US4820377A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for cleanup processing chamber and vacuum process module
Assignee: Texas Instruments Inc
•
Filing: 1987-07-16
•
Granted: 1989-04-11
•
Expires: 2007-07-16
Abstract
Abstract A process module having remote plasma and in situ plasma generators, and a radiant heater, which represent three separate energy sources. The three sources can be used singly or in any combination and can be separately controllable.
Inventors
- 👤 Cecil J. Davis
- 👤 Robert T. Matthews
- 👤 Rhett B. Jucha
- 👤 Lee M. Loewenstein
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 17:29
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/48; C23C16/481; C23C16/50; C23C16/517; C23C16/54; Y; Y10; Y10S; Y10S438/00; Y10S438/905
Claims Analysis
Total Claims: 60
Claim 1
Independent Claim
49 words
A vacuum process module capable of receiving a workpiece comprising: (a) a process chamber; (b) a remote plasma generator remote from and in fluid communication with said process chamber; (c) an in situ plasma generator within said process chamber; and (d) a radiant heater coupled to said process chamber.
Claim 2
Dependent Claim
49 words
A vacuum process module capable of receiving a workpiece comprising: (a) a process chamber; (b) a remote plasma generator remote from and in fluid communication with said process chamber; (c) an in situ plasma generator within said process chamber; and (d) a radiant heater coupled to said process chamber.
Claim 3
Dependent Claim
19 words
The module as set forth in claim 1 wherein the workpiece has its face to be process facing downward.
Claim 4
Dependent Claim
25 words
The module as set forth in claim 1 wherein said remote generator, said in situ generator, and said heater are separately controlled to operate singly.
Claim 5
Dependent Claim
30 words
The module as set forth in claim 1 wherein said remote generator, said in situ generator, and said heater are separately controlled to operate with each other in any combination.
Claim 6
Dependent Claim
19 words
The module as set forth in claim 1 wherein said radiant heater is located above said workpiece during processing.
Claim 7
Dependent Claim
32 words
The module as set forth in claim 1 wherein said in situ plasma generates a plasma below said workpiece and said in situ plasma generator has electrodes above and below said workpiece.
Claim 8
Dependent Claim
25 words
The module as set forth in claim 1 wherein the plasma from said remote plasma generator is introduce to the surface from below said workpiece.
Claim 9
Dependent Claim
14 words
The module as set forth in claim 1 wherein the workpiece is a wafer.
Claim 10
Dependent Claim
35 words
A vacuum process module capable of receiving a workpiece comprising: (a) a plasma generator generating at least free radicals remote and in fluid communication with the workpiece; and (b) a heater coupled to said workpiece.
Claim 11
Dependent Claim
35 words
A vacuum process module capable of receiving a workpiece comprising: (a) a plasma generator generating at least free radicals remote and in fluid communication with the workpiece; and (b) a heater coupled to said workpiece.
Claim 12
Dependent Claim
19 words
The module as set forth in claim 9 wherein the workpiece has its face to be processed facing downward.
Claim 13
Dependent Claim
21 words
The module as set forth in claim 9 wherein said remote generator and said heater are separately controlled to operate singly.
Claim 14
Dependent Claim
23 words
The module as set forth in claim 9 wherein said remote generator and said heater are separately controlled to operate in any combination.
Claim 15
Dependent Claim
18 words
The module as set forth in claim 9 wherein said heater is located above said workpiece during processing.
Claim 16
Dependent Claim
25 words
The module as set forth in claim 9 wherein the plasma from said remote plasma generator is introduce to the surface from below said workpiece.
Claim 17
Dependent Claim
14 words
The module as set forth in claim 9 wherein the workpiece is a wafer.
Claim 18
Dependent Claim
27 words
A vacuum process module capable of receiving a workpiece comprising: (a) an in-situ plasma generator coupled to said workpiece; and (b) a heater coupled to said workpiece.
Claim 19
Dependent Claim
27 words
A vacuum process module capable of receiving a workpiece comprising: (a) an in-situ plasma generator coupled to said workpiece; and (b) a heater coupled to said workpiece.
Claim 20
Dependent Claim
18 words
The module as set forth in claim 16 wherein workpiece has its face to be processed facing downward.
Claim 21
Dependent Claim
21 words
The module as set forth in claim 16 wherein said in-situ generator and said heater are separately controlled to operate singly.
Claim 22
Dependent Claim
23 words
The module as set forth in claim 16 wherein said in-situ generator and said heater are separately controlled to operate in any combination.
Claim 23
Dependent Claim
18 words
The module as set forth in claim 16 wherein said heater is located above said workpiece during processing.
Claim 24
Dependent Claim
14 words
The module as set forth in claim 16 wherein the workpiece is a wafer.
Claim 25
Dependent Claim
31 words
The module as set forth in claim 16 wherein said in situ plasma is generated below said workpiece and said in situ plasma generator has electrodes above and below said workpiece.
Claim 26
Dependent Claim
39 words
A vacuum process module capable of receiving a workpiece comprising: (a) a plasma generator for generating free radicals remote from and in fluid communication with said workpiece; and (b) at least a first energy source coupled to said workpiece.
Claim 27
Dependent Claim
39 words
A vacuum process module capable of receiving a workpiece comprising: (a) a plasma generator for generating free radicals remote from and in fluid communication with said workpiece; and (b) at least a first energy source coupled to said workpiece.
