US5626924A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of forming oxide film
Assignee: Sony Corp
•
Filing: 1995-09-01
•
Granted: 1997-05-06
•
Expires: 2015-09-01
Abstract
Abstract A method of forming an O 3 -TEOS oxide film, including the steps of supplying a reactant gas into a plasma CVD apparatus in which a waver is stored and applying a plasma generating voltage to form a plasma silicon oxide film on the wafer; performing a hydrophobic process by stopping supply of the reactant gas into the plasma CVD apparatus and application of the plasma generating voltage, introducing TEOS gas into the plasma CVD apparatus to make an atmosphere of the TEOS gas in a process chamber of the plasma CVD apparatus, and allowing the plasma silicon oxide film on the wafer to react with the TEOS gas in the process chamber; and allowing O 3 to react with TEOS gas to form an O 3 -TEOS oxide film on the plasma silicon oxide film subjected to the hydrophobic process. According to this method, the substrate dependency of the O 3 -TEOS oxide film can be improved without the need for any additional apparatus for hydrophobic treatment of the plasma silicon oxide film and an increase in number of process steps.
Inventors
- 👤 Yoshimitsu Ishikawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 19:48
CPC Classifications
C; C30; C30B; C30B25/00; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/401; C23C16/402; C23C16/44; C23C16/50; C23C16/56
Claims Analysis
Total Claims: 19
Claim 1
Independent Claim
209 words
An oxide film forming method comprising the steps of: supplying a reactant gas into a plasma chemical vapor deposition (CVD) apparatus in which a wafer is disposed and applying a plasma generating voltage to form a first silicon oxide film on said wafer; performing a first hydrophobic rendering process on the first silicon oxide film comprising the steps of: stopping the supply of said reactant gas into said plasma CVD apparatus; stopping the application of said plasma generating voltage; introducing tetraethylorthosilicate (TEOS) gas into said plasma CVD apparatus to establish an atmosphere of said TEOS gas in a process chamber of said plasma CVD apparatus, and allowing the first silicon oxide film on said wafer to react with said TEOS gas in said process chamber for a predetermined time to allow a condensation reaction between Si--OH on a surface of the first silicon oxide film, and said TEOS gas to impart hydrophobic characteristics on the first silicon oxide film; and reacting O 3 with the TEOS gas to form a second oxide film on said first silicon oxide film after the first silicon oxide film has been rendered hydrophobic by the condensation reaction between the Si--OH on the surface of the first silicon oxide film and the TEOS gas.
Claim 2
Dependent Claim
209 words
An oxide film forming method comprising the steps of: supplying a reactant gas into a plasma chemical vapor deposition (CVD) apparatus in which a wafer is disposed and applying a plasma generating voltage to form a first silicon oxide film on said wafer; performing a first hydrophobic rendering process on the first silicon oxide film comprising the steps of: stopping the supply of said reactant gas into said plasma CVD apparatus; stopping the application of said plasma generating voltage; introducing tetraethylorthosilicate (TEOS) gas into said plasma CVD apparatus to establish an atmosphere of said TEOS gas in a process chamber of said plasma CVD apparatus, and allowing the first silicon oxide film on said wafer to react with said TEOS gas in said process chamber for a predetermined time to allow a condensation reaction between Si--OH on a surface of the first silicon oxide film, and said TEOS gas to impart hydrophobic characteristics on the first silicon oxide film; and reacting O 3 with the TEOS gas to form a second oxide film on said first silicon oxide film after the first silicon oxide film has been rendered hydrophobic by the condensation reaction between the Si--OH on the surface of the first silicon oxide film and the TEOS gas.
Claim 3
Dependent Claim
109 words
An oxide film forming method according to claim 1, further comprising the step of performing a second hydrophobic rendering process before the step of reacting O 3 with the TEOS gas to form the second silicon oxide film, the second hydrophobic rendering process comprising: permitting the TEOS gas to adsorb onto the surface of the first silicon oxide film; removing said wafer from said plasma CVD apparatus: exposing said wafer to moisture containing atmospheric air; hydrolyzing the TEOS gas adsorbed on said first silicon oxide film with a moisture contained in said atmospheric air to yield ethanol; and allowing said ethanol to react with said first silicon oxide film.
Claim 4
Dependent Claim
49 words
An oxide film forming method according to claim 1, wherein process conditions for the first hydrophobic rendering process are set to a pressure of 9 Torr, a temperature of 370° C., a flow rate of said TEOS gas of 250 sccm, and a time of 40 to 100 sec.
