US6576300B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
High modulus, low dielectric constant coatings
Assignee: Axcelis Technologies Inc
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Filing: 2000-03-20
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Granted: 2003-06-10
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Expires: 2020-03-20
Abstract
Abstract Low dielectric constant films with improved elastic modulus. The method of making such coatings involves providing a porous network coating produced from a resin containing at least 2 Si-H groups where the coating has been thermally cured and has a dielectric constant in the range of from about 1.1 to about 3.5, and plasma treating the coating to convert the coating into porous silica. Plasma treatment of the network coating yields a coating with improved modulus, but with a higher dielectric constant. The coating is plasma treated for between about 15 and 120 seconds at a temperature less than or about 350° C. The plasma treated coating can optionally be annealed. Rapid thermal processing (RTP) of the plasma treated coating reduces the dielectric constant of the coating while maintaining an improved elastic modulus as compared to the initial porous coating. The annealing temperature is preferably in excess of or about 350° C., and the annealing time is preferably at least or about 120 seconds. The annealed, plasma treated coating has a dielectric constant in the range of from about 1.1 to about 2.4 and an improved elastic modulus.
Inventors
- 👤 Ivan Louis Berry, III
- 👤 Kyuha Chung
- 👤 Qingyuan Han
- 👤 Youfan Liu
- 👤 Eric Scott Moyer
- 👤 Michael John Spaulding
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 20:28
CPC Classifications
C; C01; C01B; C01B33/00; C01B33/113; C01B33/12; C01B33/126; H; H10; H10P; H10P14/00; H10P14/60; H10P14/65; H10P14/6516; H10P14/6529; H10P14/6532; H10P14/69; H10P14/692; H10P14/6921; H10P14/6922; H10P14/6925; H10P14/63; H10P14/6326; H10P14/6342; H10P14/66; H10P14/665; H10P14/668; H10P14/6681; H10P14/6684; H10P14/6686; Y; Y10; Y10T; Y10T428/00; Y10T428/31504; Y10T428/31652; Y10T428/31663
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
88 words
A method of making a plasma treated coating comprising: providing a thermally cured porous network coating produced from a resin containing at least 2 Si—H groups, wherein the porous network coating has an initial dielectric constant and an initial elastic modulus; and plasma treating the porous network coating to reduce an amount of SiH bonds and to provide a plasma treated coating having a second dielectric constant which is greater than the initial dielectric constant, and a second elastic modulus which is greater than the initial elastic modulus.
Claim 2
Independent Claim
88 words
A method of making a plasma treated coating comprising: providing a thermally cured porous network coating produced from a resin containing at least 2 Si—H groups, wherein the porous network coating has an initial dielectric constant and an initial elastic modulus; and plasma treating the porous network coating to reduce an amount of SiH bonds and to provide a plasma treated coating having a second dielectric constant which is greater than the initial dielectric constant, and a second elastic modulus which is greater than the initial elastic modulus.
Claim 3
Dependent Claim
45 words
The method of claim 1 further comprising annealing the plasma treated coating to provide an annealed, plasma treated coating having a third dielectric constant which is less than the second dielectric constant and a third elastic modulus which is greater than the initial elastic modulus.
Claim 4
Dependent Claim
22 words
The method of claim 2 wherein the plasma treated coating is annealed at a temperature in excess of or about 350° C.
Claim 5
Dependent Claim
26 words
The method of claim 2 wherein the plasma treated coating is annealed at a temperature in the range of about 350° C. to about 450° C.
Claim 6
Dependent Claim
19 words
The method of claim 2 wherein the plasma treated coating is annealed for at least or about 120 seconds.
Claim 7
Dependent Claim
25 words
The method of claim 1 wherein the second elastic modulus of the plasma treated coating is at least 50% greater than the initial elastic modulus.
Claim 8
Dependent Claim
25 words
The method of claim 1 wherein the second elastic modulus of the plasma treated coating is at least 100% greater than the initial elastic modulus.
Claim 9
Dependent Claim
26 words
The method of claim 2 wherein the third elastic modulus of the annealed, plasma treated coating is at least 50% greater that the initial elastic modulus.
Claim 10
Dependent Claim
26 words
The method of claim 2 wherein the third elastic modulus of the annealed, plasma treated coating is at least 100% greater than the initial elastic modulus.
Claim 11
Dependent Claim
29 words
The method of claim 1 wherein the thermally cured porous network coating is cured by heating to a temperature sufficient to convert the porous network coating into a ceramic.
Claim 12
Dependent Claim
34 words
The method of claim 10 wherein the thermally cured porous network coating is cured by heating to a temperature of about 50° C. to about 1000° C. for up to or about 6 hours.
Claim 13
Dependent Claim
38 words
The method of claim 11 wherein the thermally cured porous network coating is cured by heating to a temperature in the range of about 50° C. to about 500° C. for between 10 minutes and about 2 hours.
Claim 14
Dependent Claim
38 words
The method of claim 11 wherein the thermally cured porous network coating is cured by heating to a temperature in the range of about 350° C. to about 450° C. for between 10 minutes and about 1 hour.
Claim 15
Dependent Claim
28 words
The method of claim 1 wherein the thermally cured porous network coating is plasma treated for a time in the range of about 15 to about 120 seconds.
Claim 16
Dependent Claim
24 words
The method of claim 1 wherein the thermally cured porous network coating is plasma treated at a temperature less than or about 350° C.
Claim 17
Dependent Claim
29 words
The method of claim 1 wherein the thermally cured porous network coating is plasma treated at a temperature in the range of about 80° C. to about 280° C.
Claim 18
Dependent Claim
27 words
The method of claim 2 wherein the third dielectric constant of the annealed, plasma treated coating is in the range of from about 1.1 to about 3.5.
Claim 19
Dependent Claim
23 words
The method of claim 2 wherein the third elastic modulus of the annealed, plasma treated coating is greater than or about 4 GPa.
Claim 20
Dependent Claim
23 words
The method of claim 2 wherein the third elastic modulus of the annealed, plasma treated coating is greater than or about 10 GPa.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2006-06-09 | 2006-12-09 | 2007-06-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2010-06-09 | 2010-12-09 | 2011-06-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2014-06-09 | 2014-12-09 | 2015-06-10 | $7700.00 | Window Closed / Lapsed |