Patent US4733938A successfully refreshed from Google Patents.
Patent US6236033B1 successfully refreshed from Google Patents.
US6236033B1
Expired / Lapsed
US
⏱️ 0.0 years remaining
Enhanced optical transmission apparatus utilizing metal films having apertures and periodic surface topography
Assignee: NEC Corp
•
Filing: 1998-12-09
•
Granted: 2001-05-22
•
Expires: 2018-12-09
Abstract
Abstract An apparatus for enhanced light transmission is provided. The apparatus comprises a metal film having a first surface and a second surface, at least one aperture provided in the metal film and extending from the first surface to the second surface, and a periodic surface topography provided on at least one of the first and second surface of the metal film. Light incident on one of the surfaces of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the at least one aperture in the metal film. The apparatus may have a single aperture or a plurality of periodically arranged apertures. Wavelength-selective optical filters, spatial optical filters, light collectors, near-field scanning optical microscope probes and photolithographic masks are also provided.
Inventors
- 👤 Thomas W. Ebbesen
- 👤 Daniel E. Grupp
- 👤 Tineke Thio
- 👤 Henri J. Lezec
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 10:55
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/122; G02B6/1226; B; B82; B82Y; B82Y20/00; B82Y35/00; G01; G01Q; G01Q60/00; G01Q60/18; G01Q60/22; G02B5/00; G02B5/008; G02B5/20; G02B5/204; B82Y10/00
Claims Analysis
Total Claims: 66
Claim 1
Independent Claim
101 words
An apparatus for enhanced light transmission comprising: a metal film having a first surface and a second surface; at least one aperture provided in the metal film and extending from the first surface to the second surface; and a periodic surface topography provided on at least one of the first and second surface of the metal film, whereby light incident on one of the surfaces of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the at least one aperture in the metal film.
Claim 2
Independent Claim
101 words
An apparatus for enhanced light transmission comprising: a metal film having a first surface and a second surface; at least one aperture provided in the metal film and extending from the first surface to the second surface; and a periodic surface topography provided on at least one of the first and second surface of the metal film, whereby light incident on one of the surfaces of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the at least one aperture in the metal film.
Claim 3
Dependent Claim
19 words
The apparatus for enhanced light transmission of claim 1 , wherein the metal film is fixed to a substrate.
Claim 4
Dependent Claim
21 words
The apparatus for enhanced light transmission of claim 1 , wherein the periodic surface topography comprises a plurality of surface features.
Claim 5
Dependent Claim
16 words
The apparatus for enhanced light transmission of claim 3 , wherein the surface features comprise dimples.
Claim 6
Dependent Claim
17 words
The apparatus for enhanced light transmission of claim 3 , wherein the surface features comprise semi-spherical protrusions.
Claim 7
Dependent Claim
16 words
The apparatus for enhanced light transmission of claim 3 , wherein the surface features comprise grooves.
Claim 8
Dependent Claim
16 words
The apparatus for enhanced light transmission of claim 3 , wherein the surface features comprise ribs.
Claim 9
Dependent Claim
18 words
The apparatus for enhanced light transmission of claim 3 , wherein the surface features comprise concentric depressed rings.
Claim 10
Dependent Claim
18 words
The apparatus for enhanced light transmission of claim 3 , wherein the surface features comprise concentric raised rings.
Claim 11
Dependent Claim
20 words
The apparatus for enhanced light transmission of claim 1 , wherein the at least one aperture comprises a single aperture.
Claim 12
Dependent Claim
21 words
The apparatus for enhanced light transmission of claim 1 , wherein the at least one aperture comprises a plurality of apertures.
Claim 13
Dependent Claim
45 words
The apparatus for enhanced light transmission of claim 1 , wherein the plurality of apertures are periodically arranged, wherein the periodic surface topography comprises a plurality of surface features, and wherein the periodic apertures and the periodic surface features are positionally commensurate and in phase.
Claim 14
Dependent Claim
16 words
The apparatus for enhanced light transmission of claim 1 , wherein the apertures are cylindrically shaped.
Claim 15
Dependent Claim
15 words
The apparatus for enhanced light transmission of claim 1 , wherein the apertures are slit-shaped.
Claim 16
Dependent Claim
15 words
The apparatus for enhanced light transmission of claim 1 , wherein the apertures are rectangularly-shaped.
Claim 17
Dependent Claim
29 words
The apparatus for enhanced light transmission of claim 1 , wherein the light is incident on a surface of the metal film having the periodic surface topography provided thereon.
Claim 18
Independent Claim
97 words
An apparatus for enhanced light transmission comprising: a metal film having a first surface and a second surface; a single aperture provided in the metal film and extending from the first surface to the second surface; and a periodic surface topography provided on at least one of the first and second surface of the metal film, whereby light incident on one of the surfaces of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the aperture in the metal film.
