US4615756A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Dry etching apparatus
Assignee: Hitachi Ltd
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Filing: 1985-07-11
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Granted: 1986-10-07
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Expires: 2005-07-11
Abstract
Abstract An etching apparatus according to the present invention comprises means to generate metastable excited species such as of nitrogen or rare gas molecules, means to transfer the metastable excited species into a reaction chamber in which a substrate to-be-etched is set, and means to introduce a reactive gas for etching into the reaction chamber in which the substrate to-be-etched is set; the reactive gas being activated by collision between the metastable excited species and the reactive gas so as to etch the substrate to-be-etched owing to a reaction between the activated reactive gas and the substrate to-be-etched. Further, a light source for photo-exciting the substrate to-be-etched may well be added.
Inventors
- 👤 Kanji Tsujii
- 👤 Yusuke Yajima
- 👤 Seiichi Murayama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 00:11
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0418; H10P72/0421; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H10P50/00; H10P50/20; H10P50/24; H10P50/242
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
85 words
A dry etching apparatus comprising means to generate metastable excited species, means to transfer the metastable excited species into a reaction chamber in which a substrate to-be-etched is set, and means to introduce a reactive gas for etching into said reaction chamber in which the substrate to-be-etched is set; the reactive gas being activated by collision between the metastable excited species and the reactive gas so as to etch the substrate to-be-etched owing to a reaction between the activated reactive gas and the substrate to-be-etched.
Claim 2
Dependent Claim
85 words
A dry etching apparatus comprising means to generate metastable excited species, means to transfer the metastable excited species into a reaction chamber in which a substrate to-be-etched is set, and means to introduce a reactive gas for etching into said reaction chamber in which the substrate to-be-etched is set; the reactive gas being activated by collision between the metastable excited species and the reactive gas so as to etch the substrate to-be-etched owing to a reaction between the activated reactive gas and the substrate to-be-etched.
Claim 3
Dependent Claim
31 words
A dry etching apparatus according to claim 1, wherein the metastable excited species are metastable excited species of one member selected from the group consisting of nitrogen and a rare gas.
Claim 4
Dependent Claim
99 words
A dry etching apparatus comprising a light source which irradiates a substrate to-be-etched, set in a reaction chamber, with light, means to introduce a reactive gas into said reaction chamber, means to generate metastable excited molecules, and means to introduce the metastable excited molecules into said reaction chamber; the reactive gas being activated by a reaction between the metastable excited molecules and the reactive gas introduced into said reaction chamber so as to etch a light-irradiated part of a surface of the substrate owing to a reaction between the activated reactive gas and the surface of the substrate to-be-etched.
Claim 5
Dependent Claim
99 words
A dry etching apparatus comprising a light source which irradiates a substrate to-be-etched, set in a reaction chamber, with light, means to introduce a reactive gas into said reaction chamber, means to generate metastable excited molecules, and means to introduce the metastable excited molecules into said reaction chamber; the reactive gas being activated by a reaction between the metastable excited molecules and the reactive gas introduced into said reaction chamber so as to etch a light-irradiated part of a surface of the substrate owing to a reaction between the activated reactive gas and the surface of the substrate to-be-etched.
Claim 6
Dependent Claim
26 words
A dry etching apparatus as defined in claim 3, wherein a mask bearing a desired pattern is set between the substrate to-be-etched and said light source.
Claim 7
Dependent Claim
19 words
A dry etching apparatus as defined in claim 3, wherein the reactive gas is a gas which contains chlorine.
Claim 8
Dependent Claim
26 words
A dry etching apparatus as defined in claim 3, wherein the substrate to-be-etched is one selected from the group consisting of P-type and undoped silicon substrates.
Claim 9
Dependent Claim
32 words
A dry etching apparatus as defined in claim 3, wherein a tube which connects said means to generate metastable excited molecules and said reaction chamber is provided with at least one turning.
