Patent JPS4422981B1 successfully refreshed from Google Patents.
US6410436B2
Expired / Lapsed
US
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Method of cleaning porous body, and process for producing porous body, non-porous film or bonded substrate
Assignee: Canon Inc
•
Filing: 2000-03-16
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Granted: 2002-06-25
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Expires: 2020-03-16
Abstract
Abstract In order to clean a porous body in a short time without causing any change in its structure, the porous body is cleaned after the anodization is completed with a cleaning solution containing at least one of an alcohol and acetic acid.
Inventors
- 👤 Kenji Yamagata
- 👤 Satoshi Matsumura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 10:01
CPC Classifications
H; H10; H10P; H10P52/00; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; H10P72/0411; H10P72/0416; B; B08; B08B; B08B3/00; B08B3/04; B08B3/08; C; C11; C11D; C11D7/00; C11D7/22; C11D7/26; C11D7/261; C11D7/265; H10P72/0414; C11D2111/00; C11D2111/10; C11D2111/14; C11D2111/22; C11D2111/40; C11D2111/46; H10H; H10H20/00; H10H20/80; H10H20/81; H10H20/822; H10H20/826; H10H20/8264
Claims Analysis
Total Claims: 71
Claim 1
Independent Claim
37 words
A method of cleaning a porous body formed by anodization, comprising the step of cleaning the porous body after the anodization is completed, with a cleaning solution containing at least one of an alcohol and acetic acid.
Claim 2
Independent Claim
37 words
A method of cleaning a porous body formed by anodization, comprising the step of cleaning the porous body after the anodization is completed, with a cleaning solution containing at least one of an alcohol and acetic acid.
Claim 3
Dependent Claim
26 words
The method of cleaning a porous body according to claim 1 , wherein after the cleaning step the porous body is further cleaned with pure water.
Claim 4
Dependent Claim
23 words
The method of cleaning a porous body according to claim 1 , wherein the cleaning solution is an aqueous solution containing an alcohol.
Claim 5
Dependent Claim
19 words
The method of cleaning a porous body according to claim 1 , wherein the cleaning solution comprises an alcohol.
Claim 6
Dependent Claim
44 words
The method of cleaning a porous body according to claim 1 , wherein the cleaning step comprises the step of cleaning with a cleaning solution comprising an alcohol and the step of cleaning with a cleaning solution comprising an aqueous solution of an alcohol.
Claim 7
Dependent Claim
31 words
The method of cleaning a porous body according to claim 1 , wherein the cleaning step comprises the step of exposing the porous body to a vapor of the cleaning solution.
Claim 8
Dependent Claim
28 words
The method of cleaning a porous body according to claim 1 , wherein the cleaning step comprises the step of immersing the porous body in the cleaning solution.
Claim 9
Dependent Claim
30 words
The method of cleaning a porous body according to claim 1 , wherein after the cleaning step the porous body is cleaned with pure water provided with an ultrasonic energy.
Claim 10
Dependent Claim
25 words
The method of cleaning a porous body according to claim 8 , wherein the porous body has a region having a porosity lower than 70%.
Claim 11
Dependent Claim
40 words
The method of cleaning a porous body according to claim 1 , wherein after the cleaning step the porous body is cleaned with pure water and thereafter the porous body thus cleaned is spin-dried and is further dried by deaeration.
Claim 12
Dependent Claim
51 words
The method of cleaning a porous body according to claim 1 , wherein the cleaning step comprises exposing the porous body to a vapor of the cleaning solution, and moving the porous body thus cleaned, relatively from the inside of the vapor to the outside of the vapor to effect drying.
Claim 13
Dependent Claim
26 words
The method of cleaning a porous body according to claim 11 , wherein the porous body has a region having a porosity of 70% or higher.
Claim 14
Dependent Claim
27 words
The method of cleaning a porous body according to claim 1 , wherein the porous body is formed on the surface of a non-porous body base member.
Claim 15
Dependent Claim
19 words
The method of cleaning a porous body according to claim 1 , wherein the porous body comprises a semiconductor.
Claim 16
Dependent Claim
35 words
A process for producing a non-porous film, comprising the step of forming a non-porous layer on the porous body having been cleaned by the method of cleaning a porous body according to claim 1 .
