Patent US3226481A successfully refreshed from Google Patents.
Patent US3768336A successfully refreshed from Google Patents.
US8300207B2
Active / In Force
US
⏱️ 1.5 years remaining
Exposure apparatus, immersion system, exposing method, and device fabricating method
Assignee: Nikon Corp
•
Filing: 2008-05-09
•
Granted: 2012-10-30
•
Expires: 2028-05-09
Abstract
Abstract An exposure apparatus exposes a substrate with exposure light through a liquid. The exposure apparatus comprises: a liquid immersion member, which has a liquid contact surface that includes a liquid recovery area; and a porous member, which are disposed at a first side of the liquid contact surface; wherein, the liquid on an object, which is disposed at the first side of the liquid contact surface, is recovered from the liquid recovery area.
Inventors
- 👤 Yasufumi Nishii
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 06:30
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70216; G03F7/70341
Claims Analysis
Total Claims: 49
Claim 1
Independent Claim
178 words
A liquid immersion exposure apparatus comprising: a projection system having an optical element, a substrate positioned below the projection system being exposed with exposure light; a liquid immersion member which has a liquid contact surface that opposes a front surface of an object and that includes a liquid recovery area, a liquid in a gap between the liquid contact surface of the liquid immersion member and the front surface of the object being recovered through the liquid recovery area; and a porous member, which is disposed below the liquid contact surface, the object being moved below the projection system, the liquid immersion member, and the porous member; wherein the porous member and the liquid contact surface are configured to provide a space between the porous member and the liquid contact surface of the liquid immersion member, and the porous member and the liquid contact surface are configured to provide an opening located below the liquid contact surface of the liquid immersion member and above the porous member, through which the liquid is allowed to flow into the space.
Claim 2
Dependent Claim
178 words
A liquid immersion exposure apparatus comprising: a projection system having an optical element, a substrate positioned below the projection system being exposed with exposure light; a liquid immersion member which has a liquid contact surface that opposes a front surface of an object and that includes a liquid recovery area, a liquid in a gap between the liquid contact surface of the liquid immersion member and the front surface of the object being recovered through the liquid recovery area; and a porous member, which is disposed below the liquid contact surface, the object being moved below the projection system, the liquid immersion member, and the porous member; wherein the porous member and the liquid contact surface are configured to provide a space between the porous member and the liquid contact surface of the liquid immersion member, and the porous member and the liquid contact surface are configured to provide an opening located below the liquid contact surface of the liquid immersion member and above the porous member, through which the liquid is allowed to flow into the space.
Claim 3
Dependent Claim
53 words
An exposure apparatus according to claim 1 , wherein the liquid contact surface has: a first surface, which is disposed around an optical path of the exposure light; and a second surface, which is disposed at an outer side of the first surface with respect to the optical path of the exposure light.
Claim 4
Dependent Claim
18 words
An exposure apparatus according to claim 2 , wherein the second surface is disposed around the first surface.
Claim 5
Dependent Claim
33 words
An exposure apparatus according to claim 2 , wherein the liquid contact surface includes a liquid non-recovery area; and the porous member is disposed at the first side of the liquid non-recovery area.
Claim 6
Dependent Claim
46 words
An exposure apparatus according to claim 4 , wherein the substrate is exposed while moving with respect to the optical path in a direction that intersects the optical path; and the liquid non-recovery area is disposed at opposite sides of the optical path in the direction.
Claim 7
Dependent Claim
38 words
An exposure apparatus according to claim 4 , wherein the liquid non-recovery area is disposed at a position at which the liquid non-recovery area is further from the front surface of the object than the first surface is.
Claim 8
Dependent Claim
42 words
An exposure apparatus according to claim 6 , wherein the liquid non-recovery area is inclined so that the liquid non-recovery area becomes gradually spaced apart from the front surface of the object along a direction that leads away from the optical path.
Claim 9
Dependent Claim
36 words
An exposure apparatus according to claim 2 , wherein the second surface is disposed at a position at which the second surface is further from the front surface of the object than the first surface is.
Claim 10
Dependent Claim
22 words
An exposure apparatus according to claim 2 , wherein the first surface is substantially parallel to the front surface of the object.
Claim 11
Dependent Claim
40 words
An exposure apparatus according to claim 2 , wherein at least part of the porous member is disposed at a position at which the porous member is closer to the front surface of the object than the first surface is.
Claim 12
Dependent Claim
23 words
An exposure apparatus according to claim 1 , wherein the liquid immersion member further comprises a liquid supply port for supplying the liquid.
Claim 13
Dependent Claim
22 words
An exposure apparatus according to claim 1 , wherein the liquid can flow into the space without going through the porous member.
Claim 14
Dependent Claim
21 words
An exposure apparatus according to claim 1 , wherein the porous member opposes at least part of the liquid contact surface.
Claim 15
Dependent Claim
17 words
An exposure apparatus according to claim 1 , wherein the porous member comprises a fin shaped member.
Claim 16
Dependent Claim
47 words
An exposure apparatus according to claim 1 , wherein the substrate is exposed while moving with respect to an optical path in a direction that intersects the optical path; and the porous member is disposed at opposite sides of at least the optical path in the direction.
