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US5091289A
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Process for forming multi-level coplanar conductor/insulator films employing photosensitive polyimide polymer compositions
Assignee: International Business Machines Corp
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Filing: 1990-04-30
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Granted: 1992-02-25
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Expires: 2010-04-30
Abstract
Abstract Disclosed is a process for producing multi-level conductor/insulator films on a processed semiconductor substrate having a conductor pattern. The insulator layers, each comprise a photosensitive polyimide polymer composition, and this allows the desired wiring channels and stud vias to be formed directly in the insulator layers, without the use of separate masking layers and resulting image transfer steps, thus providing a less cumbersome and costly process.
Inventors
- 👤 John E. Cronin
- 👤 Carter W. Kaanta
- 👤 Rosemary A. Previti-Kelly
- 👤 James G. Ryan
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 10:51
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/093; H10W20/097; H10W20/081; H10W20/084; H10W20/095; H10W20/40; H10W20/41; H10W20/435
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
186 words
A process for forming multi-level coplanar conductor/insulator films on a substrate having a conductor pattern, comprising the steps of: applying a first layer comprising a photosensitive polyimide polymer composition to said substrate; applying a develop stop layer to said first layer, said develop stop layer being comprised of a material which is capable of transmitting radiation to said first layer; applying a second layer comprising a photosensitive polyimide polymer composition to said develop stop layer; imagewise exposing said first and second layers and then developing said second layer so as to selectively expose portions of said develop stop layer; removing said exposed portions of said develop stop layer; imagewise exposing and developing said first layer so as to selectively expose regions of said substrate, the openings formed in said first layer being in alignment with at least a portion of the openings formed in said second layer; depositing a conductor material on said second layer and in said openings in said first and second layers; and removing said conductor material which overlies said second layer to coplanarize the surfaces of conductor material and said second layer.
Claim 2
Dependent Claim
186 words
A process for forming multi-level coplanar conductor/insulator films on a substrate having a conductor pattern, comprising the steps of: applying a first layer comprising a photosensitive polyimide polymer composition to said substrate; applying a develop stop layer to said first layer, said develop stop layer being comprised of a material which is capable of transmitting radiation to said first layer; applying a second layer comprising a photosensitive polyimide polymer composition to said develop stop layer; imagewise exposing said first and second layers and then developing said second layer so as to selectively expose portions of said develop stop layer; removing said exposed portions of said develop stop layer; imagewise exposing and developing said first layer so as to selectively expose regions of said substrate, the openings formed in said first layer being in alignment with at least a portion of the openings formed in said second layer; depositing a conductor material on said second layer and in said openings in said first and second layers; and removing said conductor material which overlies said second layer to coplanarize the surfaces of conductor material and said second layer.
Claim 3
Dependent Claim
53 words
The process of claim 1, wherein said photosensitive polyimide polymer composition comprises a fully imidized solvent soluble polyimide with a structural unit having the general formula ##STR2## where R represents an aliphatic group, and R' represents an optional aliphatic substituent which may be the same as or different from R, and a solvent.
Claim 4
Dependent Claim
22 words
The process of claim 1, wherein said develop stop layer comprises a material selected from silicon, silicon dioxide, spin-on-glass and a polysiloxane.
Claim 5
Dependent Claim
19 words
The process of claim 1, wherein said conductor is a metal selected from aluminum, copper, Al-Cu, Al-Si and tungsten.
Claim 6
Dependent Claim
23 words
The process of claim 1, wherein said first layer is imagewise exposed before said exposed portions of said develop stop layer are removed.
Claim 7
Dependent Claim
50 words
The process of claim 1, wherein said first layer has a thickness ranging from about 0.2 to about 1 microns; said second layer has a thickness ranging from about 0.05 to about 1.2 microns; and said develop stop layer has a thickness ranging from about 0.01 to about 0.1 microns.
Claim 8
Dependent Claim
20 words
The process of claim 1, wherein said conductor material which overlies said second layer is removed by using chemical-mechanical polishing.
Claim 9
Dependent Claim
16 words
The process of claim 1, wherein said steps are repeated to form additional coplanar conductor/insulator films.
Claim 10
Dependent Claim
209 words
A process for forming multi-level coplanar metal/insulator films on a substrate having a conductor pattern, comprising the steps of: depositing a first layer comprising a photosensitive polyimide polymer composition over said substrate; depositing a develop stop layer over said first layer, said develop stop layer being comprised of a material which is capable of transmitting radiation to said first layer; depositing a second layer comprising a photosensitive polyimide polymer composition over said develop stop layer; imagewise exposing said first and second layers; spraying said substrate with a developer so as to remove portions of said second layer and to selectively expose portions of said develop stop layer; etching to remove said exposed portions of said develop stop layer; imagewise exposing said first layer; spraying said substrate with a developer so as to remove portions of said first layer and to selectively expose regions of said substrate, the openings formed in said first layer being in alignment with at least a portion of the openings formed in said second layer; depositing a metal over said second layer and in said openings in said first and second layers; and removing said metal which overlies said second layer by using chemical-mechanical polishing to coplanarize the surfaces of metal and said second layer.
Claim 11
Dependent Claim
209 words
A process for forming multi-level coplanar metal/insulator films on a substrate having a conductor pattern, comprising the steps of: depositing a first layer comprising a photosensitive polyimide polymer composition over said substrate; depositing a develop stop layer over said first layer, said develop stop layer being comprised of a material which is capable of transmitting radiation to said first layer; depositing a second layer comprising a photosensitive polyimide polymer composition over said develop stop layer; imagewise exposing said first and second layers; spraying said substrate with a developer so as to remove portions of said second layer and to selectively expose portions of said develop stop layer; etching to remove said exposed portions of said develop stop layer; imagewise exposing said first layer; spraying said substrate with a developer so as to remove portions of said first layer and to selectively expose regions of said substrate, the openings formed in said first layer being in alignment with at least a portion of the openings formed in said second layer; depositing a metal over said second layer and in said openings in said first and second layers; and removing said metal which overlies said second layer by using chemical-mechanical polishing to coplanarize the surfaces of metal and said second layer.
Claim 12
Dependent Claim
53 words
The process of claim 9, wherein said photosensitive polyimide polymer composition comprises a fully imidized solvent soluble polyimide with a structural unit having the general formula ##STR3## where R represents an aliphatic group, and R' represents an optional aliphatic substituent which may be the same as or different from R, and a solvent.
Claim 13
Dependent Claim
34 words
The process of claim 10, wherein said develop stop layer comprises a material selected from silicon, silicon dioxide, spin-on-glass and a polysiloxane; and said metal is selected from aluminum, copper, Al-Cu, Al-Si and tungsten.
Claim 14
Dependent Claim
50 words
The process of claim 11, wherein said first layer has a thickness ranging from about 0.6 to about 0.7 microns; said second layer has a thickness ranging from about 0.2 to about 0.5 microns; and said develop stop layer has a thickness ranging from about 0.025 to about 0.05 microns.
Claim 15
Dependent Claim
16 words
The process of claim 12, wherein said steps are repeated to form additional coplanar metal/insulator films.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1995-02-24 | 1995-08-26 | 1996-02-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-02-24 | 1999-08-26 | 2000-02-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-02-24 | 2003-08-26 | 2004-02-25 | $7700.00 | Window Closed / Lapsed |