Claim 19
Independent Claim
97 words
An apparatus for enhanced light transmission comprising: a metal film having a first surface and a second surface; a single aperture provided in the metal film and extending from the first surface to the second surface; and a periodic surface topography provided on at least one of the first and second surface of the metal film, whereby light incident on one of the surfaces of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the aperture in the metal film.
Claim 20
Dependent Claim
19 words
The apparatus for enhanced light transmission of claim 17 , wherein the metal film is fixed to a substrate.
Claim 21
Dependent Claim
21 words
The apparatus for enhanced light transmission of claim 17 , wherein the periodic surface topography comprises a plurality of surface features.
Claim 22
Dependent Claim
16 words
The apparatus for enhanced light transmission of claim 19 , wherein the surface features comprise dimples.
Claim 23
Dependent Claim
17 words
The apparatus for enhanced light transmission of claim 19 , wherein the surface features comprise semi-spherical protrusions.
Claim 24
Dependent Claim
16 words
The apparatus for enhanced light transmission of claim 19 , wherein the surface features comprise grooves.
Claim 25
Dependent Claim
16 words
The apparatus for enhanced light transmission of claim 19 , wherein the surface features comprise ribs.
Claim 26
Dependent Claim
18 words
The apparatus for enhanced light transmission of claim 19 , wherein the surface features comprise concentric depressed rings.
Claim 27
Dependent Claim
18 words
The apparatus for enhanced light transmission of claim 19 , wherein the surface features comprise concentric raised rings.
Claim 28
Dependent Claim
16 words
The apparatus for enhanced light transmission of claim 17 , wherein the apertures are cylindrically shaped.
Claim 29
Dependent Claim
15 words
The apparatus for enhanced light transmission of claim 17 , wherein the apertures are slit-shaped.
Claim 30
Dependent Claim
15 words
The apparatus for enhanced light transmission of claim 17 , wherein the apertures are rectangularly-shaped.
Claim 31
Dependent Claim
29 words
The apparatus for enhanced light transmission of claim 17 , wherein the light is incident on a surface of the metal film having the periodic surface topography provided thereon.
Claim 32
Dependent Claim
132 words
An optical filter comprising: a metal film having a first surface and a second surface; at least one aperture provided in the metal film and extending from the first surface to the second surface; a periodic surface topography provided on at least one of the first and second surface of the metal film, whereby light incident on one of the surfaces of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the at least one aperture in the metal film; and means for adjusting the orientation of the metal film with respect to light incident thereon, such that only light of a specific range of wavelengths is transmitted through the apertures in the metal film.
Claim 33
Dependent Claim
132 words
An optical filter comprising: a metal film having a first surface and a second surface; at least one aperture provided in the metal film and extending from the first surface to the second surface; a periodic surface topography provided on at least one of the first and second surface of the metal film, whereby light incident on one of the surfaces of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the at least one aperture in the metal film; and means for adjusting the orientation of the metal film with respect to light incident thereon, such that only light of a specific range of wavelengths is transmitted through the apertures in the metal film.
Claim 34
Dependent Claim
17 words
The optical filter of claim 30 , wherein the at least one aperture comprises a single aperture.
Claim 35
Dependent Claim
18 words
The optical filter of claim 30 , wherein the at least one aperture comprises a plurality of apertures.
Claim 36
Dependent Claim
42 words
The optical filter of claim 32 , wherein the plurality of apertures are periodically arranged, wherein the periodic surface topography comprises a plurality of surface features, and wherein the periodic apertures and the periodic surface features are positionally commensurate and in phase.
Claim 37
Dependent Claim
26 words
The optical filter of claim 30 , wherein the light is incident on a surface of the metal film having the periodic surface topography provided thereon.
Claim 38
Dependent Claim
162 words
A spatial optical filter comprising: a metal film having a first surface and a second surface; a plurality of periodically arranged apertures provided in the metal film and extending from the first surface to the second surface; and a periodic surface topography provided on at least one of the first and second surface of the metal film, the periodic surface topography being in phase with the periodically arranged apertures at first positions on the metal film where enhanced transmission is desired and out of phase with the periodically arranged apertures at second positions on the metal film where enhanced transmission is not desired, whereby light incident on one of the surfaces of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through apertures at the first positions in the metal film and not enhancing transmission of light through apertures at the second positions in the metal.
