US5549934A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Process of curing hydrogen silsesquioxane coating to form silicon oxide layer
Assignee: LSI Corp
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Filing: 1995-06-05
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Granted: 1996-08-27
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Expires: 2015-06-05
Abstract
Abstract A process is disclosed for curing a hydrogen silsesquioxane coating material to form SiO 2 by first placing the coating material in a preheated furnace; igniting a plasma ignited in the furnace immediately after insertion of the coating material therein; then raising the temperature of the furnace up to a predetermined curing temperature, while still maintaining the plasma in the chamber; maintaining the coating material at the curing temperature until substantially all of the coating material has cured to form SiO 2 ; and then extinguishing the plasma and cooling the furnace. In another embodiment, the coating material is cured, with or without the assistance of heat and a plasma, in an ultrahigh vacuum, i.e., a vacuum of at least 10 -5 Torr or better, and preferably at least 10 -6 Torr or better.
Inventors
- 👤 Mario Garza
- 👤 Keith Chao
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 21:07
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/66; H10P14/668; H10P14/6681; H10P14/6684; H10P14/6686; C; C08; C08G; C08G77/00; C08G77/04; C08G77/12; C09; C09D; C09D183/00; C09D183/04; C23; C23C; C23C18/00; C23C18/02; C23C18/12; C23C18/1204; C23C18/1208; C23C18/1212; C23C18/122; H10P14/63; H10P14/6326; H10P14/6342; H10P14/65; H10P14/6516; H10P14/6529; H10P14/6532; H10P14/69; H10P14/692; H10P14/6921; H10P14/69215; H10P14/6922; H10P14/6925
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
66 words
A process for converting substantially all of a hydrogen silsesquioxane coating material on a substrate to SiO 2 which comprises: a) placing said substrate coated with said hydrogen silsesquioxane coating material in a vacuum chamber; and b) maintaining said vacuum chamber at a vacuum of at least 10 -5 Torr, until substantially all of said hydrogen silsesquioxane coating material has been converted to SiO 2 .
Claim 2
Dependent Claim
66 words
A process for converting substantially all of a hydrogen silsesquioxane coating material on a substrate to SiO 2 which comprises: a) placing said substrate coated with said hydrogen silsesquioxane coating material in a vacuum chamber; and b) maintaining said vacuum chamber at a vacuum of at least 10 -5 Torr, until substantially all of said hydrogen silsesquioxane coating material has been converted to SiO 2 .
Claim 3
Dependent Claim
44 words
The process of claim 1 wherein said vacuum in said vacuum chamber is maintained at a level of from about 10 -5 Torr to about 10 -9 Torr until substantially all of said hydrogen silsesquioxane coating material has been converted to SiO 2 .
Claim 4
Dependent Claim
37 words
The process of claim 2 wherein said coated substrate is maintained in said vacuum chamber for a period of at least about 5 minutes to convert all of said hydrogen silsesquioxane coating material to SiO 2 .
Claim 5
Dependent Claim
33 words
The process of claim 2 which further includes heating said coated substrate in said vacuum chamber to a temperature of at least about 400° C. while maintaining said vacuum in said vacuum chamber.
Claim 6
Dependent Claim
23 words
The process of claim 2 which further includes igniting a plasma in said vacuum chamber while maintaining said vacuum in said vacuum chamber.
Claim 7
Dependent Claim
41 words
The process of claim 2 which further includes heating said coated substrate in said vacuum chamber to a temperature of at least about 400° C. and igniting a plasma in said vacuum chamber while maintaining said vacuum in said vacuum chamber.
Claim 8
Dependent Claim
71 words
A process for converting substantially all of a hydrogen silsesquioxane coating material on a substrate to SiO 2 which comprises: a) placing said substrate coated with said hydrogen silsesquioxane coating material in a vacuum chamber; and b) maintaining said vacuum chamber at a vacuum of from about 10 -6 Torr to about 10 -9 Torr, until substantially all of said hydrogen silsesquioxane coating material has been converted to SiO 2 .
Claim 9
Dependent Claim
71 words
A process for converting substantially all of a hydrogen silsesquioxane coating material on a substrate to SiO 2 which comprises: a) placing said substrate coated with said hydrogen silsesquioxane coating material in a vacuum chamber; and b) maintaining said vacuum chamber at a vacuum of from about 10 -6 Torr to about 10 -9 Torr, until substantially all of said hydrogen silsesquioxane coating material has been converted to SiO 2 .
Claim 10
Dependent Claim
32 words
The process of claim 7 which further includes monitoring the outgas from said vacuum chamber for hydrogen to determine when all of said hydrogen silsesquioxane has been converted to SiO 2 .
Claim 11
Dependent Claim
37 words
The process of claim 7 wherein said coated substrate is maintained in said vacuum chamber for a period of at least about 5 minutes to convert all of said hydrogen silsesquioxane coating material to SiO 2 .
Claim 12
Dependent Claim
33 words
The process of claim 7 which further includes heating said coated substrate in said vacuum chamber to a temperature of at least about 400° C. while maintaining said vacuum in said vacuum chamber.
Claim 13
Dependent Claim
23 words
The process of claim 7 which further includes igniting a plasma in said vacuum chamber while maintaining said vacuum in said vacuum chamber.
Claim 14
Dependent Claim
79 words
A process for converting substantially all of a hydrogen silsequioxane coating material on a substrate to SiO 2 which comprises: a) placing said substrate coated with said hydrogen silsesquioxane coating material in a vacuum chamber; b) maintaining said vacuum chamber at a vacuum of from 10 -5 Torr to about 10 -9 Torr; and c) monitoring the outgas from said vacuum chamber for hydrogen to determine when all of said hydrogen silsequioxane has been converted to SiO 2 .
Claim 15
Dependent Claim
79 words
A process for converting substantially all of a hydrogen silsequioxane coating material on a substrate to SiO 2 which comprises: a) placing said substrate coated with said hydrogen silsesquioxane coating material in a vacuum chamber; b) maintaining said vacuum chamber at a vacuum of from 10 -5 Torr to about 10 -9 Torr; and c) monitoring the outgas from said vacuum chamber for hydrogen to determine when all of said hydrogen silsequioxane has been converted to SiO 2 .
Claim 16
Dependent Claim
37 words
The process of claim 12 wherein said coated substrate is maintained in said vacuum chamber for a period of at least about 5 minutes to convert all of said hydrogen silsesquioxane coating material to SiO 2 .
Claim 17
Dependent Claim
33 words
The process of claim 12 which further includes heating said coated substrate in said vacuum chamber to a temperature of at least about 400° C. while maintaining said vacuum in said vacuum chamber.
Claim 18
Dependent Claim
24 words
The process of claim 12 which further includes heating igniting a plasma in said vacuum chamber while maintaining said vacuum in said vacuum chamber.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-08-27 | 2000-02-26 | 2000-08-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-08-27 | 2004-02-26 | 2004-08-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-08-27 | 2008-02-26 | 2008-08-27 | $7700.00 | Window Closed / Lapsed |