US5503882A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for planarizing an integrated circuit topography
Assignee: Advanced Micro Devices Inc
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Filing: 1994-04-18
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Granted: 1996-04-02
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Expires: 2014-04-18
Abstract
Abstract A method is provided for forming a planarization structure of dielectric materials upon a substrate topography. The dielectric materials can be deposited in layers without removing one or more layers in non-contact areas prior to deposition of an overlying interconnect conductors. Alternatively, at least one layer can be entirely removed from the dielectric materials prior to deposition of the overlying interconnect conductors. A plasma oxide is placed between the substrate upper surface and a subsequently deposited TEOS oxide to reduce stress properties and to balance the stress between the TEOS oxide and the plasma oxide. A subsequently placed SOG layer can be used to further planarize the upper surface, wherein a capping layer is deposited above the SOG to prevent or substantially minimize water absorption. The SOG layer can, alternatively, be removed in its entirety in an etch-back procedure prior to capping layer deposition. Removal of the SOG layer prevents outgassing of water during times in which contacts are formed.
Inventors
- 👤 Robert Dawson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 14:29
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/092; H10P; H10P95/00; H10P95/06
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
249 words
A method for forming a planarization structure of dielectric materials, said method comprising the steps of: providing an integrated circuit topography comprising a plurality of conductors, wherein said conductors are arranged at an elevation level disparity and at dissimilar pitch distances comprising a first gap distance and a second gap distance between said conductors, wherein such second gap distance is smaller than said first gap distance; depositing in a plasma enhanced chemical vapor deposition (CVD) chamber a plasma oxide upon said topography; depositing in an atmospheric pressure CVD chamber, from a tetraethoxysilane (TEOS) and ozone source gas, a TEOS oxide upon said plasma oxide, wherein said TEOS oxide comprises a thickness which is larger in said second gap distance than in said first gap distance such that a TEOS oxide thickness disparity exists between TEOS oxide thickness in said first and second gap distances; without removing any portion of said TEOS oxide, spin depositing a silicate solution upon said TEOS oxide to form a silicate thickness which is larger in said first gap distance than in said second gap distance; baking said silicate solution to remove solvents and then heating said silicate solution to form a silica film having a substantially planarized upper surface, wherein a silica thickness disparity exists between silica thickness in said first and second gap distances and said silica thickness disparity substantially equals a sum of said elevation level disparity and said TEOS oxide thickenss disparity; and depositing a capping dielectric upon said silica film.
Claim 2
Independent Claim
249 words
A method for forming a planarization structure of dielectric materials, said method comprising the steps of: providing an integrated circuit topography comprising a plurality of conductors, wherein said conductors are arranged at an elevation level disparity and at dissimilar pitch distances comprising a first gap distance and a second gap distance between said conductors, wherein such second gap distance is smaller than said first gap distance; depositing in a plasma enhanced chemical vapor deposition (CVD) chamber a plasma oxide upon said topography; depositing in an atmospheric pressure CVD chamber, from a tetraethoxysilane (TEOS) and ozone source gas, a TEOS oxide upon said plasma oxide, wherein said TEOS oxide comprises a thickness which is larger in said second gap distance than in said first gap distance such that a TEOS oxide thickness disparity exists between TEOS oxide thickness in said first and second gap distances; without removing any portion of said TEOS oxide, spin depositing a silicate solution upon said TEOS oxide to form a silicate thickness which is larger in said first gap distance than in said second gap distance; baking said silicate solution to remove solvents and then heating said silicate solution to form a silica film having a substantially planarized upper surface, wherein a silica thickness disparity exists between silica thickness in said first and second gap distances and said silica thickness disparity substantially equals a sum of said elevation level disparity and said TEOS oxide thickenss disparity; and depositing a capping dielectric upon said silica film.
Claim 3
Dependent Claim
25 words
The method as recited in claim 1, second gap distance is less than 0.5 μm and said first gap distance is greater than 3.0 μm.
Claim 4
Dependent Claim
24 words
The method as recited in claim 1, wherein said plasma oxide having an intrinsic stress of 8×10 8 to 5×10 9 dynes/cm 2 .
Claim 5
Dependent Claim
17 words
The method as recited in claim 1, wherein said silicate solution comprises TEOS suspended in a solvent.
Claim 6
Dependent Claim
19 words
The method as recited in claim 1, wherein said plasma oxide and said TEOS oxide comprise SiO 2 .
Claim 7
Dependent Claim
22 words
The method as recited in claim 1, wherein said capping dielectric comprises a silicon dioxide formed within said plasma enhanced CVD chamber.
Claim 8
Dependent Claim
21 words
The method as recited in claim 1, wherein said capping dielectric comprises an oxynitride formed within said plasma enhanced CVD chamber.
Claim 9
Dependent Claim
29 words
The method as recited in claim 1, wherein said sum of said elevation level disparity and said TEOS oxide thickness disparity is an inverse of said silica thickness disparity.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1999-04-02 | 1999-10-02 | 2000-04-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-04-02 | 2003-10-02 | 2004-04-02 | $3760.00 | Window Closed / Lapsed |
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