US6159781A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Way to fabricate the self-aligned T-shape gate to reduce gate resistivity
Assignee: GlobalFoundries Singapore Pte Ltd
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Filing: 1998-10-01
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Granted: 2000-12-12
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Expires: 2018-10-01
Abstract
Abstract Disclosed is a method of fabricating a semiconductor field effect transistor, wherein the gate has a short foot portion in contact with the semiconductor substrate for a short gate length and consequent low capacitance, and a large amount of metal in a contact portion for low gate resistance. Salicides are formed on the T-gate source on drain contact areas resulting in large, low resistance contact areas.
Inventors
- 👤 Yang Pan
- 👤 Erzhuang Liu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 18:17
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/0223; H10D30/0225; H10D30/60; H10D30/601; H10D64/00; H10D64/01; H10D64/013; H10D64/01302; H10D64/01304; H10D64/01324; H10D64/018; H10D64/20; H10D64/27; H10D64/311; H10D64/411; H10D64/511; H10D64/517; H10D64/518; H10D30/0212
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
328 words
A process for preparing a T-gate structure for use in a semiconductor device, the T gate having a foot in contact with a semiconductor substrate and an enlarged head upon the foot and integral therewith, comprising the steps of: providing a semiconductor substrate; forming surrounding trench insulation regions within said substrate; depositing a dielectric layer overlaying said semiconductor and said surrounding trench insulation regions; etching a first trench within said dielectric layer leaving a dielectric depth of deposition between the bottom of the trench and said substrate which equals the height of the foot of the T-gate; forming sidewall spacers against the walls of said first trench; etching a second trench through the bottom of said first trench to the level of said substrate and forming a second trench in this manner the width of which equals the width of the foot of the T-gate where the formed second trench is centered with respect to said first trench; removing said sidewall spacers; depositing a conductive layer over the structure formed by said dielectric layer, said first trench and said second trench; performing Chemical Mechanical Planarization (CMP) of said deposited conductive layer down to the level of the top of said dielectric layer; etching said dielectric layer to the level of the top of said surrounding trench insulation regions along the left hand side of the left wall of said first trench and the right hand side of the right wall of said first trench further using the downward extensions of said left and right wall of said first trench as the line along which the etching process is extended in a downward direction; forming source and drain within said substrates and on the immediate inside or T-gate side of said surrounding trench insulation regions; performing large angle lightly doped depositions on the T-gate side of said source and drain; and forming salicide across the top of the T-gate structure and the top of said source and said drain.
Claim 2
Dependent Claim
328 words
A process for preparing a T-gate structure for use in a semiconductor device, the T gate having a foot in contact with a semiconductor substrate and an enlarged head upon the foot and integral therewith, comprising the steps of: providing a semiconductor substrate; forming surrounding trench insulation regions within said substrate; depositing a dielectric layer overlaying said semiconductor and said surrounding trench insulation regions; etching a first trench within said dielectric layer leaving a dielectric depth of deposition between the bottom of the trench and said substrate which equals the height of the foot of the T-gate; forming sidewall spacers against the walls of said first trench; etching a second trench through the bottom of said first trench to the level of said substrate and forming a second trench in this manner the width of which equals the width of the foot of the T-gate where the formed second trench is centered with respect to said first trench; removing said sidewall spacers; depositing a conductive layer over the structure formed by said dielectric layer, said first trench and said second trench; performing Chemical Mechanical Planarization (CMP) of said deposited conductive layer down to the level of the top of said dielectric layer; etching said dielectric layer to the level of the top of said surrounding trench insulation regions along the left hand side of the left wall of said first trench and the right hand side of the right wall of said first trench further using the downward extensions of said left and right wall of said first trench as the line along which the etching process is extended in a downward direction; forming source and drain within said substrates and on the immediate inside or T-gate side of said surrounding trench insulation regions; performing large angle lightly doped depositions on the T-gate side of said source and drain; and forming salicide across the top of the T-gate structure and the top of said source and said drain.
Claim 3
Dependent Claim
24 words
The process of claim 1, wherein said steps of developing a head profile and developing a foot profile are accomplished by wet chemical procedures.
Claim 4
Dependent Claim
25 words
The process of claim 1 wherein said steps of developing a head profile and developing a foot profile are accomplished by electron beam resist techniques.
