US5143103A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for cleaning and drying workpieces
Assignee: International Business Machines Corp
•
Filing: 1991-01-04
•
Granted: 1992-09-01
•
Expires: 2011-01-04
Abstract
Abstract An apparatus for cleaning and drying workpieces which comprises a closable chamber, means for introducing a cleaning solvent to the chamber, means for removing the solvent from the chamber, means for introducing an inert gas to the chamber, means for receiving workpieces and for moving the workpieces with respect to the level of the solvent, and means for transmitting megasonic energy with respect to the solvent.
Inventors
- 👤 James E. Basso
- 👤 Parmesh K. Bhalla
- 👤 John J. Chahine
- 👤 Daro Diddell
- 👤 Gregory J. Earle
- 👤 Edward P. Gabriel
- 👤 Farrokh Yaghmaie
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 22:23
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0402; H10P72/0406; B; B08; B08B; B08B3/00; B08B3/04; B08B3/10; B08B3/12; Y; Y10; Y10S; Y10S134/00; Y10S134/902
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
113 words
An apparatus for cleaning and drying workpieces comprising a closed chamber, means for introducing a cleaning solvent to said chamber to a desired fill level, means for removing said solvent from said chamber, means for introducing an inert gas to said chamber and means for evacuating said chamber comprising a manifold disposed in said chamber and a multi-position valve disposed outside said chamber and connected to said manifold by means of a pipe extending through a wall of said chamber, means for supporting a workpiece carrier on a workpiece lifter which is movable with respect to said desired fill level of said cleaning solution, and means for transmitting megasonic energy to said solvent.
Claim 2
Independent Claim
113 words
An apparatus for cleaning and drying workpieces comprising a closed chamber, means for introducing a cleaning solvent to said chamber to a desired fill level, means for removing said solvent from said chamber, means for introducing an inert gas to said chamber and means for evacuating said chamber comprising a manifold disposed in said chamber and a multi-position valve disposed outside said chamber and connected to said manifold by means of a pipe extending through a wall of said chamber, means for supporting a workpiece carrier on a workpiece lifter which is movable with respect to said desired fill level of said cleaning solution, and means for transmitting megasonic energy to said solvent.
Claim 3
Dependent Claim
18 words
The apparatus of claim 1 wherein said chamber comprises a tank and a cover in movable engagement therewith.
Claim 4
Dependent Claim
18 words
The apparatus of claim 1 wherein said cleaning solvent is a low molecular weight alcohol, ketone or chlorofluorocarbon.
Claim 5
Dependent Claim
16 words
The apparatus of claim 3 wherein said cleaning solvent is isopropyl alcohol, ethyl alcohol or acetone.
Claim 6
Dependent Claim
12 words
The apparatus of claim 4 wherein said cleaning solvent is isopropyl alcohol.
Claim 7
Dependent Claim
15 words
The apparatus of claim 1 which further comprises a cooling coil disposed in said chamber.
Claim 8
Dependent Claim
16 words
The apparatus of claim 1 wherein said means for transmitting megasonic energy is a megasonic transducer.
Claim 9
Dependent Claim
28 words
The apparatus of claim 7 wherein said megasonic transducer is disposed so as to transmit said energy in a direction generally normal to the surface of said solvent.
Claim 10
Dependent Claim
18 words
The apparatus of claim 8 wherein an additional megasonic transducer is positioned on the sidewall of said chamber.
Claim 11
Dependent Claim
13 words
The apparatus of claim 1 wherein said inert gas is nitrogen or argon.
Claim 12
Dependent Claim
22 words
The apparatus of claim 1 and further including means for heating said solvent prior to introduction of said solvent into said chamber.
Claim 13
Dependent Claim
14 words
The apparatus of claim 1 wherein means are provided for heating said inert gas.
Claim 14
Dependent Claim
22 words
The apparatus of claim 1 wherein said means for transmitting megasonic energy has a frequency range from about 0.2 to 5 MHz.
Claim 15
Dependent Claim
20 words
The apparatus of claim 13 wherein said means for transmitting megasonic energy has a frequency range from about 0.95-1.6 MHz.
References Cited (Backward Citations)
GB790671A
Cited
US3638666A
Cited
US3702795A
Cited
US3727620A
Cited
US3893869A
Cited
US3893869B1
Cited
SU585890A1
Cited
SU983913A1
Cited
US4118649A
Cited
US4132567A
Cited
JPS6092621A
Cited
US4543130A
Cited
US4749440A
Cited
US4871417A
Cited
US4854337A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-09-01 | 1996-03-02 | 1996-09-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-09-01 | 2000-03-02 | 2000-09-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-09-01 | 2004-03-02 | 2004-09-01 | $7700.00 | Window Closed / Lapsed |