US3419487A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of growing thin film semiconductors using an electron beam
Assignee: Dow Silicones Corp
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Filing: 1966-01-24
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Granted: 1968-12-31
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Expires: 1986-01-24
Abstract
No abstract record available.
Inventors
- 👤 William B Robbins
- 👤 Edward L Kern
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 16:37
CPC Classifications
C; C23; C23C; C23C26/00; C23C14/00; C23C14/0021; C23C14/04; C23C14/048; C23C14/22; C23C14/24; C23C14/32; C23C8/00; C23C8/04; C23C8/06; C23C8/36; H; H10; H10P; H10P95/00; Y; Y10; Y10S; Y10S117/00; Y10S117/905; Y10S148/00; Y10S148/048; Y10S148/065; Y10S148/071; Y10S148/158; Y10S148/169; Y10S438/00; Y10S438/971
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
73 words
A METHOD OF FORMING ON A SUBSTRATE THIN FILMS OF SEMICONDUCTOR MATERIALS CONSISTING OF AT LEAST ONE INTERMETALLIC COMPOUND SELECTED FROM THE CLASS CONSISTING OF CADMIUM SULFIDE, CADMIUM SELENIDE, CADMIUM TELLURIDE, ZINC SULFIDE, ZINC SELENIDE, ZINC TELLURIDE, GALLIUM ANTIMONIDE, GALLIUM ARSENIDE, INDIUM ANTIMONIDE, AND INDIUM ARSENIDE WHICH COMPRISES: DEPOSITING A LAYER OF THE METALLIC ELEMENT OF SAID INTERMETALLIC COMPOUND SELECTED FROM THE CLASS CONSISTING OF CADMIUM, ZINC, GALLIUM, AND INDIUM ON SAID SUBSTRATE.
Claim 2
Independent Claim
73 words
A METHOD OF FORMING ON A SUBSTRATE THIN FILMS OF SEMICONDUCTOR MATERIALS CONSISTING OF AT LEAST ONE INTERMETALLIC COMPOUND SELECTED FROM THE CLASS CONSISTING OF CADMIUM SULFIDE, CADMIUM SELENIDE, CADMIUM TELLURIDE, ZINC SULFIDE, ZINC SELENIDE, ZINC TELLURIDE, GALLIUM ANTIMONIDE, GALLIUM ARSENIDE, INDIUM ANTIMONIDE, AND INDIUM ARSENIDE WHICH COMPRISES: DEPOSITING A LAYER OF THE METALLIC ELEMENT OF SAID INTERMETALLIC COMPOUND SELECTED FROM THE CLASS CONSISTING OF CADMIUM, ZINC, GALLIUM, AND INDIUM ON SAID SUBSTRATE.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1971-12-31 | 1972-07-01 | 1972-12-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1975-12-31 | 1976-07-01 | 1976-12-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1979-12-31 | 1980-07-01 | 1980-12-31 | $7700.00 | Window Closed / Lapsed |