Claim 17
Dependent Claim
17 words
An exposure apparatus according to claim 1 , wherein the porous member comprises a plate shaped member.
Claim 18
Dependent Claim
16 words
An exposure apparatus according to claim 16 , wherein the plate shaped member is elastically deformable.
Claim 19
Dependent Claim
24 words
An exposure apparatus according to claim 1 , further comprising: a cushioning mechanism that absorbs a force that is applied to the porous member.
Claim 20
Dependent Claim
22 words
An exposure apparatus according to claim 1 , further comprising: a gas supply port that supplies a gas to the porous member.
Claim 21
Dependent Claim
15 words
An exposure apparatus according to claim 1 , wherein the porous member comprises a mesh.
Claim 22
Dependent Claim
24 words
An exposure apparatus according to claim 1 , wherein at least a part of the porous member is lyophilic with respect to the liquid.
Claim 23
Dependent Claim
14 words
An exposure apparatus according to claim 1 , wherein the object comprises the substrate.
Claim 24
Dependent Claim
22 words
A device fabricating method, comprising: exposing a substrate using an exposure apparatus according to claim 1 ; and developing the exposed substrate.
Claim 25
Dependent Claim
119 words
An exposure apparatus that exposes a substrate with exposure light through a liquid, comprising: a liquid supply port that supplies the liquid; a liquid immersion member which has a liquid contact surface; and a porous member, which opposes the liquid contact surface of the liquid immersion member and which is disposed between the liquid contact surface and an object being moved below the liquid immersion member; wherein the porous member and the liquid contact surface are configured to provide a space between the liquid contact surface of the liquid immersion member and the porous member, into which at least part of the liquid that is supplied from the liquid supply port can flow without going through the porous member.
Claim 26
Dependent Claim
119 words
An exposure apparatus that exposes a substrate with exposure light through a liquid, comprising: a liquid supply port that supplies the liquid; a liquid immersion member which has a liquid contact surface; and a porous member, which opposes the liquid contact surface of the liquid immersion member and which is disposed between the liquid contact surface and an object being moved below the liquid immersion member; wherein the porous member and the liquid contact surface are configured to provide a space between the liquid contact surface of the liquid immersion member and the porous member, into which at least part of the liquid that is supplied from the liquid supply port can flow without going through the porous member.
Claim 27
Dependent Claim
20 words
An exposure apparatus according to claim 24 , wherein the liquid supply port is provided to the liquid immersion member.
Claim 28
Dependent Claim
49 words
An exposure apparatus according to claim 24 , wherein the substrate is exposed while moving with respect to an optical path in a prescribed direction that intersects the optical path; and the porous member is disposed at opposite sides of at least the optical path in the prescribed direction.
Claim 29
Dependent Claim
17 words
An exposure apparatus according to claim 24 , wherein the porous member comprises a plate shaped member.
Claim 30
Dependent Claim
16 words
An exposure apparatus according to claim 27 , wherein the plate shaped member is elastically deformable.
Claim 31
Dependent Claim
24 words
An exposure apparatus according to claim 24 , further comprising: a cushioning mechanism that absorbs a force that is applied to the porous member.
Claim 32
Dependent Claim
22 words
An exposure apparatus according to claim 24 , further comprising: a gas supply port that supplies a gas to the porous member.
Claim 33
Dependent Claim
15 words
An exposure apparatus according to claim 24 , wherein the porous member comprises a mesh.
Claim 34
Dependent Claim
24 words
An exposure apparatus according to claim 24 , wherein at least a part of the porous member is lyophilic with respect to the liquid.
Claim 35
Dependent Claim
22 words
A device fabricating method, comprising: exposing a substrate using an exposure apparatus according to claim 24 ; and developing the exposed substrate.
Claim 36
Dependent Claim
192 words
An immersion system that is used by an immersion exposure apparatus, which exposes a substrate with exposure light from an optical member, to fill an optical path of the exposure light between the optical member and the substrate with a liquid, comprising: a liquid immersion member which has a liquid contact surface that opposes a front surface of an object and that includes a liquid recovery area, a liquid in a gap between the liquid contact surface of the liquid immersion member and the front surface of the object being recovered through the liquid recovery area; and a porous member, which is disposed below the liquid contact surface, the object being moved below the liquid immersion member and the porous member; wherein the porous member and the liquid contact surface are configured to provide a space between the porous member and the liquid contact surface of the liquid immersion member, and the porous member and the liquid contact surface are configured to provide an opening located below the liquid contact surface of the liquid immersion member and above the porous member, through which the liquid is allowed to flow into the space.
Claim 37
Dependent Claim
192 words
An immersion system that is used by an immersion exposure apparatus, which exposes a substrate with exposure light from an optical member, to fill an optical path of the exposure light between the optical member and the substrate with a liquid, comprising: a liquid immersion member which has a liquid contact surface that opposes a front surface of an object and that includes a liquid recovery area, a liquid in a gap between the liquid contact surface of the liquid immersion member and the front surface of the object being recovered through the liquid recovery area; and a porous member, which is disposed below the liquid contact surface, the object being moved below the liquid immersion member and the porous member; wherein the porous member and the liquid contact surface are configured to provide a space between the porous member and the liquid contact surface of the liquid immersion member, and the porous member and the liquid contact surface are configured to provide an opening located below the liquid contact surface of the liquid immersion member and above the porous member, through which the liquid is allowed to flow into the space.
