Imaging method for manufacture of microdevices

Claim 1

A projection exposure apparatus for projecting an image of a pattern of an original onto a workpiece, said apparatus comprising: an X-Y stage for supporting thereon the workpiece and being movable along X and Y directions in an X-Y coordinate system defined in said apparatus; light source forming means capable of forming a plurality of light sources having different intensity distributions, said light source forming means forming a light source of the plurality of light sources having an intensity distribution such that the portions at a center thereof and on first and second axes defined to intersect with each other at the center and defined along the X and Y directions, respectively, are decreased in comparison with the portions of said light source other than the center portion and the portions along the first and second axes, wherein said light source forming means comprises a primary light source and a first optical integrator illuminated by light from said primary light source, and a second optical integrator illuminated by light from said first optical integrator; a condensing optical system for illuminating the pattern of the original with light from said light source; and a projection optical system for projecting on the workpiece an image of the pattern illuminated with the light from said light source, wherein said light source comprises four sections having substantially the same light intensity and being distributed in four quadrants defined by the center and the first and second axes, and wherein an image of said light source is projected onto a pupil of said projection optical system, and wherein, on the assumption of a coordinate system defined by X and Y axes extending along the first and second directions and intersecting at a center of the pupil, and that a radius of the pupil is 1, coordinates of centers of the images of the four sections are (p, p), (-p, p), (-p, -p) and (p, -p), wherein 0.25<p<0.6.

Claim 3

A method of manufacturing devices using a projection exposure apparatus for projecting an image of a circuit pattern of an original onto a workpiece to transfer the pattern, said method comprising: supporting the workpiece on an X-Y stage, which is movable along X and Y directions in an X-Y coordinate system defined in the apparatus; providing a light source forming device capable of forming a plurality of light sources having different intensity distributions; the light source forming device forming a light source of the plurality of light sources having an intensity distribution such that the portions at a center thereof and on first and second axes defined to intersect with each other at the center and defined along the X and Y directions, respectively, are decreased in comparison with the portions of the light source other than the center portion and the portions along the first and second axes, wherein the light source forming device comprises a primary light source and a first optical integrator illuminated by light from the primary light source, and a second optical integrator illuminated by light from the first optical integrator; illuminating the pattern of the original with light from the light source using a condensing optical system; and projecting on the workpiece an image of the pattern illuminated with the light from the light source using a projection optical system, wherein the light source comprises four sections having substantially the same light intensity and being distributed in four quadrants defined by the center and the first and second axes, and wherein an image of the light source is projected onto a pupil of the projection optical system, and wherein, on the assumption of a coordinate system defined by X and Y axes extending along the first and second directions and intersecting at a center of the pupil, and that a radius of the pupil is 1, coordinates of centers of the images of the four sections are (p, p), (-p, p), (-p, -p) and (p, -p), wherein 0.25<p<0.6.

Claim 4

A method of manufacturing devices using a projection exposure apparatus for projecting an image of a circuit pattern of an original onto a workpiece to transfer the pattern, said method comprising: supporting the workpiece on an X-Y stage, which is movable along X and Y directions in an X-Y coordinate system defined in the apparatus; providing a light source forming device capable of forming a plurality of light sources having different intensity distributions; the light source forming device forming a light source of the plurality of light sources having an intensity distribution such that the portions at a center thereof and on first and second axes defined to intersect with each other at the center and defined along the X and Y directions, respectively, are decreased in comparison with the portions of the light source other than the center portion and the portions along the first and second axes, wherein the light source forming device comprises a primary light source and a first optical integrator illuminated by light from the primary light source, and a second optical integrator illuminated by light from the first optical integrator; illuminating the pattern of the original with light from the light source using a condensing optical system; and projecting on the workpiece an image of the pattern illuminated with the light from the light source using a projection optical system, wherein the light source comprises four sections having substantially the same light intensity and being distributed in four quadrants defined by the center and the first and second axes, and wherein an image of the light source is projected onto a pupil of the projection optical system, and wherein, on the assumption of a coordinate system defined by X and Y axes extending along the first and second directions and intersecting at a center of the pupil, and that a radius of the pupil is 1, coordinates of centers of the images of the four sections are (p, p), (-p, p), (-p, -p) and (p, -p), wherein 0.25<p<0.6.