Claim 39
Dependent Claim
162 words
A spatial optical filter comprising: a metal film having a first surface and a second surface; a plurality of periodically arranged apertures provided in the metal film and extending from the first surface to the second surface; and a periodic surface topography provided on at least one of the first and second surface of the metal film, the periodic surface topography being in phase with the periodically arranged apertures at first positions on the metal film where enhanced transmission is desired and out of phase with the periodically arranged apertures at second positions on the metal film where enhanced transmission is not desired, whereby light incident on one of the surfaces of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through apertures at the first positions in the metal film and not enhancing transmission of light through apertures at the second positions in the metal.
Claim 40
Dependent Claim
27 words
The spatial optical filter of claim 35 , wherein the light is incident on a surface of the metal film having the periodic surface topography provided thereon.
Claim 41
Dependent Claim
44 words
The spatial optical filter of claim 35 , further comprising means for adjusting the orientation of the metal film with respect to light incident thereon, such that only light of a specific range of wavelengths is transmitted through the apertures in the metal film.
Claim 42
Dependent Claim
119 words
A light collector comprising: a metal film having a first surface and a second surface; at least one aperture provided in the metal film and extending from the first surface to the second surface; a periodic surface topography provided on at least one of the first and second surface of the metal film, whereby light incident on one of the surfaces of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the at least one aperture in the metal film; and an optic fiber disposed in communication with each aperture such that light traveling through each aperture enters a corresponding optic fiber.
Claim 43
Dependent Claim
119 words
A light collector comprising: a metal film having a first surface and a second surface; at least one aperture provided in the metal film and extending from the first surface to the second surface; a periodic surface topography provided on at least one of the first and second surface of the metal film, whereby light incident on one of the surfaces of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the at least one aperture in the metal film; and an optic fiber disposed in communication with each aperture such that light traveling through each aperture enters a corresponding optic fiber.
Claim 44
Dependent Claim
17 words
The light collector of claim 38 , wherein the at least one aperture comprises a single aperture.
Claim 45
Dependent Claim
18 words
The light collector of claim 38 , wherein the at least one aperture comprises a plurality of apertures.
Claim 46
Dependent Claim
42 words
The light collector of claim 40 , wherein the plurality of apertures are periodically arranged, wherein the periodic surface topography comprises a plurality of surface features, and wherein the periodic apertures and the periodic surface features are positionally commensurate and in phase.
Claim 47
Dependent Claim
26 words
The light collector of claim 38 , wherein the light is incident on a surface of the metal film having the periodic surface topography provided thereon.
Claim 48
Dependent Claim
195 words
A near-field scanning optical microscope probe for use in a collection mode in a near-field scanning optical microscope including a light source and a photodetector, the near-field scanning optical microscope probe comprising: a light conveying device having a frontal surface disposed in proximity to the light source for receiving light from the light source; a metal film disposed on the frontal surface, the metal film having a first surface fixed to the frontal surface of the light conveying device frontal surface, and the metal film having a second surface facing the light source; at least one aperture provided in the metal film and extending from the first surface to the second surface; and a periodic surface topography provided on at least one of the first and second surfaces of the metal film, whereby light from the light source incident on the second surface of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the at least one aperture in the metal film, such that the enhanced transmitted light is conveyed through the light conveying device to the photodetector.
Claim 49
Dependent Claim
195 words
A near-field scanning optical microscope probe for use in a collection mode in a near-field scanning optical microscope including a light source and a photodetector, the near-field scanning optical microscope probe comprising: a light conveying device having a frontal surface disposed in proximity to the light source for receiving light from the light source; a metal film disposed on the frontal surface, the metal film having a first surface fixed to the frontal surface of the light conveying device frontal surface, and the metal film having a second surface facing the light source; at least one aperture provided in the metal film and extending from the first surface to the second surface; and a periodic surface topography provided on at least one of the first and second surfaces of the metal film, whereby light from the light source incident on the second surface of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the at least one aperture in the metal film, such that the enhanced transmitted light is conveyed through the light conveying device to the photodetector.
Claim 50
Dependent Claim
20 words
The near-field scanning optical microscope probe of claim 43 , wherein the at least one aperture comprises a single aperture.
Claim 51
Dependent Claim
21 words
The near-field scanning optical microscope probe of claim 43 , wherein the at least one aperture comprises a plurality of apertures.
Claim 52
Dependent Claim
45 words
The near-field scanning optical microscope probe of claim 45 , wherein the plurality of apertures are periodically arranged, wherein the periodic surface topography comprises a plurality of surface features, and wherein the periodic apertures and the periodic surface features are positionally commensurate and in phase.
Claim 53
Dependent Claim
25 words
The near-field scanning optical microscope probe of claim 43 , wherein the second surface of the metal film has the periodic surface topography provided thereon.
