US4965173A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Metallizing process and structure for semiconductor devices
Assignee: Infineon Technologies Americas Corp
•
Filing: 1988-06-20
•
Granted: 1990-10-23
•
Expires: 2008-06-20
Abstract
Abstract A metallizing system for silicon surfaces consists of sequential layers of nickel, chromium, nickel and silver. Approximately 2 microns of the silicon surface are removed prior to metallization to ensure removal of an oxygen-saturated layer of silicon before the first nickel layer is deposited. The assembly is heated sufficiently that the first nickel layer forms a nickel-silicide layer at the silicon surface. The metallizing adheres to bare treated silicon but does not adhere to adjacent oxide coatings and easily lifts off of oxide-coated surfaces. The metallizing is solderable, makes ohmic contact to the silicon, regardless of its conductivity type and survives subsequent alloy processing temperatures.
Inventors
- 👤 Herbert J. Gould
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 03:36
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/069; H10P; H10P14/00; H10P14/40; H10P14/42; H10P14/44; H10P50/00; H10P50/60; H10P50/64; H10P50/642; H10P50/644; H10P54/00
Claims Analysis
Total Claims: 51
Claim 1
Independent Claim
92 words
The method of metallizing a surface portion of a monocrystalline silicon wafer comprising the steps of removing at least a one micron thickness from said surface portion to ensure removal of unintended oxygen contamination in said surface portion; depositing a thin layer of nickel onto said surface portion and converting at least a portion of the thickness of said nickel layer to nickel silicide; and depositing at least a layer of a contact metal into electrical contact with said fixed relative to said thin layer of nickel and being strongly surface portion.
Claim 2
Independent Claim
92 words
The method of metallizing a surface portion of a monocrystalline silicon wafer comprising the steps of removing at least a one micron thickness from said surface portion to ensure removal of unintended oxygen contamination in said surface portion; depositing a thin layer of nickel onto said surface portion and converting at least a portion of the thickness of said nickel layer to nickel silicide; and depositing at least a layer of a contact metal into electrical contact with said fixed relative to said thin layer of nickel and being strongly surface portion.
Claim 3
Dependent Claim
19 words
The method of claim 1 wherein said surface portion is at least one of the N-type or P-type conductivities.
Claim 4
Dependent Claim
49 words
The method of claim 2 which includes the further steps of depositing a layer of chromium atop said layer of nickel and depositing a second layer of nickel atop said layer of chromium; said layer of contact metal being deposited atop said layer of chromium and consisting of silver.
Claim 5
Dependent Claim
38 words
The method of claim 3 wherein said step of removal of said at least one micron thickness is carried out by etching with an etchant which consists of a mixture of hydrofluoric acid, nitric acid and acetic acid.
Claim 6
Dependent Claim
37 words
The method of claim 4 which includes the further step of lightly etching said surface portion with dilute hydrofluoric acid to strip away any chemical oxide which remains after etching with said etchant which includes nitric acid.
Claim 7
Dependent Claim
21 words
The method of claim 1 wherein said at least one micron thickness is removed from said surface by an acid etch.
Claim 8
Dependent Claim
21 words
The method of claim 6 wherein the thickness of material removed from said surface portion is from one to three microns.
Claim 9
Dependent Claim
32 words
The method of claim 6 wherein said acid etch consists of a mixture of hydrofluoric acid, nitric acid and acetic acid which is applied to said surface portion for about 15 seconds.
Claim 10
Dependent Claim
24 words
The method of claim 8 wherein said acid etch consists of 2 parts hydrofluoric acid, 9 parts nitric acid and 4 parts acetic acid.
Claim 11
Dependent Claim
37 words
The method of claim 8 which includes the further step of lightly etching said surface portion with dilute hydrofluoric acid to strip away any chemical oxide which remains after etching with said etchant which includes nitric acid.
Claim 12
Dependent Claim
21 words
The method of claim 1 wherein the thickness of material removed from said surface portion is from one to three microns.
Claim 13
Dependent Claim
17 words
The method of claim 1 wherein said nickel layer has a thickness greater than about 125 Angstroms.
Claim 14
Dependent Claim
22 words
The method of claim 12 wherein said at least one micron thickness is removed from said surface portion by an acid etch.
Claim 15
Dependent Claim
20 words
The method of claim 13 wherein said acid etch comprises a mixture of hydrofluoric acid, nitric acid and acetic acid.
Claim 16
Dependent Claim
21 words
The method of claim 12 wherein the thickness of material removed from said surface portion is from one to three microns.
Claim 17
Dependent Claim
23 words
The method of claim 1 wherein said nickel layer has a thickness in the range of from 125 Angstroms to about 1,000 Angstroms.
Claim 18
Dependent Claim
49 words
The method of claim 1 which includes the further steps of depositing a layer of chromium atop said layer of nickel, and depositing a second layer of nickel atop said layer of chromium; said layer of contact metal being deposited atop said layer of chromium and consisting of silver.