Claim 10
Dependent Claim
46 words
A dry etching apparatus as defined in claim 3, wherein said means to generate metastable excited molecules and said reaction chamber are connected by a transparent tube, and a wall of said tube is provided with a coating which reduces a reflective efficiency for the light.
Claim 11
Dependent Claim
38 words
A dry etching apparatus as defined in claim 3, wherein a light screen which intercepts light appearing from said means to generate metastable excited molecules is disposed so as to surround the substrate to-be-etched in said reaction chamber.
Claim 12
Dependent Claim
25 words
A dry etching apparatus as defined in claim 3, wherein said light source radiates the light in a wavelength region which photo-dissociates the reactive gas.
Claim 13
Dependent Claim
30 words
A dry etching apparatus as defined in claim 3, wherein said light source radiates the light in a wavelength region which is not pertinent to photo-dissociation of the reactive gas.
Claim 14
Dependent Claim
16 words
A dry etching apparatus as defined in claim 3, wherein a reduction projection aligner is employed.
Claim 15
Dependent Claim
49 words
A dry etching apparatus as defined in claim 3, wherein in said reaction chamber, a plurality of inlet ports for either of the reactive gas and the metastable excited molecules are circularly provided in a substantially identical plane, and the substrate to-be-etched is set inside the circular inlet ports.
Claim 16
Dependent Claim
58 words
A dry etching apparatus as defined in claim 13, wherein the circularly arranged inlet ports for at least either of the reactive gas and the metastable excited molecules are constructed of one member selected from the group consisting of open ends of a circular tube projecting inwards and a plurality of openings directly provided in said circular tube.
Claim 17
Dependent Claim
24 words
A dry etching apparatus as defined in claim 13, wherein the substrate to-be-etched can be moved in a direction perpendicular to the aforementioned plane.
Claim 18
Dependent Claim
92 words
A dry etching apparatus as defined in claim 13, wherein a plurality of devices are comprised in each of which inlet ports for the reactive gas and the metastable excited molecules are circularly provided in a substantially identical plane, and the substrate to-be-etched is set inside the circular inlet ports so as to etch this substrate to-be-etched, and wherein the reactive gas and the metastable excited molecules are respectively introduced into said reactive chamber through the corresponding inlet ports via independent and branched tubes, to simultaneously etch the plurality of substrates to-be-etched.
Claim 19
Dependent Claim
17 words
A dry etching apparatus as defined in claim 3, wherein said light source is a laser source.
Claim 20
Dependent Claim
44 words
A dry etching apparatus as defined in claim 17, wherein a radiant space of a laser beam which is projected from said laser source is fixed, and a substrate stage which carries the substrate to-be-etched is moved, thereby to depict a desired etching pattern.
Claim 21
Dependent Claim
55 words
A dry etching apparatus as defined in claim 17, wherein a laser beam which is projected from said laser source is transmitted to a photocoupler through an optical fiber, the substrate to-be-etched is irradiated with the laser beam which emerges from said photocoupler, and said photocoupler is moved, thereby to depict a desired etching pattern.
Claim 22
Dependent Claim
53 words
A dry etching apparatus as defined in claim 17, wherein a laser beam which is projected from said laser source is divided in two, and an interference fringe is formed on the surface of the substrate to-be-etched by an interference effect of the divided laser beams, thereby to form a microscopic etching pattern.
Claim 23
Dependent Claim
33 words
A dry etching apparatus as defined in claim 17, wherein said laser source radiates the light in a wavelength region which pertains to either of photo-dissociation or thermal dissociation of the reactive gas.
Claim 24
Dependent Claim
33 words
A dry etching apparatus as defined in claim 17, wherein said laser source radiates the light in a wavelength region which pertains to neither of photo-dissociation nor thermal dissociation of the reactive gas.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-10-06 | 1990-04-07 | 1990-10-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-10-06 | 1994-04-07 | 1994-10-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-10-06 | 1998-04-07 | 1998-10-07 | $7700.00 | Window Closed / Lapsed |