Claim 5
Dependent Claim
28 words
The process of claim 1 wherein said steps of developing a head profile and developing a foot profile are accomplished by dry etching processes using patterned photoresist techniques.
Claim 6
Dependent Claim
23 words
The process of claim 1 wherein said dielectric material is selected from the group consisting of silicon dioxides, silicon nitride, and silicon oxynitride.
Claim 7
Dependent Claim
11 words
The process of claim 1, wherein said substrate is gallium arsenide.
Claim 8
Dependent Claim
13 words
The process of claim 1, wherein said sidewall spacers are formed using nitride.
Claim 9
Dependent Claim
28 words
The process of claim 1, wherein polysilicon is used for said conductive layer deposited over said structure formed by said substrate, said first trench and said second trench.
Claim 10
Dependent Claim
19 words
The process of claim 1, wherein said surrounding trench insulation is formed using reactive ion etching of said substrate.
Claim 11
Dependent Claim
48 words
The process of claim 1, wherein a layer deposited on said substrate which forms an interface between said substrate and a mask for dry etching said surrounding trench insulation regions is formed of a combination layer of thermal oxide, Chemical Vapor Deposition (CVD) silicon nitride, and CVD oxide.
Claim 12
Dependent Claim
247 words
A process for preparing a mush-room shaped T-gate structure for use in a semiconductor device, said T gate having a foot in contact with a semiconductor substrate and an enlarged head upon said foot and integral therewith, comprising the steps of: providing a semiconductor substrate; forming surrounding trench insulation regions within said substrate; depositing a dielectric layer overlaying said semiconductor and said surrounding trench insulation regions; etching a trench within said dielectric layer where the walls of said trench are mushroom shaped; forming spacers against said walls of said trench; depositing a conductive layer over said structure formed by said dielectric layer, said first trench and said second trench; performing Chemical Mechanical Planarization (CMP) of said deposited conductive layer down to the level of the top of said dielectric layer; etching said dielectric layer to the level of the top of said surrounding trench insulator along the left hand side of the left wall of said trench and the right hand side of the right wall of said trench further using the downward extensions of said left and right wall of said trench as the line along which the etching process is extended in a downward direction; forming source and drain within said substrates and on the immediate inside or T-gate side of said surrounding trench insulators; performing large angle lightly doped depositions on said source and drain; and forming salicide across the top of the T-gate structure and the top of said source and said drain.
Claim 13
Dependent Claim
247 words
A process for preparing a mush-room shaped T-gate structure for use in a semiconductor device, said T gate having a foot in contact with a semiconductor substrate and an enlarged head upon said foot and integral therewith, comprising the steps of: providing a semiconductor substrate; forming surrounding trench insulation regions within said substrate; depositing a dielectric layer overlaying said semiconductor and said surrounding trench insulation regions; etching a trench within said dielectric layer where the walls of said trench are mushroom shaped; forming spacers against said walls of said trench; depositing a conductive layer over said structure formed by said dielectric layer, said first trench and said second trench; performing Chemical Mechanical Planarization (CMP) of said deposited conductive layer down to the level of the top of said dielectric layer; etching said dielectric layer to the level of the top of said surrounding trench insulator along the left hand side of the left wall of said trench and the right hand side of the right wall of said trench further using the downward extensions of said left and right wall of said trench as the line along which the etching process is extended in a downward direction; forming source and drain within said substrates and on the immediate inside or T-gate side of said surrounding trench insulators; performing large angle lightly doped depositions on said source and drain; and forming salicide across the top of the T-gate structure and the top of said source and said drain.
Claim 14
Dependent Claim
24 words
The process of claim 11 wherein said steps of developing a head profile and developing a foot profile are accomplished by wet chemical procedures.
Claim 15
Dependent Claim
25 words
The process of claim 11 wherein said steps of developing a head profile and developing a foot profile are accomplished by electron beam resist techniques.
Claim 16
Dependent Claim
28 words
The process of claim 11 wherein said steps of developing a head profile and developing a foot profile are accomplished by dry etching processes using patterned photoresist techniques.
Claim 17
Dependent Claim
23 words
The process of claim 11 wherein said dielectric material is selected from the group consisting of silicon dioxides, silicon nitride, and silicon oxynitride.
