Method for etch thinning silicon devices

Claim 1

The method of etch-thinning silicon devices in three sequential etches such that a uniform approximately 10 micron thick membrane is formed over the pixels of the device comprising the steps in combination: (a) providing a multi-layer wafer, said wafer having a first layer transparent to light and impervious to etching fluids, an epitaxial second layer having one surface adhesively bonded to one side of said first layer, and a p + third layer formed on the opposite surface of said epitaxial layer, said third layer having a higher boron doping level than said second layer such that there exists a transition region between said third layer and said second layer having a predetermined doping gradient; (b) forming an etch mask on the opposite surface of said third layer; (c) applying a first fluid etchant in concert with ultrasonic agitation to regions of said third layer where exposed by said etch mask said first fluid etchant consisting of, by weight, 2 parts KOH to 3 parts H 2 O at 60° C. and acting to pre-thin said third layer; (d) shining a light through said first layer and into said wafer while said first fluid etchant is applied until said exposed regions become translucent; (e) subdividing said wafer into smaller components; (f) applying a second fluid etchant in an agitation washtub to said components having exposed regions etched by said first fluid etchant, said second fluid etchant consisting of 1 part HF to 3 parts HNO 3 to 10 parts acetic acid in concert with a critical volumetric amount of H 2 O 2 such that said exposed region of said third layer and a portion of said transition region lying thereunder is etched away, said critical amount of H 2 O 2 having a critical ratio to said second fluid etchant dependent on the area exposed to said second fluid etchant, said proportion being 2:350 for a 1/8 square inch area and 5:350 for areas up to 3 square inches; (g) removing said components when said exposed areas appear flat and reflecting; and (h) applying a third fluid etchant to said exposed areas of said components to clean them, said third fluid etchant consisting of, by proportion, 1.0 gram potassium permanganate to 150 ml HF to 150 ml acetic acid.

Claim 2

The method of etch-thinning silicon devices in three sequential etches such that a uniform approximately 10 micron thick membrane is formed over the pixels of the device comprising the steps in combination: (a) providing a multi-layer wafer, said wafer having a first layer transparent to light and impervious to etching fluids, an epitaxial second layer having one surface adhesively bonded to one side of said first layer, and a p + third layer formed on the opposite surface of said epitaxial layer, said third layer having a higher boron doping level than said second layer such that there exists a transition region between said third layer and said second layer having a predetermined doping gradient; (b) forming an etch mask on the opposite surface of said third layer; (c) applying a first fluid etchant in concert with ultrasonic agitation to regions of said third layer where exposed by said etch mask said first fluid etchant consisting of, by weight, 2 parts KOH to 3 parts H 2 O at 60° C. and acting to pre-thin said third layer; (d) shining a light through said first layer and into said wafer while said first fluid etchant is applied until said exposed regions become translucent; (e) subdividing said wafer into smaller components; (f) applying a second fluid etchant in an agitation washtub to said components having exposed regions etched by said first fluid etchant, said second fluid etchant consisting of 1 part HF to 3 parts HNO 3 to 10 parts acetic acid in concert with a critical volumetric amount of H 2 O 2 such that said exposed region of said third layer and a portion of said transition region lying thereunder is etched away, said critical amount of H 2 O 2 having a critical ratio to said second fluid etchant dependent on the area exposed to said second fluid etchant, said proportion being 2:350 for a 1/8 square inch area and 5:350 for areas up to 3 square inches; (g) removing said components when said exposed areas appear flat and reflecting; and (h) applying a third fluid etchant to said exposed areas of said components to clean them, said third fluid etchant consisting of, by proportion, 1.0 gram potassium permanganate to 150 ml HF to 150 ml acetic acid.