US4626556A
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Solvent-soluble organopolysilsesquioxane, process for producing the same, and semi-conductor using the same
Assignee: JSR Corp
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Filing: 1985-09-25
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Granted: 1986-12-02
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Expires: 2005-09-25
Abstract
Abstract A novel raddery organopolysilsesquioxane having lower alkyl groups and alkenyl groups as the side chains and, if necessary, having aryl groups and/or hydrogen atoms bonded as the side chains can be produced by adding water to a solution of a lower-alkyltrihalogenosilane, an alkenyltrihalogenosilane, and, if necessary, an aryltrihalogenosilane and/or a trihalogenosilane in an organic solvent, and heating the resulting mixture. The aforesaid organopolysilsesquioxane can be used for forming a patterned surface-protecting layer or insulating layer for a semiconductor device, in the form of a mixture with a compound which generates crosslinking-reaction-active species upon irradiation with light or an ionizing radiation.
Inventors
- 👤 Ikuo Nozue
- 👤 Osahiko Tomomitsu
- 👤 Yoshiji Yumoto
- 👤 Yoshio Matsumura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 05:45
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; H10P14/6926; C; C08; C08G; C08G77/00; C08G77/04; C08G77/06; C08G77/20; C08K; C08K5/00; C08K5/0008; C08K5/0025; G; G03; G03F; G03F7/00; G03F7/004; G03F7/075; G03F7/0757; H01; H01B; H01B3/00; H01B3/18; H01B3/30; H01B3/46; H01B3/465; H10P14/63; H10P14/6326; H10P14/6342; H10P14/65; H10P14/6516; H10P14/6536
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
65 words
A composition comprising a solvent-soluble organopolysilsesquioxane represented by the formula (I): ##STR2## wherein R and R', which may be the same or different, represent hydrogen, lower alkyl, alkenyl, or aryl groups, wherein at least lower alkyl and alkenyl groups are present in the organopolysilsesquioxane, and n is degree of polymerization, and a compound which generates crosslinking-reaction-active species upon irradiation with light or an ionizing radiation.
Claim 2
Dependent Claim
65 words
A composition comprising a solvent-soluble organopolysilsesquioxane represented by the formula (I): ##STR2## wherein R and R', which may be the same or different, represent hydrogen, lower alkyl, alkenyl, or aryl groups, wherein at least lower alkyl and alkenyl groups are present in the organopolysilsesquioxane, and n is degree of polymerization, and a compound which generates crosslinking-reaction-active species upon irradiation with light or an ionizing radiation.
Claim 3
Dependent Claim
36 words
A composition according to claim 1, wherein the lower alkyl groups have 1 to 5 carbon atoms; the alkenyl groups have 2 to 5 carbon atoms; and the aryl groups have 6 to 10 carbon atoms.
Claim 4
Dependent Claim
63 words
A composition according to claim 2, wherein the lower alkyl groups are selected from the group consisting of methyl, ethyl, propyl and butyl, and the alkenyl groups are selected from the group consisting of vinyl, propenyl, butenyl, pentenyl and allyl and the aryl groups are selected from the group consisting of phenyl, dimethylphenyl, ethylphenyl, trimethylphenyl, methyl-ethylphenyl, propylphenyl, tetramethylphenyl, methylpropylphenyl, diethylphenyl, butylphenyl and tolyl.
Claim 5
Dependent Claim
19 words
A composition according to claim 3, wherein the lower alkyl groups are methyl and the alkenyl groups are vinyl.
Claim 6
Dependent Claim
12 words
A composition according to claim 4, wherein the aryl groups are phenyl.
Claim 7
Dependent Claim
40 words
A composition according the claim 1, wherein the proportions of the lower alkyl group, alkenyl group, aryl group and hydrogen atom bonded as the side chains are 50-99, 1-50, 0-49 and 0-49, respectively, per 100 of the total side chains.
Claim 8
Dependent Claim
23 words
A composition according to claim 1, wherein n has a value corresponding to a polystyrene-reduced number average molecular weight of 3,000 to 200,000.
Claim 9
Dependent Claim
59 words
A composition according to claim 1, wherein the compound which generates crosslinking-reaction-active species upon irradiation with light or an ionizing radiation is an azido compound, a carbonyl compound, an aromatic hydrocarbon, tetracyanoethylene, a nitro compound selected from the group consisting of nitrobenzene, p-dinitrobenzene, α-nitronaphthalene, p-nitrodiphenyl, 2-nitrofluorene, 5-nitroacenaphthene, nitroaniline, 2-chloro-4-nitroaniline, 2,6-dichloro-4-nitroaniline and 5-nitro-2-aminotoluene, a sulfur compound or an azo compound.
Claim 10
Dependent Claim
37 words
A composition according to claim 1, wherein the compound which generates cross-linking-reaction-active species upon irradiation with light or an ionizing radiation added is 0.1 to 10 parts by weight per 100 parts by weight of the organopolysilsesquioxane.
Claim 11
Dependent Claim
32 words
A composition according to claim 9, wherein said compound is an azido compound, a carbonyl compound, an aromatic hydrocarbon, a nitro compound, a nitrogen compound, a sulfur compound or an azo compound.
Claim 12
Dependent Claim
29 words
A composition according to claim 8, wherein said azido compound is selected from the group consisting of 4,4'-diazidostilbene, p-phenylenebisazide, 4,4'-diazidobenzophenone, 4,4'-diazidodiphenylmethane, 4,4'-diazidochalocone, 2,6-bis(4'-azidobenzal)-4-methylcyclohexanone, 4,4'-diazidodiphenyl, 4,4'-diazido-3,3'-dimethyldiphenyl, 2,7-diazidofluorene, p-benzoquinonediazide, and p-naphthoquinonediazide.
Claim 13
Dependent Claim
32 words
A composition according to claim 8, wherein said carbonyl compound is selected from the group consisting of diacetyl, benzoin, benzophenone, anthraquinone, 1,2-naphthoquinone, 1,4-naphthoquinone, β-methylanthraquinone, benzathrone, violanthrone, 9-anthraldehyde, benzil, p,p'-dimethylaminobenzophenone, p,p'tetramethyldiaminobenzophenone, and chloranil.
Claim 14
Dependent Claim
14 words
A compositiom according to claim 8, wherein said aromatic hydrocarbon is anthracene or chrysene.
Claim 15
Dependent Claim
14 words
A composition according to claim 8, wherein said sulfur compound is diphenyldisulfide or mercaptenedisulfide.
Claim 16
Dependent Claim
12 words
A composition according to claim 8, wherein said azo compound is azobisisobutyronitrile.
References Cited (Backward Citations)
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