US5165955A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of depositing a coating containing silicon and oxygen
Assignee: Dow Silicones Corp
•
Filing: 1991-05-28
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Granted: 1992-11-24
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Expires: 2011-05-28
Abstract
Abstract The present invention relates to the deposition of coatings containing silicon and oxygen from vaporized hydrogen silsesquioxane resin. The process comprises introducing the hydrogen silsesquioxane vapor into a deposition chamber containing the substrate to be coated and then inducing reaction of the vapor to form the coating.
Inventors
- 👤 Theresa E. Gentle
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 00:25
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/60; C; C09; C09D; C09D183/00; C09D183/04; C09D4/00; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/401; C23C16/402; Y; Y10; Y10S; Y10S427/00; Y10S427/103; Y10S427/106
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
43 words
A method of depositing a coating containing silicon and oxygen on a substrate comprising: introducing a gas comprising hydrogen silsesquioxane into a deposition chamber containing the substrate; and inducing reaction of the hydrogen silsesquioxane by the addition of energy to form the coating.
Claim 2
Independent Claim
43 words
A method of depositing a coating containing silicon and oxygen on a substrate comprising: introducing a gas comprising hydrogen silsesquioxane into a deposition chamber containing the substrate; and inducing reaction of the hydrogen silsesquioxane by the addition of energy to form the coating.
Claim 3
Dependent Claim
29 words
The method of claim 1 wherein the hydrogen silsesquioxane comprises a sample in which greater than about 75% of the species have a molecular weight less than about 2000.
Claim 4
Dependent Claim
29 words
The method of claim 2 wherein the hydrogen silsesquioxane comprises a sample in which greater than about 75% of the species have a molecular weight less than about 1200.
Claim 5
Dependent Claim
31 words
The method of claim 3 wherein the hydrogen silsesquioxane comprises a sample in which greater than about 75% of the species have a molecular weight between about 400 and about 1000.
Claim 6
Dependent Claim
15 words
The method of claim 1 wherein the hydrogen silsesquioxane is diluted in a carrier gas.
Claim 7
Dependent Claim
19 words
The method of claim 1 wherein the hydrogen silsesquioxane is induced to react by exposure to an elevated temperature.
Claim 8
Dependent Claim
17 words
The method of claim 6 in which the temperature is in the range of about 100°-1000° C.
Claim 9
Dependent Claim
19 words
The method of claim 1 wherein the hydrogen silsesquioxane resin is induced to react by exposure to a plasma.
Claim 10
Dependent Claim
16 words
The method of claim 8 in which the plasma comprises radio frequency energy or microwave energy.
Claim 11
Dependent Claim
27 words
The method of claim 1 in which the deposition chamber contains a reactive environment selected from the group consisting of air, oxygen, oxygen plasma, ammonia, and amines.
Claim 12
Dependent Claim
13 words
The method of claim 1 in which the substrate comprises an electronic device.
Claim 13
Dependent Claim
54 words
The method of claim 1 additionally comprising applying coatings selected from the group consisting of SiO 2 coatings. SiO 2 /modifying ceramic oxide layers, silicon containing coatings, silicon carbon containing coatings, silicon nitrogen containing coatings, silicon nitrogen carbon containing coatings, silicon oxygen nitrogen containing coatings, and diamond like carbon coatings on the coated substrate.
References Cited (Backward Citations)
US3615272A
Cited
US4756977A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-11-24 | 1996-05-25 | 1996-11-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-11-24 | 2000-05-25 | 2000-11-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-11-24 | 2004-05-25 | 2004-11-24 | $7700.00 | Window Closed / Lapsed |