US4606781A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for resistor trimming by metal migration
Assignee: Semiconductor Components Industries LLC
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Filing: 1984-10-18
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Granted: 1986-08-19
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Expires: 2004-10-18
Abstract
Abstract A method for trimming a diffused or implanted resistor located within an integrated circuit is disclosed. This technique for trimming a resistor requires the use of high current pulses and geometric shaped metal contacts. The current pulses react with the electropositive metal atoms in the thin film conductor and cause the metal atoms to migrate to another location, thus altering the value of the resistor by progressively decreasing the conductivity of the resistor.
Inventors
- 👤 Robert L. Vyne
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 04:12
CPC Classifications
H; H01; H01C; H01C17/00; H01C17/22; H01C17/26; H01C17/265; H01C17/267; H10; H10D; H10D1/00; H10D1/40; H10D1/43; H10P; H10P95/00; H10P95/80
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
78 words
A method for trimming the values of a passive device formed at the surface of a semiconductor substrate, comprising the steps of: forming metal contact regions at least at each end of said device; causing an electrical current to flow through said device in a single direction only, said current being sufficient to cause metal to migrate from at least one contact region toward another contact region; and terminating said electrical current after a predetermined length of time.
Claim 2
Independent Claim
78 words
A method for trimming the values of a passive device formed at the surface of a semiconductor substrate, comprising the steps of: forming metal contact regions at least at each end of said device; causing an electrical current to flow through said device in a single direction only, said current being sufficient to cause metal to migrate from at least one contact region toward another contact region; and terminating said electrical current after a predetermined length of time.
Claim 3
Dependent Claim
15 words
The method as defined in claim 1, in which said passive device comprises a resistor.
Claim 4
Dependent Claim
16 words
The method as defined in claim 2, in which said passive device comprises a diffused resistor.
Claim 5
Dependent Claim
17 words
The method as defined in claim 2, in which said passive device comprises an ion implanted resistor.
Claim 6
Dependent Claim
19 words
The method as defined in claim 1, in which a plurality of contacts are formed between said contact regions.
Claim 7
Dependent Claim
34 words
The method as defined in claim 1 in which said contact regions each comprise an apex further comprising the steps of forming first and second contact regions with said apexes pointing at each other.
Claim 8
Independent Claim
73 words
A method of trimming a resistor found in a semiconductor substrate as part of an integrated circuit, comprising: forming at least first and second contacts for making contact to the resistor; and applying a pulsating current between the first and second contacts, and causing metal migration to occur from the first contact to the second contact due to the pulsating current thereby changing the ohmic value of the resistor to a determined value.
Claim 9
Independent Claim
73 words
A method of trimming a resistor found in a semiconductor substrate as part of an integrated circuit, comprising: forming at least first and second contacts for making contact to the resistor; and applying a pulsating current between the first and second contacts, and causing metal migration to occur from the first contact to the second contact due to the pulsating current thereby changing the ohmic value of the resistor to a determined value.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-08-18 | 1990-02-17 | 1990-08-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-08-18 | 1994-02-17 | 1994-08-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-08-18 | 1998-02-17 | 1998-08-19 | $7700.00 | Window Closed / Lapsed |