US4871419A
Expired / Lapsed
US
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Method of forming pattern of a two-layer metal film
Assignee: Mitsubishi Electric Corp
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Filing: 1987-11-24
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Granted: 1989-10-03
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Expires: 2007-11-24
Abstract
Abstract A first metal film is formed on the major surface of a semiconductor substrate and a thin film which is at least equal in thickness to a second metal film is formed on the first metal film. These films are patterned to provide a two-layer film pattern of a prescribed configuration, and a resist film is coated on the major surface of the semiconductor substrate including the two-layer film pattern. The surface of the resist film is partially removed to expose a thin film pattern serving as an upper layer of the two-layer film pattern, and only the thin film pattern is removed. A second metal film is evaporated over the entire surface of the resist film including the first metal film pattern exposed in the preceding step and thereafter the resist film is removed with the second metal film formed on the same, to form the two-layer metal film pattern by the first metal film pattern and the second metal film pattern.
Inventors
- 👤 Hirofumi Nakano
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 17:28
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/01; H10D30/061; H10D30/0612; H10D30/0616; C; C23; C23C; C23C14/00; C23C14/04; C23C14/042; H10P; H10P30/00; H10P30/20; H10P30/22; H10P76/00; H10P76/20; H10P76/40; Y; Y10; Y10S; Y10S438/00; Y10S438/942; Y10S438/948; Y10S438/951
Claims Analysis
Total Claims: 53
Claim 1
Independent Claim
231 words
A method of forming a pattern of a two-layer metal film, said method comprising preparing a semiconductor substrate having a major surface; forming a composite film pattern of a prescribed configuration consisting of a first metal film and a thin insulation film on said major surface of said semiconductor substrate, said pattern including therewithin a lower layer of a first metal film pattern formed by said first metal film and an upper layer of a thin film pattern formed by said thin insulation film, said thin insulation film defining a space at least equal in thickness to a second metal film to be formed thereafter; forming a resist film on said major surface of said semiconductor substrate to be in contact with the periphery of said composite film pattern, the thickness of said resist film being at least equal to the sum of the thickness of said first metal film and that of said second metal film; removing both the portion of said resist film formed on said composite film pattern and said thin film pattern from said composite film pattern to expose said first metal film pattern; thereafter forming said second metal film on said exposed first metal film pattern left by removal of said thin film pattern and said resist film; and removing said resist film with the portion of said second metal film formed on said resist film.
Claim 2
Independent Claim
231 words
A method of forming a pattern of a two-layer metal film, said method comprising preparing a semiconductor substrate having a major surface; forming a composite film pattern of a prescribed configuration consisting of a first metal film and a thin insulation film on said major surface of said semiconductor substrate, said pattern including therewithin a lower layer of a first metal film pattern formed by said first metal film and an upper layer of a thin film pattern formed by said thin insulation film, said thin insulation film defining a space at least equal in thickness to a second metal film to be formed thereafter; forming a resist film on said major surface of said semiconductor substrate to be in contact with the periphery of said composite film pattern, the thickness of said resist film being at least equal to the sum of the thickness of said first metal film and that of said second metal film; removing both the portion of said resist film formed on said composite film pattern and said thin film pattern from said composite film pattern to expose said first metal film pattern; thereafter forming said second metal film on said exposed first metal film pattern left by removal of said thin film pattern and said resist film; and removing said resist film with the portion of said second metal film formed on said resist film.
Claim 3
Dependent Claim
20 words
The method of claim 1, wherein said step of forming said two-layer film pattern includes a step of performing photolithography.
Claim 4
Dependent Claim
20 words
The method of claim 1, wherein said first metal film is prepared from a metal having a high melting point.
Claim 5
Dependent Claim
17 words
The method of claim 3, wherein said metal having a high melting point is tungsten silicide (WSi).
Claim 6
Dependent Claim
17 words
The method of claim 1, wherein said insulation film is prepared from silicon oxide (SiO 2 ).
Claim 7
Dependent Claim
15 words
The method of claim 1, wherein said thin film pattern is removed through chemical etching.
Claim 8
Dependent Claim
28 words
The method of claim 6, wherein the etchant for said chemical etching exerts no influence on said first metal film pattern and the remainder of said resist film.
Claim 9
Dependent Claim
18 words
The method of claim 1, wherein said second metal film is prepared from a metal of low resistance.
Claim 10
Dependent Claim
14 words
The method of claim 8, wherein said metal of low resistance is gold (Au).
Claim 11
Dependent Claim
16 words
The method of claim 9, wherein said second metal film is formed by an evaporation method.