Claim 54
Dependent Claim
205 words
A near-field scanning optical microscope probe for use in an emission mode in a near-field scanning optical microscope including a light source and a photodetector, the near-field scanning optical microscope probe comprising: a light conveying device having a frontal surface disposed in proximity to the photodetector for transmitting light to the photodetector; a metal film disposed on the frontal surface, the metal film having a first surface fixed to the frontal surface of the light conveying device frontal surface, and the metal film having a second surface facing the photodetector; at least one aperture provided in the metal film and extending from the first surface to the second surface; and a periodic surface topography provided on at least one of the first and second surfaces of the metal film, whereby light from the light source will be conveyed through the light conveying device to the frontal surface and is incident on the first surface of the metal film so as to interact with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of the light through the at least one aperture in the metal film, such that the enhanced transmitted light is transmitted to the photodetector.
Claim 55
Dependent Claim
205 words
A near-field scanning optical microscope probe for use in an emission mode in a near-field scanning optical microscope including a light source and a photodetector, the near-field scanning optical microscope probe comprising: a light conveying device having a frontal surface disposed in proximity to the photodetector for transmitting light to the photodetector; a metal film disposed on the frontal surface, the metal film having a first surface fixed to the frontal surface of the light conveying device frontal surface, and the metal film having a second surface facing the photodetector; at least one aperture provided in the metal film and extending from the first surface to the second surface; and a periodic surface topography provided on at least one of the first and second surfaces of the metal film, whereby light from the light source will be conveyed through the light conveying device to the frontal surface and is incident on the first surface of the metal film so as to interact with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of the light through the at least one aperture in the metal film, such that the enhanced transmitted light is transmitted to the photodetector.
Claim 56
Dependent Claim
20 words
The near-field scanning optical microscope probe of claim 48 , wherein the at least one aperture comprises a single aperture.
Claim 57
Dependent Claim
21 words
The near-field scanning optical microscope probe of claim 48 , wherein the at least one aperture comprises a plurality of apertures.
Claim 58
Dependent Claim
45 words
The near-field scanning optical microscope probe of claim 50 , wherein the plurality of apertures are periodically arranged, wherein the periodic surface topography comprises a plurality of surface features, and wherein the periodic apertures and the periodic surface features are positionally commensurate and in phase.
Claim 59
Dependent Claim
25 words
The near-field scanning optical microscope probe of claim 50 , wherein the first surface of the metal film has the periodic surface topography provided thereon.
Claim 60
Dependent Claim
144 words
A photolithographic mask for transferring an image to a photoresist-coated substrate, the mask comprising: a metal film having a first surface and a second surface; at least one aperture provided in the metal film and extending from the first surface to the second surface, the at least one aperture being disposed in a pattern corresponding to the image to be transferred; and a periodic surface topography provided on at least one of the first and second surface of the metal film, whereby light incident on one of the surfaces of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the at least one aperture in the metal film so as to expose the photoresist-coated substrate according to the pattern in the metal film, thereby transferring the image.
Claim 61
Dependent Claim
144 words
A photolithographic mask for transferring an image to a photoresist-coated substrate, the mask comprising: a metal film having a first surface and a second surface; at least one aperture provided in the metal film and extending from the first surface to the second surface, the at least one aperture being disposed in a pattern corresponding to the image to be transferred; and a periodic surface topography provided on at least one of the first and second surface of the metal film, whereby light incident on one of the surfaces of the metal film interacts with a surface plasmon mode on at least one of the surfaces of the metal film thereby enhancing transmission of light through the at least one aperture in the metal film so as to expose the photoresist-coated substrate according to the pattern in the metal film, thereby transferring the image.
Claim 62
Dependent Claim
17 words
The photolithographic mask of claim 53 , wherein the at least one aperture comprises a single aperture.
Claim 63
Dependent Claim
18 words
The photolithographic mask of claim 53 , wherein the at least one aperture comprises a plurality of apertures.
Claim 64
Dependent Claim
42 words
The photolithographic mask of claim 55 , wherein the plurality of apertures are periodically arranged, wherein the periodic surface topography comprises a plurality of surface features, and wherein the periodic apertures and the periodic surface features are positionally commensurate and in phase.
Claim 65
Dependent Claim
12 words
The photolithographic mask of claim 53 , wherein the apertures are slit-shaped.
Claim 66
Dependent Claim
26 words
The photolithographic mask of claim 53 , wherein the light is incident on a surface of the metal film having the periodic surface topography provided thereon.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2004-05-21 | 2004-11-20 | 2005-05-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2008-05-21 | 2008-11-20 | 2009-05-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2012-05-21 | 2012-11-20 | 2013-05-22 | $7700.00 | Window Closed / Lapsed |