Claim 17
Dependent Claim
22 words
The process for producing a non-porous film according to claim 15 , which further comprises the step of removing the porous body.
Claim 18
Dependent Claim
69 words
A process for producing a non-porous film, comprising the steps of forming a porous layer by anodization, forming a non-porous layer on the porous layer, bonding the non-porous layer to a supporting base, and removing the porous layer, wherein; the process further comprises the step of, after the anodization is completed, cleaning the porous layer with a cleaning solution containing at least one of an alcohol and acetic acid.
Claim 19
Dependent Claim
69 words
A process for producing a non-porous film, comprising the steps of forming a porous layer by anodization, forming a non-porous layer on the porous layer, bonding the non-porous layer to a supporting base, and removing the porous layer, wherein; the process further comprises the step of, after the anodization is completed, cleaning the porous layer with a cleaning solution containing at least one of an alcohol and acetic acid.
Claim 20
Dependent Claim
26 words
The process for producing a non-porous film according to claim 17 , wherein after the cleaning step the porous layer is further cleaned with pure water.
Claim 21
Dependent Claim
23 words
The process for producing a non-porous film according to claim 17 , wherein the cleaning solution is an aqueous solution containing an alcohol.
Claim 22
Dependent Claim
19 words
The process for producing a non-porous film according to claim 17 , wherein the cleaning solution comprises an alcohol.
Claim 23
Dependent Claim
44 words
The process for producing a non-porous film according to claim 17 , wherein the cleaning step comprises the step of cleaning with a cleaning solution comprising an alcohol and the step of cleaning with a cleaning solution comprising an aqueous solution of an alcohol.
Claim 24
Dependent Claim
31 words
The process for producing a non-porous film according to claim 17 , wherein the cleaning step comprises the step of exposing the porous layer to a vapor of the cleaning solution.
Claim 25
Dependent Claim
28 words
The process for producing a non-porous film according to claim 17 , wherein the cleaning step comprises the step of immersing the porous layer in the cleaning solution.
Claim 26
Dependent Claim
30 words
The process for producing a non-porous film according to claim 17 , wherein after the cleaning step the porous layer is cleaned with pure water provided with an ultrasonic energy.
Claim 27
Dependent Claim
25 words
The process for producing a non-porous film according to claim 24 , wherein the porous layer has a region having a porosity lower than 70%.
Claim 28
Dependent Claim
34 words
The process for producing a non-porous film according to claim 17 , wherein after the cleaning step the porous layer is cleaned with pure water and thereafter the porous layer thus cleaned is spin-dried.
Claim 29
Dependent Claim
35 words
The process for producing a non-porous film according to claim 17 , which further comprises the step of oxidizing the porous layer to form oxide films on the pore wall surfaces of the porous layer.
Claim 30
Dependent Claim
19 words
The process for producing a non-porous film according to claim 17 , wherein the porous layer comprises a semiconductor.
Claim 31
Dependent Claim
46 words
A process for producing a porous body, comprising the steps of: subjecting a non-porous body to anodization to form a porous body; and cleaning the porous body after the anodization is completed, with a cleaning solution containing at least one of an alcohol and acetic acid.
Claim 32
Dependent Claim
46 words
A process for producing a porous body, comprising the steps of: subjecting a non-porous body to anodization to form a porous body; and cleaning the porous body after the anodization is completed, with a cleaning solution containing at least one of an alcohol and acetic acid.
Claim 33
Dependent Claim
26 words
The process for producing a porous body according to claim 29 , wherein after the cleaning step the porous body is further cleaned with pure water.
Claim 34
Dependent Claim
23 words
The process for producing a porous body according to claim 29 , wherein the cleaning solution is an aqueous solution containing an alcohol.
Claim 35
Dependent Claim
19 words
The process for producing a porous body according to claim 29 , wherein the cleaning solution comprises an alcohol.
Claim 36
Dependent Claim
44 words
The process for producing a porous body according to claim 29 , wherein the cleaning step comprises the step of cleaning with a cleaning solution comprising an alcohol and the step of cleaning with a cleaning solution comprising an aqueous solution of an alcohol.
Claim 37
Dependent Claim
31 words
The process for producing a porous body according to claim 29 , wherein the cleaning step comprises the step of exposing the porous body to a vapor of the cleaning solution.