Claim 12
Dependent Claim
38 words
The method of claim 1, wherein said step of forming said second metal film and said step of removing said resist film with said second metal film formed on said resist film are based on a lift-off method.
Claim 13
Independent Claim
190 words
A method of forming a pattern of a two-layer metal film, said method comprising preparing a semiconductor substrate having a major surface; forming a composite film pattern of a prescribed configuration consisting of a first metal film and a thin insulation film on said major surface of said semiconductor substrate, said composite film pattern consisting of a lower layer of a first metal film pattern formed by said first metal film and an upper layer of a thin film pattern formed by said thin insulation film, said thin insulation film defining a space at least equal in thickness to a second metal film to be formed thereafter; forming a resist film on said major surface of said semiconductor substrate including said composite film pattern; partially removing said resist film formed on said composite film pattern to expose the upper surface of said thin film pattern; removing said thin film pattern; thereafter forming said second metal film on said first metal film pattern exposed by removal of said thin film pattern and on said resist film; and removing said resist film with said second metal film formed on said resist film.
Claim 14
Independent Claim
190 words
A method of forming a pattern of a two-layer metal film, said method comprising preparing a semiconductor substrate having a major surface; forming a composite film pattern of a prescribed configuration consisting of a first metal film and a thin insulation film on said major surface of said semiconductor substrate, said composite film pattern consisting of a lower layer of a first metal film pattern formed by said first metal film and an upper layer of a thin film pattern formed by said thin insulation film, said thin insulation film defining a space at least equal in thickness to a second metal film to be formed thereafter; forming a resist film on said major surface of said semiconductor substrate including said composite film pattern; partially removing said resist film formed on said composite film pattern to expose the upper surface of said thin film pattern; removing said thin film pattern; thereafter forming said second metal film on said first metal film pattern exposed by removal of said thin film pattern and on said resist film; and removing said resist film with said second metal film formed on said resist film.
Claim 15
Dependent Claim
16 words
The method of claim 12, wherein said step of forming said two-layer film pattern comprises photolithography.
Claim 16
Dependent Claim
20 words
The method of claim 12, wherein said first metal film is prepared from a metal having a high melting point.
Claim 17
Dependent Claim
17 words
The method of claim 12, wherein said metal having a high melting point is tungsten silicide (WSi).
Claim 18
Dependent Claim
17 words
The method of claim 12, wherein said insulation film is prepared from silicon oxide (SiO 2 ).
Claim 19
Dependent Claim
27 words
The method of forming a pattern of a two-layer metal film in accordance with claim 12, wherein said resist film is prepared form a positive type resist.
Claim 20
Dependent Claim
20 words
The method of claim 17 wherein said resist film formed on said two-layer film pattern is removed by exposure technique.
Claim 21
Dependent Claim
28 words
The method of claim 18, wherein at least a part of said resist film being positioned upward beyond the upper surface of said two-layer film pattern is exposed.
Claim 22
Dependent Claim
21 words
The method of claim 12, wherein said resist film formed on said two-layer film pattern is partially removed by dry etching.
Claim 23
Dependent Claim
14 words
The method of claim 20, wherein said dry etching is reactive ion etching (RIE).
Claim 24
Dependent Claim
15 words
The method of claim 12, wherein said thin film pattern is removed by chemical etching.
Claim 25
Dependent Claim
39 words
The method of forming a pattern of a two-layer metal film in accordance with claim 22, wherein the etchant for said chemical etching exerts no influence on said first metal film pattern and the remainder of said resist film.
Claim 26
Dependent Claim
18 words
The method of claim 12, wherein said second metal film is prepared from a metal of low resistance.
Claim 27
Dependent Claim
14 words
The method of claim 24, wherein said metal of low resistance is gold (Au).
Claim 28
Dependent Claim
16 words
The method of claim 25, wherein said second metal film is formed by an evaporation method.
Claim 29
Dependent Claim
38 words
The method of claim 12, wherein said step of forming said second metal film and said step of removing said resist film with said second metal film formed on said resist film are based on a lift-off method.
Claim 30
Independent Claim
202 words
A method of forming a pattern of a two-layer metal film, said method comprising preparing a semiconductor substrate having a major surface; forming a first metal film on said major surface of said semiconductor substrate; forming a thin insulation film on said first metal film, said thin insulation film defining a space at least equal in thickness to a second metal film to be formed thereafter; patterning said first metal film and said thin film to form a composite film pattern of a prescribed configuration consisting of a lower layer of a first metal film pattern formed by said first metal film and an upper layer of a thin film pattern formed by said thin insulation film; forming a resist film on said major surface of said semiconductor substrate including said composite film pattern; partially removing said resist film formed on said composite film pattern to expose the upper surface of said thin insulation film pattern; removing said thin film pattern; thereafter forming said second metal film on said first metal film pattern exposed by removal of said thin insulation film pattern and on said resist film; and removing said resist film with said second metal film formed on said resist film.