Claim 5
Dependent Claim
24 words
An oxide film forming method according to claim 3, wherein said flow rate of said TEOS gas includes a flow rate of bubbling He.
Claim 6
Dependent Claim
20 words
An oxide film forming method according to claim 1, wherein said reactant gas comprises SiH 4 and N 2 O.
Claim 7
Dependent Claim
49 words
An oxide film forming method according to claim 1, wherein conditions for the second oxide film formation are set to atmospheric pressure, a temperature of 380° C., a flow rate of the TEOS gas of 13.5 sccm, and a flow rate of O 2 /O 3 of 6.65 slm.
Claim 8
Dependent Claim
220 words
An oxide film forming method comprising the steps of: supplying a reactant gas into a plasma chemical vapor deposition (CVD) apparatus in which a wafer is disposed and applying a plasma generating voltage to form a first silicon oxide film on said wafer; performing a first hydrophobic rendering process on the first silicon oxide film comprising the steps of: stopping the supply of said reactant gas into said plasma CVD apparatus; stopping the application of said plasma generating voltage; introducing tetraethylorthosilicate (TEOS) gas into said plasma CVD apparatus to establish an atmosphere of said TEOS gas in a process chamber of said plasma CVD apparatus, and allowing the first silicon oxide film on said wafer to react with said TEOS gas in said process chamber for a predetermined time to allow a condensation reaction between Si--OH on a surface of the first silicon oxide film, and said TEOS gas to impart hydrophobic characteristics on the first silicon oxide film; reacting O 3 with the TEOS gas to form a second oxide film on said first silicon oxide film after the first silicon oxide film has been rendered hydrophobic by the condensation reaction between the Si--OH on the surface of the first silicon oxide film and the TEOS gas; and wherein said reactant gas comprises SiH 4 and N 2 O.
Claim 9
Dependent Claim
220 words
An oxide film forming method comprising the steps of: supplying a reactant gas into a plasma chemical vapor deposition (CVD) apparatus in which a wafer is disposed and applying a plasma generating voltage to form a first silicon oxide film on said wafer; performing a first hydrophobic rendering process on the first silicon oxide film comprising the steps of: stopping the supply of said reactant gas into said plasma CVD apparatus; stopping the application of said plasma generating voltage; introducing tetraethylorthosilicate (TEOS) gas into said plasma CVD apparatus to establish an atmosphere of said TEOS gas in a process chamber of said plasma CVD apparatus, and allowing the first silicon oxide film on said wafer to react with said TEOS gas in said process chamber for a predetermined time to allow a condensation reaction between Si--OH on a surface of the first silicon oxide film, and said TEOS gas to impart hydrophobic characteristics on the first silicon oxide film; reacting O 3 with the TEOS gas to form a second oxide film on said first silicon oxide film after the first silicon oxide film has been rendered hydrophobic by the condensation reaction between the Si--OH on the surface of the first silicon oxide film and the TEOS gas; and wherein said reactant gas comprises SiH 4 and N 2 O.
Claim 10
Dependent Claim
184 words
An oxide film forming method comprising the steps of: supplying a reactant gas into a plasma CVD apparatus in which a wafer is stored and applying a plasma generating voltage to form a first plasma silicon oxide film on said wafer; performing a first hydrophobic rendering process comprising the steps of: stopping supply of said reactant gas into said plasma CVD apparatus and stopping application of said plasma generating voltage, introducing tetraethylorthosilicate TEOS gas into said plasma CVD apparatus to fill a process chamber of the plasma CVD apparatus with an atmosphere of said TEOS gas and allowing said plasma silicon oxide film on said wafer to react with said TEOS gas in said process chamber and to adsorb the TEOS gas; removing said wafer from said plasma CVD apparatus and disposing said wafer in a cassette; transporting said wafer disposed in said cassette to a second CVD apparatus; and allowing O 3 to react with the TEOS gas in said second CVD apparatus to form a second oxide film on said first plasma silicon oxide film subjected to said first hydrophobic rendering process.
Claim 11
Dependent Claim
184 words
An oxide film forming method comprising the steps of: supplying a reactant gas into a plasma CVD apparatus in which a wafer is stored and applying a plasma generating voltage to form a first plasma silicon oxide film on said wafer; performing a first hydrophobic rendering process comprising the steps of: stopping supply of said reactant gas into said plasma CVD apparatus and stopping application of said plasma generating voltage, introducing tetraethylorthosilicate TEOS gas into said plasma CVD apparatus to fill a process chamber of the plasma CVD apparatus with an atmosphere of said TEOS gas and allowing said plasma silicon oxide film on said wafer to react with said TEOS gas in said process chamber and to adsorb the TEOS gas; removing said wafer from said plasma CVD apparatus and disposing said wafer in a cassette; transporting said wafer disposed in said cassette to a second CVD apparatus; and allowing O 3 to react with the TEOS gas in said second CVD apparatus to form a second oxide film on said first plasma silicon oxide film subjected to said first hydrophobic rendering process.