Claim 38
Dependent Claim
28 words
The process for producing a porous body according to claim 29 , wherein the cleaning step comprises the step of immersing the porous body in the cleaning solution.
Claim 39
Dependent Claim
30 words
The process for producing a porous body according to claim 29 , wherein after the cleaning step the porous body is cleaned with pure water provided with an ultrasonic energy.
Claim 40
Dependent Claim
25 words
The process for producing a porous body according to claim 36 , wherein the porous body has a region having a porosity lower than 70%.
Claim 41
Dependent Claim
40 words
The process for producing a porous body according to claim 29 , wherein after the cleaning step the porous body is cleaned with pure water and thereafter the porous body thus cleaned is spin-dried and is further dried by deaeration.
Claim 42
Dependent Claim
51 words
The process for producing a porous body according to claim 29 , wherein the cleaning step comprises exposing the porous body to a vapor of the cleaning solution, and moving the porous body thus cleaned, relatively from the inside of the vapor to the outside of the vapor to effect drying.
Claim 43
Dependent Claim
26 words
The process for producing a porous body according to claim 39 , wherein the porous body has a region having a porosity of 70% or higher.
Claim 44
Dependent Claim
27 words
The process for producing a porous body according to claim 29 , wherein the porous body is formed on the surface of a non-porous body base member.
Claim 45
Dependent Claim
19 words
The process for producing a porous body according to claim 29 , wherein the porous body comprises a semiconductor.
Claim 46
Dependent Claim
66 words
A process for producing a bonded substrate, comprising the steps of forming a porous layer by anodization, bonding to a supporting base a non-porous layer formed on the porous layer, and removing the porous layer, wherein; the process further comprises the step of, after the anodization is completed, cleaning the porous layer with a cleaning solution containing at least one of an alcohol and acetic acid.
Claim 47
Dependent Claim
66 words
A process for producing a bonded substrate, comprising the steps of forming a porous layer by anodization, bonding to a supporting base a non-porous layer formed on the porous layer, and removing the porous layer, wherein; the process further comprises the step of, after the anodization is completed, cleaning the porous layer with a cleaning solution containing at least one of an alcohol and acetic acid.
Claim 48
Dependent Claim
26 words
The process for producing a bonded substrate according to claim 43 , wherein after the cleaning step the porous layer is further cleaned with pure water.
Claim 49
Dependent Claim
23 words
The process for producing a bonded substrate according to claim 43 , wherein the cleaning solution is an aqueous solution containing an alcohol.
Claim 50
Dependent Claim
19 words
The process for producing a bonded substrate according to claim 43 , wherein the cleaning solution comprises an alcohol.
Claim 51
Dependent Claim
44 words
The process for producing a bonded substrate according to claim 43 , wherein the cleaning step comprises the step of cleaning with a cleaning solution comprising an alcohol and the step of cleaning with a cleaning solution comprising an aqueous solution of an alcohol.
Claim 52
Dependent Claim
31 words
The process for producing a bonded substrate according to claim 43 , wherein the cleaning step comprises the step of exposing the porous layer to a vapor of the cleaning solution.
Claim 53
Dependent Claim
28 words
The process for producing a bonded substrate according to claim 43 , wherein the cleaning step comprises the step of immersing the porous layer in the cleaning solution.
Claim 54
Dependent Claim
30 words
The process for producing a bonded substrate according to claim 43 , wherein after the cleaning step the porous layer is cleaned with pure water provided with an ultrasonic energy.
Claim 55
Dependent Claim
25 words
The process for producing a bonded substrate according to claim 50 , wherein the porous layer has a region having a porosity lower than 70%.
Claim 56
Dependent Claim
34 words
The process for producing a bonded substrate according to claim 50 , wherein after the cleaning step the porous layer is cleaned with pure water and thereafter the porous layer thus cleaned is spin-dried.
Claim 57
Dependent Claim
35 words
The process for producing a bonded substrate according to claim 43 , which further comprises the step of oxidizing the porous layer to form oxide films on the pore wall surfaces of the porous layer.
Claim 58
Dependent Claim
19 words
The process for producing a bonded substrate according to claim 43 , wherein the porous layer comprises a semiconductor.