Claim 19
Dependent Claim
50 words
The method of claim 17 wherein said layer of nickel is from 125 Angstroms to 1,000 Angstroms thick, said layer of chromium is about 1,500 Angstroms thick, said second layer of nickel is about 4,000 Angstroms thick and said layer of silver has a thickness greater than about 1 micron.
Claim 20
Dependent Claim
26 words
The method of claim 1, wherein said surface portion is laterally bounded by a further surface portion contaminated with oxygen and overlain by an oxide layer.
Claim 21
Dependent Claim
20 words
The method of claim 1 wherein said contact metal layer is of a material which is resistant to caustic etch.
Claim 22
Dependent Claim
13 words
The method of claim 20 wherein said contact metal layer is of silver.
Claim 23
Dependent Claim
15 words
The process of claim 1, wherein each of said deposited layers is deposited by evaporation.
Claim 24
Independent Claim
225 words
The method of metallizing an exposed surface portion of a silicon wafer with a metallizing surface which is capable of surviving process temperatures of at least 650° C. and which makes ohmic contact to N or P-type silicon and which is resistant to a large variety of chemical etches and is easily solderable; said method comprising the steps of: applying an insulation coating to a surface of said silicon wafer; photolithographically masking and etching through said mask to expose at least one predetermined surface portion of said surface through said insulation coating; removing at least a one micron thickness from said surface portion while leaving said insulation coating intact, to ensure removal of unintended oxygen contamination in said surface portion; depositing a thin continuous layer of a silicide-forming metal atop said surface portion and atop adjacent surfaces of said insulation coating; depositing at least a layer of a contact metal in electrical contact with said layer of said silicide-forming metal and converting at least a portion of the thickness of said silicide-forming metal to a metal silicide; and applying a delaminating stress to said metal layers and removing said silicide forming metal and said contact metal layer from atop said insulation layer; said silicide forming metal and said contact metal remaining on and being strongly fixed relative to said surface portion of said silicon wafer.
Claim 25
Independent Claim
225 words
The method of metallizing an exposed surface portion of a silicon wafer with a metallizing surface which is capable of surviving process temperatures of at least 650° C. and which makes ohmic contact to N or P-type silicon and which is resistant to a large variety of chemical etches and is easily solderable; said method comprising the steps of: applying an insulation coating to a surface of said silicon wafer; photolithographically masking and etching through said mask to expose at least one predetermined surface portion of said surface through said insulation coating; removing at least a one micron thickness from said surface portion while leaving said insulation coating intact, to ensure removal of unintended oxygen contamination in said surface portion; depositing a thin continuous layer of a silicide-forming metal atop said surface portion and atop adjacent surfaces of said insulation coating; depositing at least a layer of a contact metal in electrical contact with said layer of said silicide-forming metal and converting at least a portion of the thickness of said silicide-forming metal to a metal silicide; and applying a delaminating stress to said metal layers and removing said silicide forming metal and said contact metal layer from atop said insulation layer; said silicide forming metal and said contact metal remaining on and being strongly fixed relative to said surface portion of said silicon wafer.
Claim 26
Dependent Claim
12 words
The method of claim 23 wherein said insulation coating is an oxide.
Claim 27
Dependent Claim
11 words
The method of claim 24 wherein said silicide-forming metal is nickel.
Claim 28
Dependent Claim
12 words
The method of claim 25 wherein said contact metal layer is silver.
Claim 29
Dependent Claim
11 words
The method of claim 23 wherein said silicide-forming metal is nickel.
Claim 30
Dependent Claim
17 words
The method of claim 27 wherein said nickel layer has a thickness greater than about 125 Angstroms.
Claim 31
Dependent Claim
12 words
The method of claim 28 wherein said insulation coating is an oxide.
Claim 32
Dependent Claim
24 words
The method of claim 23, wherein said insulation coating comprises an oxide overlying a surface portion off said wafer which is contaminated with oxygen.
Claim 33
Dependent Claim
21 words
The method of claim 23 wherein the thickness of material removed from said surface portion is from one to three microns.
Claim 34
Dependent Claim
40 words
The method of claim 31 wherein said step of removal of said at least one micron thickness is carried out by etching with an etchant comprising a mixture of hydrofluoric acid, nitric acid and acetic acid for approximately 15 seconds.
Claim 35
Dependent Claim
37 words
The method of claim 32 which includes the further step of lightly etching said surface portion with dilute hydrofluoric acid to strip away any chemical oxide which remains after etching with said etchant which includes nitric acid.
Claim 36
Dependent Claim
41 words
The method of claim 23 which includes the further steps of depositing a layer of chromium atop said silicide-forming metal, and depositing a layer of nickel atop said layer of chromium; said contact metal layer deposited atop said layer of chromium.
Claim 37
Dependent Claim
13 words
The method of claim 34 wherein said contact metal layer consists of silver.
