US5510646A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Metal-to-metal antifuse with improved diffusion barrier layer
Assignee: Microsemi SoC Corp
•
Filing: 1993-06-10
•
Granted: 1996-04-23
•
Expires: 2013-06-10
Abstract
Abstract A metal-to-metal antifuse comprises a lower electrode comprising a first metal layer in an integrated circuit, a first barrier layer formed from a layer of TiW:N disposed over the lower electrode, a layer of antifuse material formed from amorphous silicon over the first barrier layer, a second barrier layer formed from a layer of TiW:N disposed over the layer of antifuse material, said second barrier layer, and an upper electrode over the second barrier layer, the upper electrode comprising a second metal layer in the integrated circuit.
Inventors
- 👤 Abdul R. Forouhi
- 👤 Iton Wang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 21:31
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/40; H10W20/49; H10W20/491; H10W20/493
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
133 words
A metal-to-metal antifuse comprising; a lower electrode comprising a portion of a first metal interconnect layer in an integrated circuit; a first barrier layer disposed over said lower electrode, said first barrier layer formed from a layer of TiW:N; a layer of antifuse material disposed over said first barrier layer, said layer of antifuse material formed from amorphous silicon; a second barrier layer disposed over said layer of antifuse material, said second barrier layer formed from a layer of TiW:N; said first and second barrier layers acting to limit a leakage current in said antifuse to a value less than about 1×10 -8 A/μm 2 at 5 volts: and an upper electrode disposed over said second barrier layer, said upper electrode comprising a portion of a second metal layer in said integrated circuit.
Claim 2
Dependent Claim
133 words
A metal-to-metal antifuse comprising; a lower electrode comprising a portion of a first metal interconnect layer in an integrated circuit; a first barrier layer disposed over said lower electrode, said first barrier layer formed from a layer of TiW:N; a layer of antifuse material disposed over said first barrier layer, said layer of antifuse material formed from amorphous silicon; a second barrier layer disposed over said layer of antifuse material, said second barrier layer formed from a layer of TiW:N; said first and second barrier layers acting to limit a leakage current in said antifuse to a value less than about 1×10 -8 A/μm 2 at 5 volts: and an upper electrode disposed over said second barrier layer, said upper electrode comprising a portion of a second metal layer in said integrated circuit.
Claim 3
Dependent Claim
88 words
An antifuse structure comprising first and second electrodes separated by a layer of antifuse material, at least one of said first and second electrodes comprising a metal layer, said antifuse further including as barrier layer comprising a layer of TiW:N, said barrier layer disposed between said layer of antifuse material and the one of said first and second electrodes which comprises a metal layer, said. barrier layer acting to limit a leakage current in said antifuse to a value less than about, 1×10 -8 A/μm at 5 volts.
Claim 4
Dependent Claim
88 words
An antifuse structure comprising first and second electrodes separated by a layer of antifuse material, at least one of said first and second electrodes comprising a metal layer, said antifuse further including as barrier layer comprising a layer of TiW:N, said barrier layer disposed between said layer of antifuse material and the one of said first and second electrodes which comprises a metal layer, said. barrier layer acting to limit a leakage current in said antifuse to a value less than about, 1×10 -8 A/μm at 5 volts.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1999-04-23 | 1999-10-23 | 2000-04-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2003-04-23 | 2003-10-23 | 2004-04-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2007-04-23 | 2007-10-23 | 2008-04-23 | $7700.00 | Window Closed / Lapsed |