Claim 59
Dependent Claim
63 words
A process for producing a substrate provided with a porous layer comprising the steps of: anodizing a surface of a non-porous substrate with an anodizing solution to form a porous layer; and cleaning the porous layer, which has the anodizing solution remaining in its pores after the anodizing step, with a cleaning solution comprising at least one of an alcohol and acetic acid.
Claim 60
Dependent Claim
63 words
A process for producing a substrate provided with a porous layer comprising the steps of: anodizing a surface of a non-porous substrate with an anodizing solution to form a porous layer; and cleaning the porous layer, which has the anodizing solution remaining in its pores after the anodizing step, with a cleaning solution comprising at least one of an alcohol and acetic acid.
Claim 61
Dependent Claim
63 words
A process for producing a substrate with a non-porous layer on a porous layer comprising, in sequence, the steps of: anodizing a non-porous substrate to form the porous layer on a surface of the non-porous substrate; cleaning the porous layer with a cleaning solution containing at least one of an alcoholic and acetic acid; and forming the non-porous layer on the porous layer.
Claim 62
Dependent Claim
63 words
A process for producing a substrate with a non-porous layer on a porous layer comprising, in sequence, the steps of: anodizing a non-porous substrate to form the porous layer on a surface of the non-porous substrate; cleaning the porous layer with a cleaning solution containing at least one of an alcoholic and acetic acid; and forming the non-porous layer on the porous layer.
Claim 63
Dependent Claim
100 words
A process for producing a non-porous film comprising the steps of: preparing a first substrate with a non-porous layer on a porous layer; bonding the first substrate and a second substrate such that the non-porous layer is positioned inside to form a multi-layer structure; and separating the multi-layer structure at the porous layer, wherein preparing the first substrate comprises, in sequence, the steps of: i) forming the porous layer by anodization; ii) cleaning the porous layer with a cleaning solution containing at least one of an alcohol and acetic acid; and iii) forming the non-porous layer on the porous layer.
Claim 64
Dependent Claim
100 words
A process for producing a non-porous film comprising the steps of: preparing a first substrate with a non-porous layer on a porous layer; bonding the first substrate and a second substrate such that the non-porous layer is positioned inside to form a multi-layer structure; and separating the multi-layer structure at the porous layer, wherein preparing the first substrate comprises, in sequence, the steps of: i) forming the porous layer by anodization; ii) cleaning the porous layer with a cleaning solution containing at least one of an alcohol and acetic acid; and iii) forming the non-porous layer on the porous layer.
Claim 65
Dependent Claim
78 words
A process for producing a non-porous film comprising the steps of: preparing a substrate provided with a non-porous layer on a porous layer; and separating the non-porous layer at the porous layer, wherein preparing the substrate comprises, in sequence, the steps of: i) forming the porous layer by anodization; ii) cleaning the porous layer with a cleaning solution containing at least one of an alcohol and acetic acid; and iii) forming the non-porous layer on the porous layer.
Claim 66
Dependent Claim
78 words
A process for producing a non-porous film comprising the steps of: preparing a substrate provided with a non-porous layer on a porous layer; and separating the non-porous layer at the porous layer, wherein preparing the substrate comprises, in sequence, the steps of: i) forming the porous layer by anodization; ii) cleaning the porous layer with a cleaning solution containing at least one of an alcohol and acetic acid; and iii) forming the non-porous layer on the porous layer.
Claim 67
Dependent Claim
24 words
The process for producing a non-porous film according to claim 58 , wherein the porous layer comprises Si, Ge, GaAs, GaAlAs, SiGe or C.
Claim 68
Dependent Claim
21 words
The process for producing a non-porous film according to claim 58 , wherein ultrasonic energy is applied during the cleaning step.
Claim 69
Dependent Claim
20 words
The process for producing a non-porous film according to claim 58 , wherein the alcohol is methanol, ethanol or propanol.
Claim 70
Dependent Claim
24 words
The process for producing a non-porous film according to claim 58 , wherein the cleaning step is carried out while rotating the porous layer.
Claim 71
Dependent Claim
24 words
The process for producing a non-porous film according to claim 58 , wherein the non-porous layer comprises Si, Ge, GaAs, GaAlAs, Site or SiC.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2005-06-24 | 2005-12-24 | 2006-06-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2009-06-24 | 2009-12-24 | 2010-06-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2013-06-24 | 2013-12-24 | 2014-06-25 | $7700.00 | Window Closed / Lapsed |