Claim 38
Dependent Claim
78 words
The method of claim 35 wherein said layer of silicide-forming metal has a thickness from 125 Angstroms to 1,000 Angstroms, said chromium layer has a thickness which is sufficient to serve as a diffusion barrier and being approximately 1,000 Angstroms, said nickel layer atop said chromium layer is thick enough to prevent leaching of said silver layer into said chromium layer and is approximately 4,000 Angstroms and said silver layer has a thickness greater than about 1 micron.
Claim 39
Dependent Claim
21 words
The method of claim 36 wherein the thickness of material removed from said surface portion is from one to three microns.
Claim 40
Dependent Claim
40 words
The method of claim 36 wherein said step of removal of said at least one micron thickness is caried out by etching with an etchant comprising a mixture of hydrofluoric acid, nitric acid and acetic acid for approximately 15 seconds.
Claim 41
Dependent Claim
15 words
The method of claim 36 wherein each of said deposited layers is deposited by evaporation.
Claim 42
Independent Claim
280 words
The method of metallizing a plurality of exposed surface portions of a silicon wafer, which surface portions are for respective wafer elements which are subsequently to be separated from one another, wherein the metallizing surface is capable of surviving process temperatures of greater than about 650° C. and makes ohmic contact to N or P type silicon and is resistant to a large variety of chemical etches and is easily solderable; said method comprising the steps of: applying an insulation coating to a surface of said silicon wafer; photolithographically masking and etching through said mask to expose at least one predetermined surface portion of said surface through said insulation coating; removing at least a one micron thickness from said surface portion while leaving said insulation coating intact to ensure removal of unintended oxygen contamination in said surface portion; depositing a thin continuous layer of a silicide-forming metal atop said surface portion and atop adjacent surfaces of said insulation coating and converting at least a portion of the thickness of said silicide-forming metal to a metal silicide; depositing at least a layer of a contact metal in electrical contact with said layer of said silicide-forming metal; applying a delaminating stress to said metal layers to remove said silicide forming layer and said contact metal layer from atop said insulation coating, with said silicide forming layer and said contact layer being strong fixed relative to said surface portion of said silicon wafer; cutting apart said silicon wafer into a plurality of wafer elements which all contain at least one of said plurality of exposed surface portions; and thereafter further processing each of said plurality of wafer elements to complete respective semiconductor device.
Claim 43
Independent Claim
280 words
The method of metallizing a plurality of exposed surface portions of a silicon wafer, which surface portions are for respective wafer elements which are subsequently to be separated from one another, wherein the metallizing surface is capable of surviving process temperatures of greater than about 650° C. and makes ohmic contact to N or P type silicon and is resistant to a large variety of chemical etches and is easily solderable; said method comprising the steps of: applying an insulation coating to a surface of said silicon wafer; photolithographically masking and etching through said mask to expose at least one predetermined surface portion of said surface through said insulation coating; removing at least a one micron thickness from said surface portion while leaving said insulation coating intact to ensure removal of unintended oxygen contamination in said surface portion; depositing a thin continuous layer of a silicide-forming metal atop said surface portion and atop adjacent surfaces of said insulation coating and converting at least a portion of the thickness of said silicide-forming metal to a metal silicide; depositing at least a layer of a contact metal in electrical contact with said layer of said silicide-forming metal; applying a delaminating stress to said metal layers to remove said silicide forming layer and said contact metal layer from atop said insulation coating, with said silicide forming layer and said contact layer being strong fixed relative to said surface portion of said silicon wafer; cutting apart said silicon wafer into a plurality of wafer elements which all contain at least one of said plurality of exposed surface portions; and thereafter further processing each of said plurality of wafer elements to complete respective semiconductor device.
Claim 44
Dependent Claim
16 words
The method of claim 40 wherein each of said wafer elements is identical to one another.
Claim 45
Dependent Claim
11 words
The method of claim 41 wherein said silicide-forming metal is nickel.
Claim 46
Dependent Claim
12 words
The method of claim 40 wherein said insulation coating is an oxide.
Claim 47
Dependent Claim
17 words
The method of claim 37 wherein said nickel layer has a thickness greater than about 100 Angstroms.
Claim 48
Dependent Claim
11 words
The method of claim 40 wherein said silicide-forming metal is nickel.
Claim 49
Dependent Claim
24 words
The method of claim 40, wherein said insulation coating comprises an oxide overlying a surface portion off said wafer which is contaminated with oxygen.
Claim 50
Dependent Claim
21 words
The method of claim 46 wherein the thickness of material removed from said surface portion is from one to three microns.
Claim 51
Dependent Claim
51 words
The method of claim 46 which includes the steps prior to separation of said wafer into said wafer elements, of depositing a layer of chromium atop said silicide-forming metal, and depositing a layer of nickel atop said layer of chromium; said contact metal layer being deposited atop said layer of chromium.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1993-10-22 | 1994-04-23 | 1994-10-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1997-10-22 | 1998-04-23 | 1998-10-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2001-10-22 | 2002-04-23 | 2002-10-23 | $7700.00 | Window Closed / Lapsed |