placing the substrate in an electrically grounded holder.
Claim 4
Dependent Claim
22 words
The method of claim 1, wherein the step of electrically grounding the substrate comprises contacting the substrate with an electrically grounded pin.
Claim 5
Dependent Claim
19 words
The method of claim 1, wherein step (b) further comprises the step of introducing the gas into the gap.
Claim 6
Dependent Claim
37 words
The method of claim 4, wherein the step of introducing gas into the gap comprises introducing the gas at a sufficient pressure to blow away contaminants formed when the ionized gas impinges upon and marks the substrate.
Claim 7
Dependent Claim
28 words
The method of claim 4, wherein the step of introducing gas into the gap comprises introducing a gas selected from the group consisting of Ar, Xe, and He.
Claim 8
Dependent Claim
54 words
The method of claim 4, wherein the step of introducing gas into the gap comprises introducing a gas selected from the group consisting of O 2 , O 3 , F 2 , Cl 2 , Br 2 , BCl 3 , SF 6 , CF 4 , and C 2 F 6 .
Claim 9
Dependent Claim
37 words
The method of claim 1, wherein the step of placing the tip of a needle electrode proximate to the substrate comprises placing the electrode tip at a distance of less than about 100 millimeters from the substrate.
Claim 10
Dependent Claim
38 words
The method of claim 8, wherein the step of placing the tip of a needle electrode tip proximate to the substrate comprises placing the electrode tip at a distance of less than about 10 millimeters from the substrate.
Claim 11
Dependent Claim
31 words
The method of claim 1, wherein step (c) comprises the step of passing a current having a voltage of from about 1000 volts to about 10,000 volts through the electrode tip.
Claim 12
Dependent Claim
31 words
The method of claim 9, wherein step (c) comprises the step of passing a current having a voltage of from about 2000 volts to about 6000 volts through the electrode tip.
Claim 13
Dependent Claim
28 words
The method of claim 9, wherein step (c) comprises the step of passing a current of from about 1 microamp to about 50 microamps through the electrode tip.
Claim 14
Dependent Claim
29 words
The method of claim 11, wherein step (c) comprises the step of passing a current of from about 1 microamp to about 10 microamps through the needle electrode tip.
Claim 15
Independent Claim
91 words
A method for marking a substrate, the method comprising the steps of: (a) electrically grounding the substrate; (b) placing at least one needle electrode tip proximate to the substrate to form a gap between the electrode tip and the substrate; (c) introducing a gas in the gap, the gas selected from the group consisting of Ar, Xe, and He; and (d) passing a current having a sufficiently high voltage through the electrode tip to ionize the gas into the gap so that the ionized gas impinges upon and marks the substrate.
Claim 16
Independent Claim
91 words
A method for marking a substrate, the method comprising the steps of: (a) electrically grounding the substrate; (b) placing at least one needle electrode tip proximate to the substrate to form a gap between the electrode tip and the substrate; (c) introducing a gas in the gap, the gas selected from the group consisting of Ar, Xe, and He; and (d) passing a current having a sufficiently high voltage through the electrode tip to ionize the gas into the gap so that the ionized gas impinges upon and marks the substrate.
Claim 17
Dependent Claim
21 words
The method of claim 14, wherein in step (d) the ionized gas marks the substrate by sputtering or etching the substrate.
Claim 18
Dependent Claim
35 words
The method of claim 14, wherein step (a) comprises at least one of the following steps: (1) placing the substrate in an electrically grounded holder; or (2) contacting the substrate with an electrically grounded pin.
Claim 19
Dependent Claim
35 words
The method of claim 14, wherein in step (c), the gas is introduced into the gap at a sufficient pressure to blow away contaminants formed when the ionized gas impinges upon and marks the substrate.
Claim 20
Dependent Claim
48 words
The method of claim 14, wherein the gas further comprises a gas selected from the group consisting of O 2 , O 3 , F 2 , Cl 2 , Br 2 , BCl 3 , SF 2 , CF 4 , and C 2 F 6 .
Claim 21
Dependent Claim
31 words
The method of claim 14, wherein step (b) comprises the step of placing the electrode tip at a distance of from about 10 millimeters to about 100 millimeters from the substrate.
Claim 22
Dependent Claim
31 words
The method of claim 14, wherein step (d) comprises the step of passing a current having a voltage of from about 1000 volts to about 10,000 volts through the electrode tip.
Claim 23
Dependent Claim
28 words
The method of claim 14, wherein step (d) comprises the step of passing a current of from about 1 microamp to about 10 microamps through the electrode tip.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-05-12 | 2000-11-11 | 2001-05-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-05-12 | 2004-11-11 | 2005-05-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-05-12 | 2008-11-11 | 2009-05-13 | $7700.00 | Window Closed / Lapsed |