Claim 31
Independent Claim
202 words
A method of forming a pattern of a two-layer metal film, said method comprising preparing a semiconductor substrate having a major surface; forming a first metal film on said major surface of said semiconductor substrate; forming a thin insulation film on said first metal film, said thin insulation film defining a space at least equal in thickness to a second metal film to be formed thereafter; patterning said first metal film and said thin film to form a composite film pattern of a prescribed configuration consisting of a lower layer of a first metal film pattern formed by said first metal film and an upper layer of a thin film pattern formed by said thin insulation film; forming a resist film on said major surface of said semiconductor substrate including said composite film pattern; partially removing said resist film formed on said composite film pattern to expose the upper surface of said thin insulation film pattern; removing said thin film pattern; thereafter forming said second metal film on said first metal film pattern exposed by removal of said thin insulation film pattern and on said resist film; and removing said resist film with said second metal film formed on said resist film.
Claim 32
Dependent Claim
20 words
The method of claim 28, wherein said first metal film is prepared from a metal having a high melting point.
Claim 33
Dependent Claim
17 words
The method of claim 29, wherein said metal having a high melting point is tungsten silicide (WSi).
Claim 34
Independent Claim
13 words
The method of 30, wherein said first metal film is formed by sputtering.
Claim 35
Independent Claim
13 words
The method of 30, wherein said first metal film is formed by sputtering.
Claim 36
Dependent Claim
28 words
The method of forming a pattern of a two-layer metal film in accordance with claim 31, wherein said insulation film is prepared from silicon oxide (SiO 2 ).
Claim 37
Dependent Claim
16 words
The method of claim 32, wherein said thin film is formed by a plasma CVD method.
Claim 38
Dependent Claim
45 words
The method of claim 28, wherein the step of forming said two-layer film pattern comprises patterning said thin film to form a thin film pattern of a prescribed configuration; and removing said exposed first metal film by utilizing said thin film pattern as a mask.
Claim 39
Dependent Claim
15 words
The method of claim 34, wherein said first metal film is removed by dry etching.
Claim 40
Dependent Claim
14 words
The method of claim 35, wherein said dry etching is reactive ion etching (RIE).
Claim 41
Dependent Claim
16 words
The method of claim 28, wherein said resist film is prepared from a positive type resist.
Claim 42
Dependent Claim
21 words
The method of claim 37, wherein said resist film formed on said two-layer film pattern is partially removed by exposure technique.
Claim 43
Dependent Claim
27 words
The method of claim 38, wherein at least a part of said resist film positioned upward beyond the upper surface of said two-layer film pattern is exposed.
Claim 44
Dependent Claim
21 words
The method of claim 38, wherein said resist film formed on said two-layer film pattern is partially removed by dry etching.
Claim 45
Dependent Claim
14 words
The method of claim 40, wherein said dry etching is reactive ion etching (RIE).
Claim 46
Dependent Claim
15 words
The method of claim 38, wherein said thin film pattern is removed by chemical etching.
Claim 47
Dependent Claim
25 words
The method of claim 42, wherein the etchant for said chemical etching exerts no influence on said first metal film pattern and said resist film.
Claim 48
Dependent Claim
18 words
The method of claim 38, wherein said second metal film is prepared from a metal of low resistance.
Claim 49
Dependent Claim
14 words
The method of claim 44, wherein said metal of low resistance is gold (Au).
Claim 50
Dependent Claim
16 words
The method of claim 45, wherein said second metal film is formed by an evaporation method.
Claim 51
Dependent Claim
37 words
The method of claim 28, wherein the step of forming said second metal film and the step of removing said resist film with second metal film formed on said resist film are based on a lift-off method.
Claim 52
Dependent Claim
48 words
The method of claim 28, wherein the step of forming said two-layer film pattern further comprises implanting impurity ions into said major surface of said semiconductor substrate by utilizing said two-layer film pattern as a mask; and heating to diffuse said implanted impurity ions and form impurity regions.
Claim 53
Dependent Claim
34 words
The method of claim 48, wherein said first metal film pattern, said second metal film formed on said first metal film pattern, and said impurity regions are adapted to form a field effect transistor.
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