US5287142A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Projection exposure apparatus
Assignee: Renesas Electronics Corp
•
Filing: 1992-11-05
•
Granted: 1994-02-15
•
Expires: 2012-11-05
Abstract
Abstract A projection exposure apparatus for use in an LSI manufacturing process includes a light source for emitting incoherent light, a polyhedral prism for splitting the incoherent light from the light source into a plurality of rays of light, a condensing system for condensing the plurality of rays of light into overlapping rays illuminating a mask having a circuit pattern, and a projection lens system for condensing the light transmitted through the mask on the surface of a wafer.
Inventors
- 👤 Kazuya Kamon
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 19:13
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70058
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
74 words
A projection exposure apparatus comprising: an incoherent light source for emitting incoherent light; a polyhedral prism for splitting the incoherent light from said light source into a plurality of rays of light; a condensing lens system for condensing the plurality of rays of light into overlapping rays to illuminate a mask having a circuit pattern; and a projection lens system for condensing the light transmitted through said mask on the surface of a wafer.
Claim 2
Dependent Claim
74 words
A projection exposure apparatus comprising: an incoherent light source for emitting incoherent light; a polyhedral prism for splitting the incoherent light from said light source into a plurality of rays of light; a condensing lens system for condensing the plurality of rays of light into overlapping rays to illuminate a mask having a circuit pattern; and a projection lens system for condensing the light transmitted through said mask on the surface of a wafer.
Claim 3
Dependent Claim
31 words
A projection exposure apparatus as claimed in claim 1 wherein said polyhedral prism comprises a prism body having a surface and reflection preventing films on the surface of said prism body.
Claim 4
Dependent Claim
24 words
A projection exposure apparatus as claimed in claim 1 wherein said polyhedral prism includes a largest, principal plane directed toward said incoherent light source.
Claim 5
Dependent Claim
24 words
A projection exposure apparatus as claimed in claim 1 wherein said polyhedral prism includes a largest, principal plane directed toward said condensing lens system.
Claim 6
Dependent Claim
19 words
A projection exposure apparatus as claimed in claim 1 wherein said polyhedral prism includes fifty to sixty planar surfaces.
References Cited (Backward Citations)
US5144362A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1997-02-14 | 1997-08-16 | 1998-02-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2001-02-14 | 2001-08-16 | 2002-02-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2005-02-14 | 2005-08-16 | 2006-02-15 | $7700.00 | Window Closed / Lapsed |