Claim 38
Dependent Claim
21 words
An immersion system according to claim 34 , wherein the porous member opposes at least part of the liquid contact surface.
Claim 39
Dependent Claim
147 words
An immersion system that is used by an immersion exposure apparatus, which exposes a substrate with exposure light through an optical member, to fill an optical path of the exposure light between the optical member and the substrate with a liquid, comprising: a liquid supply port that supplies the liquid; a liquid immersion member which has a liquid contact surface; and a porous member, which opposes the liquid contact surface of the liquid immersion member and which is disposed between the liquid contact surface and an object being moved below the liquid immersion member; wherein the porous member and the liquid contact surface are configured to provide a space between the liquid contact surface of the liquid immersion member and the porous member, into which at least part of the liquid that is supplied from the liquid supply port can flow without going through the porous member.
Claim 40
Dependent Claim
147 words
An immersion system that is used by an immersion exposure apparatus, which exposes a substrate with exposure light through an optical member, to fill an optical path of the exposure light between the optical member and the substrate with a liquid, comprising: a liquid supply port that supplies the liquid; a liquid immersion member which has a liquid contact surface; and a porous member, which opposes the liquid contact surface of the liquid immersion member and which is disposed between the liquid contact surface and an object being moved below the liquid immersion member; wherein the porous member and the liquid contact surface are configured to provide a space between the liquid contact surface of the liquid immersion member and the porous member, into which at least part of the liquid that is supplied from the liquid supply port can flow without going through the porous member.
Claim 41
Dependent Claim
122 words
An immersion system that is used by an immersion exposure apparatus, which exposes a substrate with exposure light through an optical member, to fill an optical path of the exposure light between the optical member and the substrate with a liquid, comprising: a liquid immersion member which has a liquid contact surface that opposes a front surface of an object and that includes a liquid recovery area; and a film forming member, which is disposed between the liquid contact surface and the object, that forms a thin film of the liquid so that the film forming member opposes the object, wherein, the liquid on the object, which is disposed adjacent to the liquid contact surface, is recovered from the liquid recovery area.
Claim 42
Dependent Claim
122 words
An immersion system that is used by an immersion exposure apparatus, which exposes a substrate with exposure light through an optical member, to fill an optical path of the exposure light between the optical member and the substrate with a liquid, comprising: a liquid immersion member which has a liquid contact surface that opposes a front surface of an object and that includes a liquid recovery area; and a film forming member, which is disposed between the liquid contact surface and the object, that forms a thin film of the liquid so that the film forming member opposes the object, wherein, the liquid on the object, which is disposed adjacent to the liquid contact surface, is recovered from the liquid recovery area.
Claim 43
Dependent Claim
101 words
An exposing method that exposes a substrate with exposure light through a liquid, the method comprising: disposing the substrate adjacent to a liquid immersion member which has a liquid contact surface that opposes a top surface of the substrate, the liquid contact surface including a liquid recovery area and a liquid non-recovery area; holding part of the liquid that is supplied from a liquid supply port between the liquid contact surface and the substrate using a porous member, which is positioned between the liquid contact surface and the substrate; and recovering the liquid on the substrate from the liquid recovery area.
Claim 44
Dependent Claim
101 words
An exposing method that exposes a substrate with exposure light through a liquid, the method comprising: disposing the substrate adjacent to a liquid immersion member which has a liquid contact surface that opposes a top surface of the substrate, the liquid contact surface including a liquid recovery area and a liquid non-recovery area; holding part of the liquid that is supplied from a liquid supply port between the liquid contact surface and the substrate using a porous member, which is positioned between the liquid contact surface and the substrate; and recovering the liquid on the substrate from the liquid recovery area.
Claim 45
Dependent Claim
37 words
An exposing method according to claim 38 , wherein at least part of a space between the liquid contact surface and the porous member is filled with the liquid that is supplied via the liquid supply port.
Claim 46
Dependent Claim
29 words
An exposing method according to claim 38 , wherein the liquid from the liquid supply port is brought to the porous member prior to the exposure of the substrate.
Claim 47
Dependent Claim
35 words
An exposing method according to claim 40 , the method further comprising: making the surface of the porous member lyophilic by bringing the liquid to the porous member prior to the exposure of the substrate.
Claim 48
Dependent Claim
24 words
An exposing method according to claim 38 , the method further comprising: drying the porous member at least when no substrate is being exposed.
Claim 49
Dependent Claim
22 words
A device fabricating method, comprising: exposing the substrate using an exposing method according to claim 38 ; and developing the exposed substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2015-10-30 | 2016-04-30 | 2016-10-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2019-10-30 | 2020-04-30 | 2020-10-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2023-10-30 | 2024-04-30 | 2024-10-30 | $7700.00 | Window Closed / Lapsed |