US6124405A
Expired / Lapsed
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Polymers for photoresist compositions
Assignee: Arch Specialty Chemicals Inc
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Filing: 1999-05-19
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Granted: 2000-09-26
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Expires: 2019-05-19
Abstract
Abstract Polymers having an average molecular weight M w (weight average) of 5,000 to 1,000,000 (measured by gel permeation chromatography), comprising structural repeating units of the formulae I-IV: ##STR1## in which R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 , R 8 , R 9 and R 10 and w, x, y, and z are defined herein, are suitable as binders for DUV photoresists of high processing stability and flow resistance.
Inventors
- 👤 Carl-Lorenz Mertesdorf
- 👤 Hans-Thomas Schacht
- 👤 Norbert Muenzel
- 👤 Pasquale Alfred Falcigno
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 14:04
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/039; C; C08; C08F; C08F112/00; C08F112/02; C08F112/04; C08F112/14; C08F112/22; C08F112/24; C08F8/00; G03F7/0045; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/106
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
144 words
A polymer having an average molecular weight M w (weight average) of 5,000 to 1,000,000 (measured by gel permeation chromatography), comprising structural repeating units of the formulae I-IV: ##STR6## in which R 1 , R 2 , R 3 and R 4 independently of one another are hydrogen, methyl or halogen, R 5 and R 6 independently of one another are C 1 -C 6 alkyl, R 7 , R 8 , R 9 and R 10 independently of one another are hydrogen, C 1 -C 4 alkyl, C 1 -C 4 alkoxy or halogen, and w, x, y and z are numbers equal to or greater than 1, with the provision that the quotient ##EQU2## which is obtainable from the sum of the structural units having protecting groups divided by the sum of all of the structural units present, obeys the condition 0.10≦Q≦0.50.
Claim 2
Dependent Claim
144 words
A polymer having an average molecular weight M w (weight average) of 5,000 to 1,000,000 (measured by gel permeation chromatography), comprising structural repeating units of the formulae I-IV: ##STR6## in which R 1 , R 2 , R 3 and R 4 independently of one another are hydrogen, methyl or halogen, R 5 and R 6 independently of one another are C 1 -C 6 alkyl, R 7 , R 8 , R 9 and R 10 independently of one another are hydrogen, C 1 -C 4 alkyl, C 1 -C 4 alkoxy or halogen, and w, x, y and z are numbers equal to or greater than 1, with the provision that the quotient ##EQU2## which is obtainable from the sum of the structural units having protecting groups divided by the sum of all of the structural units present, obeys the condition 0.10≦Q≦0.50.
Claim 3
Dependent Claim
34 words
A polymer according to claim 1, comprising structural repeating units of the formulae V-VIII: ##STR7## in which R 1 to R 10 , w, x, y and z are as defined in claim 1.
Claim 4
Dependent Claim
13 words
A polymer according to claim 1, in which the quotient Q obeys 0.15≦Q≦0.45.
Claim 5
Dependent Claim
21 words
A polymer according to claim 1, in which R 1 , R 2 , R 3 and R 4 are hydrogen.
Claim 6
Dependent Claim
21 words
A polymer according to claim 1, in which R 7 , R 8 , R 9 and R 10 are hydrogen.
Claim 7
Dependent Claim
26 words
A polymer according to claim 1, in which R 5 and R 6 independently of one another are methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl or tert-butyl.
Claim 8
Dependent Claim
17 words
A polymer according to claim 1, in which R 5 and R 6 are ethyl or tert-butyl.
Claim 9
Dependent Claim
37 words
A polymer according to claim 1, comprising, based on the total number of all structural units, 1-40% of structural units of the formulae III and IV and 60-99% of structural units of the formulae I and II.
Claim 10
Dependent Claim
37 words
A polymer according to claim 1, comprising, based on the total number of all structural units, 2-15% of structural units of the formulae III and IV and 85-98% of structural units of the formulae I and II.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-09-26 | 2004-03-27 | 2004-09-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-09-26 | 2008-03-27 | 2008-09-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-09-26 | 2012-03-27 | 2012-09-26 | $7700.00 | Window Closed / Lapsed |