Claim 18
Dependent Claim
11 words
The process of claim 8, wherein said substrate is gallium arsenide.
Claim 19
Dependent Claim
13 words
The process of claim 11, wherein said sidewall spacers are formed using nitride.
Claim 20
Dependent Claim
28 words
The process of claim 11, wherein polysilicon is used for said conductive layer deposited over said structure formed by said substrate, said first trench and said second trench.
Claim 21
Dependent Claim
19 words
The process of claim 11, wherein said surrounding trench insulation is formed using reactive ion etching of said substrate.
Claim 22
Dependent Claim
48 words
The process of claim 11, wherein a layer deposited on said substrate which forms an interface between the substrate and a mask for dry etching said surrounding trench insulation regions is formed of a combination layer of thermal oxide, Chemical Vapor Deposition (CVD) silicon nitride, and CVD oxide.
Claim 23
Dependent Claim
13 words
The process of claim 1, wherein metal is used for said conductive layer.
Claim 24
Dependent Claim
180 words
A process of fabricating a MOS device with a self-aligned T-shape gate, comprising the steps of: providing a semiconductor substrate; forming a dielectric layer over said semiconductor substrate; forming a first trench in said dielectric layer, wherein said first trench is formed to a portion of the thickness of said dielectric layer, and wherein an upper portion of said T-shape gate will be formed; forming sidewall spacers on the walls of said first trench; forming a second trench through the remainder of said dielectric layer, using said sidewall spacers as a mask; removing said sidewall spacers; depositing a conductive layer over said dielectric layer and in said first and second trenches; removing the conductive layer down to the level of the top of said dielectric layer; removing said dielectric layer except under said upper portion of said T-shape gate, wherein a spacer is formed of a remainder of said dielectric layer; forming a source and drain in said substrate, adjacent to said gate spacers; and forming a lightly doped source and drain under said gate spacer by large angle implantation.
Claim 25
Dependent Claim
180 words
A process of fabricating a MOS device with a self-aligned T-shape gate, comprising the steps of: providing a semiconductor substrate; forming a dielectric layer over said semiconductor substrate; forming a first trench in said dielectric layer, wherein said first trench is formed to a portion of the thickness of said dielectric layer, and wherein an upper portion of said T-shape gate will be formed; forming sidewall spacers on the walls of said first trench; forming a second trench through the remainder of said dielectric layer, using said sidewall spacers as a mask; removing said sidewall spacers; depositing a conductive layer over said dielectric layer and in said first and second trenches; removing the conductive layer down to the level of the top of said dielectric layer; removing said dielectric layer except under said upper portion of said T-shape gate, wherein a spacer is formed of a remainder of said dielectric layer; forming a source and drain in said substrate, adjacent to said gate spacers; and forming a lightly doped source and drain under said gate spacer by large angle implantation.
Claim 26
Dependent Claim
103 words
A process for fabricating a MOS device with a self-aligned T-shape gate, comprising the steps of: providing a semiconductor substrate; forming a dielectric layer over said semiconductor substrate; forming a first trench in said dielectric layer; forming spacers along sidewalls of said trench; depositing a conductive layer over said dielectric layer, said spacers and in said trench; removing the conductive layer down to the level of the top of said dielectric layer; removing said dielectric layer; forming a source and drain in said substrate, adjacent to said spacers; and forming a lightly doped source and drain under said spacers by large angle implantation.
Claim 27
Dependent Claim
103 words
A process for fabricating a MOS device with a self-aligned T-shape gate, comprising the steps of: providing a semiconductor substrate; forming a dielectric layer over said semiconductor substrate; forming a first trench in said dielectric layer; forming spacers along sidewalls of said trench; depositing a conductive layer over said dielectric layer, said spacers and in said trench; removing the conductive layer down to the level of the top of said dielectric layer; removing said dielectric layer; forming a source and drain in said substrate, adjacent to said spacers; and forming a lightly doped source and drain under said spacers by large angle implantation.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-12-12 | 2004-06-12 | 2004-12-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-12-12 | 2008-06-12 | 2008-12-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-12-12 | 2012-06-12 | 2012-12-12 | $7700.00 | Window Closed / Lapsed |