Claim 28
Dependent Claim
19 words
The module as set forth in claim 23 wherein said first energy source is an in situ plasma generator.
Claim 29
Dependent Claim
16 words
The module as set forth in claim 23 wherein said first energy source is a heater.
Claim 30
Dependent Claim
19 words
The module as set forth in claim 23 wherein said first energy source is a source of ultraviolet light.
Claim 31
Dependent Claim
18 words
The module as set forth in claim 23 wherein workpiece has its face to be processed facing downward.
Claim 32
Dependent Claim
23 words
The module as set forth in clalm 23 wherein said plasma generator and said first energy source are separately controlled to operate singly.
Claim 33
Dependent Claim
23 words
The module as set forth in clalm 23 wherein said plasma generator and said first energy source are separately controlled to operate singly.
Claim 34
Dependent Claim
25 words
The module as set forth in claim 23 wherein said plasma generator and said first energy source are separately controlled to operate in any combination.
Claim 35
Dependent Claim
18 words
The module as set forth in claim 25 wherein said heater is located above said workpiece during processing.
Claim 36
Dependent Claim
14 words
The module as set forth in claim 23 wherein the workpiece is a wafer.
Claim 37
Dependent Claim
31 words
The module as set forth in claim 24 wherein said in situ plasma is generated below said workpiece and said in situ plasma generator has electrodes above and below said workpiece.
Claim 38
Dependent Claim
35 words
A vacuum process module comprising: (a) a process chamber; (b) a plasma generator remote from and in fluid communication with said process chamber; and (c) at least a first energy source within said process chamber.
Claim 39
Dependent Claim
35 words
A vacuum process module comprising: (a) a process chamber; (b) a plasma generator remote from and in fluid communication with said process chamber; and (c) at least a first energy source within said process chamber.
Claim 40
Dependent Claim
19 words
The module as set forth in claim 33 wherein said first energy source is an in situ plasma generator.
Claim 41
Dependent Claim
16 words
The module as set forth in claim 33 wherein said first energy source is a heater.
Claim 42
Dependent Claim
19 words
The module as set forth in claim 33 wherein said first energy source is a source of ultraviolet light.
Claim 43
Dependent Claim
23 words
The module as set forth in claim 33 wherein said plasma generator and said first energy source are separately controlled to operate singly.
Claim 44
Dependent Claim
25 words
The module as set forth in claim 33 wherein said plasma generator and said first energy source are separately controlled to operate in any combination.
Claim 45
Dependent Claim
39 words
A vacuum process module capable of receiving a workpiece comprising: (a) a remote plasma generator in fluid communication with said workpiece; (b) an in situ plasma generator coupled to said workpiece; and (c) a heater coupled to said workpiece.
Claim 46
Dependent Claim
39 words
A vacuum process module capable of receiving a workpiece comprising: (a) a remote plasma generator in fluid communication with said workpiece; (b) an in situ plasma generator coupled to said workpiece; and (c) a heater coupled to said workpiece.
Claim 47
Dependent Claim
18 words
The module as set forth in claim 39 wherein workpiece as its face to be process facing downward.
Claim 48
Dependent Claim
25 words
The module as set forth in claim 39 wherein said remote generator, said in situ generator, and said heater are separately controlled to operate singly.
Claim 49
Dependent Claim
27 words
The module as set forth in claim 39 wherein said remote generator, said in situ generator, and said heater are separately controlled to operate in any combination.
Claim 50
Dependent Claim
15 words
The module as set forth in claim 39 wherein said heater is a radiant heater.
Claim 51
Dependent Claim
18 words
The module as set forth in claim 43 wherein said heater is located above said workpiece during processing.
Claim 52
Dependent Claim
31 words
The module as set forth in claim 39 wherein said in situ plasma is generated below said workpiece and said in situ plasma generator has electrodes above and below said workpiece.
Claim 53
Dependent Claim
25 words
The module as set forth in claim 39 wherein the plasma from said remote plasma generator is introduce to the surface from below said workpiece.
Claim 54
Dependent Claim
14 words
The module as set forth in claim 39 wherein the workpiece is a wafer.
Claim 55
Independent Claim
29 words
A method for cleanup of a processing chamber comprising the steps of: (a) introducing free radicals to the process chamber; and (b) removing undesired deposits from the processing chamber.
Claim 56
Independent Claim
29 words
A method for cleanup of a processing chamber comprising the steps of: (a) introducing free radicals to the process chamber; and (b) removing undesired deposits from the processing chamber.
Claim 57
Dependent Claim
15 words
The method of claim 48 further including coupling a second energy source to said chamber.
Claim 58
Dependent Claim
13 words
The method of claim 49 wherein said second energy source is radiant energy.
Claim 59
Dependent Claim
14 words
The method of claim 49 wherein said second energy source is radio frequency energy.
Claim 60
Dependent Claim
21 words
The process as set forth in claim 49 wherein said introducing free radicals and said coupling an energy source occur simultaneously.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-04-10 | 1992-10-10 | 1993-04-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-04-10 | 1996-10-10 | 1997-04-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-04-10 | 2000-10-10 | 2001-04-11 | $7700.00 | Window Closed / Lapsed |