US5436035A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Coating a substrate surface with a permeation barrier
Assignee: 3A Composites International AG
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Filing: 1992-11-30
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Granted: 1995-07-25
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Expires: 2012-11-30
Abstract
Abstract A substrate surface is coated with a permeation barrier of inorganic material, which is vaporized from a crucible in a vacuum chamber evacuated to at least 10 -3 mbar and precipitated on the substrate surface. An ionizing electron beam of low energy is thus passed through the gas phase of inorganic material with formation of a plasma, preferably in the direction running approximately parallel to the substrate surface. At least one low voltage electron beam gun with assigned electrode is incorporated in the vacuum chamber between the crucible and the substrate support. The main application is for coating plastic films for the packaging industry.
Inventors
- 👤 Wolfgang Lohwasser
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:36
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/24; C23C14/32; C23C14/06; C23C14/08; C23C14/081; C23C14/10; C23C14/14; C23C14/20
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
172 words
Process which comprises: providing a substrate having a substrate surface; coating the substrate surface with an inorganic material to form a permeation barrier against gases and liquids, by vaporizing a source of the inorganic material from a crucible in a vacuum chamber evacuated to at least 10 -3 mbar to provide a gas phase of said inorganic material and precipitating the vaporized material on the substrate surface, and wherein an ionizing electron beam of low energy created by at least one low voltage electron beam gun at a voltage of 10-100 V and a current strength of 0-300 A is passed through the gas phase of said inorganic material in a direction running approximately parallel to the substrate surface onto a heated anode surface which has a temperature over 2000° C., positioning said anode surface above said crucible for cooperating with said at least one low voltage electron beam gun and said ionizing electron beam of low energy producing a plasma jet which contacts said anode surface and heats said anode surface.
Claim 2
Dependent Claim
172 words
Process which comprises: providing a substrate having a substrate surface; coating the substrate surface with an inorganic material to form a permeation barrier against gases and liquids, by vaporizing a source of the inorganic material from a crucible in a vacuum chamber evacuated to at least 10 -3 mbar to provide a gas phase of said inorganic material and precipitating the vaporized material on the substrate surface, and wherein an ionizing electron beam of low energy created by at least one low voltage electron beam gun at a voltage of 10-100 V and a current strength of 0-300 A is passed through the gas phase of said inorganic material in a direction running approximately parallel to the substrate surface onto a heated anode surface which has a temperature over 2000° C., positioning said anode surface above said crucible for cooperating with said at least one low voltage electron beam gun and said ionizing electron beam of low energy producing a plasma jet which contacts said anode surface and heats said anode surface.
Claim 3
Dependent Claim
27 words
Process according to claim 1, wherein the neutral anode surface is selected from the group consisting of a tungsten filament, a tungsten mesh and a tantalum tube.
Claim 4
Dependent Claim
30 words
Process according to claim 1, wherein the electron beam of low energy is operated with addition of a material selected from the group consisting of a noble gas and nitrogen.
Claim 5
Dependent Claim
50 words
Process according to claim 1, wherein the inorganic material is vaporized by contact with a second electron beam from a scanning high voltage electron beam gun, which is operated at a voltage equal to or greater than 5 kV and a current strength equal to or less than 2 A.
Claim 6
Dependent Claim
33 words
Process according to claim 1, wherein the substrate is an electrically conducting substrate and a bias voltage with negative potential is applied to the electrically conducting substrate to accelerate ionic particles of material.
Claim 7
Dependent Claim
27 words
Process according to claim 1, wherein an additional magnetic field is produced having main field components thereof, the main field components running parallel to the plasma jet.
Claim 8
Dependent Claim
18 words
Process according to claim 1, wherein coating takes place at a precipitation rate of at least 0.01 μm/second.
Claim 9
Dependent Claim
12 words
Process according to claim 7, wherein the precipitation rate is 0.5-1 μm/second.
Claim 10
Dependent Claim
30 words
Process according to claim 1, wherein said substrate is a plastic film coated by passing through said gas phase of inorganic material at a rate of 1 to 10 m/second.
Claim 11
Dependent Claim
25 words
Process according to claim 9, wherein said plastic film is coated by passing through said gas phase at the rate of 3 to 6 m/second.
Claim 12
Dependent Claim
33 words
Process according to claim 1, wherein at least one reactive gas is supplied during coating, wherein the reactive gas is selected from the group consisting of oxygen, nitrogen, hydrogen, acetylene and mixtures thereof.
Claim 13
Dependent Claim
20 words
Process according to claim 1 for coating plastic films for the packaging industry wherein the substrate is a plastic film.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1998-07-24 | 1999-01-23 | 1999-07-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2002-07-24 | 2003-01-23 | 2003-07-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2006-07-24 | 2007-01-23 | 2007-07-25 | $7700.00 | Window Closed / Lapsed |