US5362600A
Expired / Lapsed
US
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Radiation sensitive compositions comprising polymer having acid labile groups
Assignee: Shipley Co Inc
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Filing: 1993-05-25
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Granted: 1994-11-08
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Expires: 2013-05-25
Abstract
Abstract The invention provides a radiation sensitive composition having a polymer binder of phenolic and cyclic alcohol units. At least a portion of the phenolic units and/or cyclic alcohol units of the polymer are bonded to acid labile groups. High solubility differentials between exposed and unexposed regions are realized with only moderate substitution of the binder with the acid labile groups.
Inventors
- 👤 Roger Sinta
- 👤 Richard C. Hemond
- 👤 David R. Medeiros
- 👤 Martha M. Rajaratnam
- 👤 James W. Thackeray
- 👤 Dianne Canistro
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 15:44
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/022; G03F7/023; G03F7/0233; G03F7/0045; G03F7/039; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/106; Y10S430/11
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
82 words
A photoresist composition comprising an admixture of a resin binder and a radiation sensitive component which generates acid upon exposure to activating radiation, the resin binder comprising a polymer having phenolic units and non-aromatic cyclic alcohol units, at least a portion of the hydroxyl groups of the polymer being bonded to acetate acid labile groups, and the radiation sensitive component being present in an amount capable of generating a latent image by exposure of a coating of the composition to activating radiation.
Claim 2
Dependent Claim
82 words
A photoresist composition comprising an admixture of a resin binder and a radiation sensitive component which generates acid upon exposure to activating radiation, the resin binder comprising a polymer having phenolic units and non-aromatic cyclic alcohol units, at least a portion of the hydroxyl groups of the polymer being bonded to acetate acid labile groups, and the radiation sensitive component being present in an amount capable of generating a latent image by exposure of a coating of the composition to activating radiation.
Claim 3
Dependent Claim
13 words
The composition of claim 1 further comprising one or more dissolution inhibitor compounds.
Claim 4
Dependent Claim
24 words
The composition of claim 2 where the dissolution inhibitor compounds comprise one or more compounds selected from the group consisting of t-butyloxycarbonato-bis-phenol-A and t-butylacetoxy-bis-phenol-A.
Claim 5
Dependent Claim
117 words
The composition of claim 1 where the acetate groups have the formula --CR 1 R 2 C(═O)--O--R 3 wherein R 1 and R 2 are independently selected from the group consisting of hydrogen, an electron withdrawing group, lower alkyl having from 1 to about 10 carbon atoms, and substituted lower alkyl having from 1 to about 10 carbon atoms; R 3 is selected from the group consisting of lower alkyl having from 1 to about 10 carbon atoms, substituted lower alkyl having from 1 to about 10 carbon atoms, aryl having from 6 to about 10 carbon atoms, substituted aryl having from 6 to about 10 carbon atoms, and benzyl having from 7 to 11 carbon atoms.
Claim 6
Dependent Claim
18 words
The composition of claim 4 where one or both of R 1 and R 2 are a halogen.
Claim 7
Dependent Claim
25 words
The composition of claim 1 where the polymer is a selected from the group consisting of a partially hydrogenated novolak and a partially hydrogenated poly(vinylphenol).
Claim 8
Dependent Claim
26 words
The composition of claim 1 where the concentration of non-aromatic cyclic alcohol units is about 50 mole percent or greater of the total of the polymer.
Claim 9
Dependent Claim
26 words
The composition of claim 1 where the concentration of non-aromatic cyclic alcohol units is about 60 mole percent or greater of the total of the polymer.
Claim 10
Dependent Claim
27 words
The composition of claim 1 where between about 5 and 35 percent of the total hydroxyl units of the polymer binder are bonded to acid labile groups.
Claim 11
Dependent Claim
30 words
The composition of claim 1 where acid generator compound is selected from the group consisting of o-quinone diazide sulfonic acid esters, non-ionic halogenated photogenerator compounds, onium salts, and sulfonated esters.
Claim 12
Dependent Claim
39 words
A process for forming a relief image comprising: (a) applying a coating layer of the photoresist composition of claim 1 on a substrate; (b) exposing and developing the photoresist coating layer on the substrate to yield a relief image.
Claim 13
Dependent Claim
80 words
A photoresist composition comprising an admixture of a resin binder and a radiation sensitive component which generates acid upon exposure to activating radiation, the resin binder comprising a polymer having phenolic units and non-aromatic cyclic alcohol units, at least a portion of the hydroxyl groups of the polymer being bonded to acid labile groups, and the radiation sensitive component being present in an amount capable generating a latent image by exposure of a coating of the composition to activating radiation.
Claim 14
Dependent Claim
80 words
A photoresist composition comprising an admixture of a resin binder and a radiation sensitive component which generates acid upon exposure to activating radiation, the resin binder comprising a polymer having phenolic units and non-aromatic cyclic alcohol units, at least a portion of the hydroxyl groups of the polymer being bonded to acid labile groups, and the radiation sensitive component being present in an amount capable generating a latent image by exposure of a coating of the composition to activating radiation.
Claim 15
Dependent Claim
13 words
The composition of claim 12 further comprising one or more dissolution inhibitor compounds.
Claim 16
Dependent Claim
24 words
The composition of claim 13 where the dissolution inhibtor compounds comprise one or more compounds selected from the group consisting of t-butyloxycarbonato-bis-phenol-A and t-butylacetoxy-bis-phenol-A.
Claim 17
Dependent Claim
25 words
The composition of claim 12 where the polymer is a selected from the group consisting of a partially hydrogenated novolak and a partially hydrogenated poly(vinylphenol).
Claim 18
Dependent Claim
26 words
The composition of claim 12 where the concentration of non-aromatic cyclic alcohol units is about 50 mole percent or greater of the total of the polymer.
Claim 19
Dependent Claim
26 words
The composition of claim 12 where the concentration of non-aromatic cyclic alcohol units is about 60 mole percent or greater of the total of the polymer.
Claim 20
Dependent Claim
30 words
The composition of claim 12 where acid generator compound is selected from the group consisting of o-quinone diazide sulfonic acid esters, non-ionic halogenated photogenerator compounds, onium salts, and sulfonated esters.
Claim 21
Dependent Claim
39 words
A process for forming a relief image comprising: (a) applying a coating layer of the photoresist composition of claim 12 on a substrate; (b) exposing and developing the photoresist coating layer on the substrate to yield a relief image.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1997-11-07 | 1998-05-09 | 1998-11-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-11-07 | 2002-05-09 | 2002-11-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-11-07 | 2006-05-09 | 2006-11-08 | $7700.00 | Window Closed / Lapsed |