Claim 12
Dependent Claim
85 words
An oxide film forming method according to claim 8, further comprising the steps of performing a second hydrophobic rendering process comprising the steps of: removing said wafer from said plasma CVD apparatus and exposing said wafer to moisture containing atmospheric air prior to the step of forming the second oxide film; hydrolyzing the TEOS gas adsorbed on said first plasma silicon oxide film with moisture contained in said atmospheric air to yield ethanol; and allowing said ethanol to react with said plasma silicon oxide film.
Claim 13
Dependent Claim
227 words
An oxide film forming method comprising the steps of: supplying a reactant gas into a plasma chemical vapor deposition (CVD) apparatus in which a wafer is stored and applying a plasma generating voltage to form a first plasma silicon oxide film on said wafer; performing a first hydrophobic rendering process comprising the steps of: stopping supply of said reactant gas into said plasma CVD apparatus and stopping application of said plasma generating voltage, introducing tetraethylorthosilicate (TEOS) gas into said plasma CVD apparatus to fill a process chamber of the plasma CVD apparatus with an atmosphere of said TEOS gas, and allowing said plasma silicon oxide film on said wafer to react with said TEOS gas in said process chamber and to adsorb the TEOS gas; removing said wafer from said plasma CVD apparatus and disposing said wafer in a cassette; transporting said wafer disposed in said cassette to a second CVD apparatus; allowing O 3 to react with the TEOS gas in said second CVD apparatus to form a second oxide film on said first plasma silicon oxide film subjected to said first hydrophobic rendering process; and wherein process conditions for said first hydrophobic rendering process are set to a pressure of 9 Torr, a temperature of 370° C. a flow rate of said TEOS gas of 250 sccm, and a time of 40 to 100 sec.
Claim 14
Dependent Claim
227 words
An oxide film forming method comprising the steps of: supplying a reactant gas into a plasma chemical vapor deposition (CVD) apparatus in which a wafer is stored and applying a plasma generating voltage to form a first plasma silicon oxide film on said wafer; performing a first hydrophobic rendering process comprising the steps of: stopping supply of said reactant gas into said plasma CVD apparatus and stopping application of said plasma generating voltage, introducing tetraethylorthosilicate (TEOS) gas into said plasma CVD apparatus to fill a process chamber of the plasma CVD apparatus with an atmosphere of said TEOS gas, and allowing said plasma silicon oxide film on said wafer to react with said TEOS gas in said process chamber and to adsorb the TEOS gas; removing said wafer from said plasma CVD apparatus and disposing said wafer in a cassette; transporting said wafer disposed in said cassette to a second CVD apparatus; allowing O 3 to react with the TEOS gas in said second CVD apparatus to form a second oxide film on said first plasma silicon oxide film subjected to said first hydrophobic rendering process; and wherein process conditions for said first hydrophobic rendering process are set to a pressure of 9 Torr, a temperature of 370° C. a flow rate of said TEOS gas of 250 sccm, and a time of 40 to 100 sec.
Claim 15
Dependent Claim
24 words
An oxide film forming method according to claim 10, wherein said flow rate of said TEOS gas includes a flow rate of bubbling He.
Claim 16
Dependent Claim
226 words
An oxide film forming method comprising the steps of: supplying a reactant gas comprised of a mixture of SiH 4 and N 2 O into a reaction chamber of a plasma chemical vapor deposition (CVD) apparatus in which a wafer is disposed; applying a plasma generating voltage to plasmatize the reagent gas and to chemically vapor-deposit a first silicon oxide film on said wafer; stopping both the supply of said reactant gas into said plasma CVD apparatus and the application of said plasma generating voltage to stop the deposition of the first silicon oxide film; introducing tetraethylorthosilicate (TEOS) gas into said plasma CVD apparatus to fill the process chamber in which the wafer is disposed, with the TEOS gas; allowing the first silicon oxide film on said wafer to react with said TEOS gas in said process chamber for a predetermined time sufficient to allow a condensation reaction between Si--OH on a surface of the first silicon oxide film, and said TEOS gas, and to impart predetermined hydrophobic characteristics on the first silicon oxide film; and reacting O 3 with the TEOS gas to chemically vapor-deposit a second oxide film on said first silicon oxide film after the first silicon oxide film has been rendered hydrophobic by the condensation reaction between the Si--OH on the surface of the first silicon oxide film and the TEOS gas.
