US4663820A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Metallizing process for semiconductor devices
Assignee: Infineon Technologies Americas Corp
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Filing: 1984-06-11
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Granted: 1987-05-12
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Expires: 2004-06-11
Abstract
Abstract A metallizing system for silicon surfaces consists solely of two layers of nickel and silver, respectively. Approximately 2 microns of the underlying silicon surface is removed prior to metallization to ensure removal of an oxygen-saturated layer of silicon before the nickel layer is deposited. The assembly is heated sufficiently that the nickel layer forms a nickel-silicide layer at the silicon surface. The metallizing adheres to the bare treated silicon but does not adhere to adjacent oxide coatings and easily lifts off of oxide-coated surfaces. The metallizing is solderable, makes ohmic contact to the silicon, regardless of its conductivity type and survives subsequent alloy processing temperatures.
Inventors
- 👤 Adrian C. Ionescu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 03:41
CPC Classifications
H; H10; H10D; H10D10/00; H10D10/01; H10D10/051; H10D10/056; H10D64/00; H10D64/01; H10D64/011; H10D64/0111; H10D64/0112; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/064; H10W20/066; H10W20/40; H10W20/41; H10W20/44; H10W20/4403; H10W20/4432; H10W74/00; H10W74/10; H10W74/131; H10W74/137; Y; Y10; Y10S; Y10S148/00; Y10S148/017; Y10S148/019; Y10S438/00; Y10S438/906
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
88 words
The method of metallizing a surface portion of a monocrystalline silicon wafer comprising the steps of removing from about one to three microns thickness from said surface portion to ensure removal of unintended oxygen contamination in said surface portion; depositing a thin layer of nickel onto said surface portion and converting at least a portion of the thickness of said nickel layer to nickel silicide; and thereafter depositing a single layer of silver directly atop said layer of nickel; said silver being tenaciously fixed to said surface portion.
Claim 2
Independent Claim
88 words
The method of metallizing a surface portion of a monocrystalline silicon wafer comprising the steps of removing from about one to three microns thickness from said surface portion to ensure removal of unintended oxygen contamination in said surface portion; depositing a thin layer of nickel onto said surface portion and converting at least a portion of the thickness of said nickel layer to nickel silicide; and thereafter depositing a single layer of silver directly atop said layer of nickel; said silver being tenaciously fixed to said surface portion.
Claim 3
Dependent Claim
19 words
The method of claim 1, wherein said surface portion is at least one of the N-type or P-type conductivities.
Claim 4
Dependent Claim
21 words
The method of claim 1, wherein said at least one micron thickness is removed from said surface by an acid etch.
Claim 5
Dependent Claim
32 words
The method of claim 3, wherein said acid etch consists of a mixture of hydrofluoric acid, nitric acid and acetic acid which is applied to said surface portion for about 15 seconds.
Claim 6
Dependent Claim
24 words
The method of claim 4, wherein said acid etch consists of 2 parts hydrofluoric acid, 9 parts nitric acid and 4 parts acetic acid.
Claim 7
Dependent Claim
17 words
The method of claim 1, wherein said nickel layer has a thickness greater than about 300 Angstroms.
Claim 8
Dependent Claim
22 words
The method of claim 1, wherein said nickel layer has a thickness in the range from 300 Angstroms to about 1,500 Angstroms.
Claim 9
Dependent Claim
24 words
The method of claim 6 or 7, wherein said at least one micron thickness is removed from said surface portion by an acid etch.
Claim 10
Dependent Claim
20 words
The method of claim 8, wherein said acid etch comprises a mixture of hydrofluoric acid, nitric acid and acetic acid.
Claim 11
Dependent Claim
25 words
The method of claim 1, 2, 3, 6 or 7, wherein said contact metal layer is of a material which is resistant to caustic etch.
Claim 12
Independent Claim
244 words
The method of metallizing an exposed surface portion of a silicon wafer with a metallizing surface which is capable of surviving process temperatures of at least 650° C. and which makes ohmic contact to N or P-type silicon and which is resistant to a large variety of chemical etches and is easily solderable; said method comprising the steps of: applying an insulation coating to a surface of said silicon wafer; photolithographically masking and etching through said mask to expose at least one predetermined surface portion of said surface through which insulation coating; removing at least a one micron thickness from said surface portion while leaving said insulation coating intact, to ensure removal of unintended oxygen contamination in said surface portion; depositing a thin continuous layer of a silicide-forming metal atop said surface portion and atop adjacent surfaces of said insulation coating; depositing a layer of a contact metal directly atop said layer of said silicide-forming metal and converting at least a portion of the thickness of said silicide-forming metal to a metal silicide; and applying a delaminating stress to said metal layers and removing said silicide forming metal and said contact metal layer from atop said insulation layer; said silicide forming metal and said contact metal remaining on and strongly adhering to said surface portion of said silicon wafer; said layer of silicide-forming metal and said layer of contact metal comprising the sole layers of the metallizing on said exposed surface of said wafer.
Claim 13
Independent Claim
244 words
The method of metallizing an exposed surface portion of a silicon wafer with a metallizing surface which is capable of surviving process temperatures of at least 650° C. and which makes ohmic contact to N or P-type silicon and which is resistant to a large variety of chemical etches and is easily solderable; said method comprising the steps of: applying an insulation coating to a surface of said silicon wafer; photolithographically masking and etching through said mask to expose at least one predetermined surface portion of said surface through which insulation coating; removing at least a one micron thickness from said surface portion while leaving said insulation coating intact, to ensure removal of unintended oxygen contamination in said surface portion; depositing a thin continuous layer of a silicide-forming metal atop said surface portion and atop adjacent surfaces of said insulation coating; depositing a layer of a contact metal directly atop said layer of said silicide-forming metal and converting at least a portion of the thickness of said silicide-forming metal to a metal silicide; and applying a delaminating stress to said metal layers and removing said silicide forming metal and said contact metal layer from atop said insulation layer; said silicide forming metal and said contact metal remaining on and strongly adhering to said surface portion of said silicon wafer; said layer of silicide-forming metal and said layer of contact metal comprising the sole layers of the metallizing on said exposed surface of said wafer.
Claim 14
Dependent Claim
12 words
The method of claim 11, wherein said insulation coating is an oxide.
Claim 15
Dependent Claim
11 words
The method of claim 11, wherein said silicide-forming metal is nickel.
Claim 16
Dependent Claim
11 words
The method of claim 12, wherein said silicide-forming metal is nickel.
Claim 17
Dependent Claim
12 words
The method of claim 14, wherein said contact metal layer is silver.
Claim 18
Dependent Claim
26 words
The method of claim 11, 12, 13, 14 or 15, wherein the thickness of material removed from said surface portion is from one to three microns.
Claim 19
Dependent Claim
40 words
The method of claim 16, wherein said step of removal of said at least one micron thickness is carried out by etching with an etchant comprising a mixture of hydrofluoric acid, nitric acid and acetic acid for approximately 15 seconds.
Claim 20
Dependent Claim
17 words
The method of claim 13, wherein said nickel layer has a thickness greater than about 300 Angstroms.
Claim 21
Dependent Claim
12 words
The method of claim 18, wherein said insulation coating is an oxide.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-05-11 | 1990-11-10 | 1991-05-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-05-11 | 1994-11-10 | 1995-05-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-05-11 | 1998-11-10 | 1999-05-12 | $7700.00 | Window Closed / Lapsed |