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US4609936A Expired / Lapsed US ⏱️ 0.0 years remaining

Semiconductor chip with direct-bonded external leadframe

Assignee: Motorola Solutions Inc
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Filing: 1979-09-19
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Granted: 1986-09-02
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Expires: 1999-09-19
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Abstract

Abstract Structure and process for providing a hard metallic leadframe directly bonded to a semiconductor chip without the necessity for solder or soft intermediate leadframes. The structure provides a strong bond at the semiconductor chip with the possibility for multiple simultaneous lead attachment of a leadframe having sufficient strength to serve as the external leads. The bonded structure may be conventionally encapsulated in a plastic or ceramic package, or may be glassed to provide a minimum volume hermetic chip.

Inventors

  • 👤 Thomas A. Scharr
  • 👤 II Vern H. Winchell

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-01 13:18
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/40; H10W70/421; H10W70/424; H10W72/00; H10W72/20; H10W72/251; H10W72/90; H10W72/921; H10W72/923; H10W72/951; H10W72/952

Claims Analysis

Total Claims: 18
Claim 1
Independent Claim 43 words
A leaded semiconductor chip assembly comprising: a semiconductor substrate including metallic lead attach pedestals comprising substantially aluminum bonding areas supported by metallic means having a hardness greater than aluminum, and a multiplicity of hard flat leads with direct bonds to said bonding areas.
Claim 2
Dependent Claim 43 words
A leaded semiconductor chip assembly comprising: a semiconductor substrate including metallic lead attach pedestals comprising substantially aluminum bonding areas supported by metallic means having a hardness greater than aluminum, and a multiplicity of hard flat leads with direct bonds to said bonding areas.
Claim 3
Dependent Claim 14 words
The assembly of claim 1 including where said direct bonds are simultaneously-formed ultrasonic bonds.
Claim 4
Dependent Claim 17 words
The assembly of claim 1 where said leads are thinner at their extremities at said bonding areas.
Claim 5
Dependent Claim 33 words
The assembly of claim 1 further including an insulating passivating layer over a periphery of said metallic lead attach pedestal, said layer lying below the level of said bonding areas at said periphery.
Claim 6
Dependent Claim 22 words
The assembly of claim 1, further including glass means over said substrate and said direct bonds for supporting and sealing said assembly.
Claim 7
Dependent Claim 85 words
An electrical device comprising: a substrate including a semiconductor; at least one bonding pedestal, of predetermined height on said substrate and coupled to said semiconductor, and wherein said bonding pedestal has a substantially aluminum outer bonding layer forming a bonding surface; a metallic means harder than aluminum, underlying and supporting said bonding layer; and externally connectable metallic lead means, attached without use of a soft internal lead frame to said at least one bonding pedestal and having a coefficient of expansion similar to said substrate.
Claim 8
Dependent Claim 85 words
An electrical device comprising: a substrate including a semiconductor; at least one bonding pedestal, of predetermined height on said substrate and coupled to said semiconductor, and wherein said bonding pedestal has a substantially aluminum outer bonding layer forming a bonding surface; a metallic means harder than aluminum, underlying and supporting said bonding layer; and externally connectable metallic lead means, attached without use of a soft internal lead frame to said at least one bonding pedestal and having a coefficient of expansion similar to said substrate.
Claim 9
Dependent Claim 15 words
The device of claim 6 wherein said substrate is formed from a silicon single crystal.
Claim 10
Dependent Claim 25 words
The device of claim 7 wherein said metallic lead means is annealed by heating prior to being attached to said at least one bonding pedestal.
Claim 11
Dependent Claim 38 words
The device of claim 8 wherein said metallic lead means is attached to said at least one bonding pedestal ultrasonic bonding means to form a bonded region therebetween, and wherein said bonded region is subsequently annealed by heating.
Claim 12
Dependent Claim 30 words
The device of claim 9 wherein said outer bonding layer substantially conformally coats said underlying metallic means and which has a perimeter extending onto said substrate around said bonding pedestal.
Claim 13
Dependent Claim 18 words
The device of claim 10 wherein a protective encapsulant layer coats said perimeter of said outer bonding layer.
Claim 14
Dependent Claim 34 words
The device of claim 11 wherein said metallic lead means is deformed during bonding so as to avoid contact between said metallic lead means and said substrate beyond the region of said bonding pedestal.
Claim 15
Dependent Claim 14 words
The device of claim 12 wherein said metallic lead means includes nickel and iron.
Claim 16
Dependent Claim 14 words
The device of claim 13 wherein said underlying metallic means comprises titanium and tungsten.
Claim 17
Dependent Claim 36 words
The device of claim 6, 7, 8, 9, 10, 11, 12, or 13 further comprising an outer encapsulant means enclosing said bonded region, a portion of said substrate, and a portion of said metallic lead means.
Claim 18
Dependent Claim 13 words
The device of claim 15 wherein said outer encapsulant means comprises a glass.

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1989-09-01 1990-03-03 1990-09-02 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1993-09-01 1994-03-03 1994-09-02 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 1997-09-01 1998-03-03 1998-09-02 $7700.00 Window Closed / Lapsed

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