Claim 17
Dependent Claim
226 words
An oxide film forming method comprising the steps of: supplying a reactant gas comprised of a mixture of SiH 4 and N 2 O into a reaction chamber of a plasma chemical vapor deposition (CVD) apparatus in which a wafer is disposed; applying a plasma generating voltage to plasmatize the reagent gas and to chemically vapor-deposit a first silicon oxide film on said wafer; stopping both the supply of said reactant gas into said plasma CVD apparatus and the application of said plasma generating voltage to stop the deposition of the first silicon oxide film; introducing tetraethylorthosilicate (TEOS) gas into said plasma CVD apparatus to fill the process chamber in which the wafer is disposed, with the TEOS gas; allowing the first silicon oxide film on said wafer to react with said TEOS gas in said process chamber for a predetermined time sufficient to allow a condensation reaction between Si--OH on a surface of the first silicon oxide film, and said TEOS gas, and to impart predetermined hydrophobic characteristics on the first silicon oxide film; and reacting O 3 with the TEOS gas to chemically vapor-deposit a second oxide film on said first silicon oxide film after the first silicon oxide film has been rendered hydrophobic by the condensation reaction between the Si--OH on the surface of the first silicon oxide film and the TEOS gas.
Claim 18
Independent Claim
238 words
A method of rendering an oxide film hydrophobic in a manner which provides predetermined substrate dependency characteristics and facilitates a subsequent formation of a silicon oxide film, comprising the steps of: supplying a reactant gas comprised of a mixture of tetraethylorthosilicate (TEOS) gas and oxygen (O 2 ) into a process chamber of a plasma chemical vapor deposition (CVD) apparatus in which a wafer is disposed, and applying a plasma generating voltage to chemically vapor-deposit a first silicon oxide film on the wafer; stopping the supply of the O 2 gas into the plasma CVD apparatus and stopping the application of the plasma generating voltage to stop the deposition of the first silicon oxide film; continuing the supply of the TEOS gas into the plasma CVD apparatus to completely fill the process chamber in which the wafer is disposed, with the TEOS gas; allowing the TEOS gas to adsorb onto a surface of the first silicon oxide film and for the TEOS gas to react with the first silicon oxide film for a predetermined time sufficient to allow a condensation reaction between Si--OH on a surface of the first silicon oxide film, and the TEOS gas; exposing the wafer to moisture containing atmospheric air; hydrolyzing the TEOS gas adsorbed on the first silicon oxide film with the moisture contained in the atmospheric air to yield ethanol; and allowing the ethanol to react with the first silicon oxide film.
Claim 19
Independent Claim
238 words
A method of rendering an oxide film hydrophobic in a manner which provides predetermined substrate dependency characteristics and facilitates a subsequent formation of a silicon oxide film, comprising the steps of: supplying a reactant gas comprised of a mixture of tetraethylorthosilicate (TEOS) gas and oxygen (O 2 ) into a process chamber of a plasma chemical vapor deposition (CVD) apparatus in which a wafer is disposed, and applying a plasma generating voltage to chemically vapor-deposit a first silicon oxide film on the wafer; stopping the supply of the O 2 gas into the plasma CVD apparatus and stopping the application of the plasma generating voltage to stop the deposition of the first silicon oxide film; continuing the supply of the TEOS gas into the plasma CVD apparatus to completely fill the process chamber in which the wafer is disposed, with the TEOS gas; allowing the TEOS gas to adsorb onto a surface of the first silicon oxide film and for the TEOS gas to react with the first silicon oxide film for a predetermined time sufficient to allow a condensation reaction between Si--OH on a surface of the first silicon oxide film, and the TEOS gas; exposing the wafer to moisture containing atmospheric air; hydrolyzing the TEOS gas adsorbed on the first silicon oxide film with the moisture contained in the atmospheric air to yield ethanol; and allowing the ethanol to react with the first silicon oxide film.
References Cited (Backward Citations)
US4872947A
Cited
US5459105A
Cited
US5426076A
Cited
US5376590A
Cited
US5332694A
Cited
US5271972A
Cited
US5360646A
Cited
US5459108A
Cited
US5502006A
Cited
US5503882A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2000-05-05 | 2000-11-04 | 2001-05-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2004-05-05 | 2004-11-04 | 2005-05-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2008-05-05 | 2008-11-04 | 2009-05-06 | $7700.00 | Window Closed / Lapsed |