US4645924A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Observation apparatus with selective light diffusion
Assignee: Canon Inc
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Filing: 1983-11-18
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Granted: 1987-02-24
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Expires: 2003-11-18
Abstract
Abstract An observation apparatus includes a laser beam source for producing a laser beam, a condensing optical system for constituting an optical path to condense the laser beam onto an object, a scanner for repeatedly scanning the object with the laser beam, an observation optical system for allowing an operator to observe the object, a photoreceptor for receiving the laser beam reflected by the object and producing an electric signal, a retractable refracting or diffusing optical element, across the condensing optical path, wherein the beam reflected by the object is detected by the photoreceptor when the object is scanned with the condensed laser beam, and the beam reflected by the object is observed through the observation optical system when the object is scanned with the diffused laser beam.
Inventors
- 👤 Akiyoshi Suzuki
- 👤 Hideki Ina
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 14:53
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70; G03F9/7065; G03F9/7069
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
77 words
An apparatus comprising: a light source for producing a laser beam; optical condensing means for constituting a condensing optical path to condense the laser beam onto an object; scanning means for deflecting the laser beam to scan the object therewith; means for observing the object; means for receiving the beam reflected by the object and producing an electric signal; and means for diffusing the laser beam before scanning when the object is observed through said observing means.
Claim 2
Independent Claim
77 words
An apparatus comprising: a light source for producing a laser beam; optical condensing means for constituting a condensing optical path to condense the laser beam onto an object; scanning means for deflecting the laser beam to scan the object therewith; means for observing the object; means for receiving the beam reflected by the object and producing an electric signal; and means for diffusing the laser beam before scanning when the object is observed through said observing means.
Claim 3
Independent Claim
79 words
An apparatus comprising: a light source for producing a laser beam; illumination means for constituting an illumination optical path to illuminate an object with the laser beam; scanning means for deflecting the laser beam to scan the object therewith; means for observing the object; and means for diffusing the laser beam before scanning when the object is observed through said observing means, which is mounted for movement substantially perpendicular to the illumination optical path into the illumination optical path.
Claim 4
Independent Claim
79 words
An apparatus comprising: a light source for producing a laser beam; illumination means for constituting an illumination optical path to illuminate an object with the laser beam; scanning means for deflecting the laser beam to scan the object therewith; means for observing the object; and means for diffusing the laser beam before scanning when the object is observed through said observing means, which is mounted for movement substantially perpendicular to the illumination optical path into the illumination optical path.
Claim 5
Independent Claim
75 words
An apparatus comprising: a light source for producing a laser beam; optical condensing means for constituting a condensing optical path to condense the laser beam onto an object; scanning means for deflecting the laser beam to scan the object therewith; means for observing the object; means for receiving the beam reflected by the object and producing an electric signal; and means for diffusing the laser beam when the object is observed through said observing means.
Claim 6
Independent Claim
75 words
An apparatus comprising: a light source for producing a laser beam; optical condensing means for constituting a condensing optical path to condense the laser beam onto an object; scanning means for deflecting the laser beam to scan the object therewith; means for observing the object; means for receiving the beam reflected by the object and producing an electric signal; and means for diffusing the laser beam when the object is observed through said observing means.
Claim 7
Dependent Claim
18 words
An apparatus according to claim 3, wherein said diffusing means is mounted for movement into the optical path.
Claim 8
Dependent Claim
13 words
An apparatus according to claim 4, wherein said diffusing means includes a lens.
Claim 9
Dependent Claim
14 words
An apparatus according to claim 4, wherein said diffusing means includes a diffusion plate.
Claim 10
Dependent Claim
23 words
An apparatus according to claim 6, wherein said diffusion plate is mounted for vibration in a direction generally perpendicular to the optical path.
Claim 11
Dependent Claim
23 words
An apparatus according to claim 7, wherein said diffusion plate is mounted for rotation about an axis generally parallel to the optical axis.
Claim 12
Dependent Claim
26 words
An apparatus according to claim 3, further comprising imaging means mounted in the optical path for bringing the object and another object into optically conjugate relation.
Claim 13
Dependent Claim
15 words
An apparatus according to claim 9, wherein said imaging means is a reduction projection lens.
Claim 14
Dependent Claim
27 words
An apparatus according to claim 9, wherein said diffusing means is mounted for insertion across the optical path when the object is observed through said observing means.
Claim 15
Independent Claim
77 words
An apparatus comprising: a light source for producing a laser beam; illumination means for constituting an illumination optical path to illuminate an object with the laser beam; scanning means for deflecting the laser beam to scan the object therewith; means for observing the object; and means for diffusing the laser beam when the object is observed through said observing means, which is mounted for movement substantially perpendicular to the illumination optical path into the illumination optical path.
Claim 16
Independent Claim
77 words
An apparatus comprising: a light source for producing a laser beam; illumination means for constituting an illumination optical path to illuminate an object with the laser beam; scanning means for deflecting the laser beam to scan the object therewith; means for observing the object; and means for diffusing the laser beam when the object is observed through said observing means, which is mounted for movement substantially perpendicular to the illumination optical path into the illumination optical path.
Claim 17
Dependent Claim
40 words
An apparatus according to claim 12, wherein said diffusing means is mounted for insertion into the illumination optical path when said observing means is operated and for retraction from the illumination optical path when said observing means is not operated.
Claim 18
Dependent Claim
26 words
An apparatus according to claim 12, further comprising imaging means mounted in the optical path for bringing the object and another object into optically conjugate relation.
Claim 19
Dependent Claim
15 words
An apparatus according to claim 12, wherein said diffusing means includes a refractive optical element.
Claim 20
Dependent Claim
14 words
An apparatus according to claim 12, wherein said diffusing means includes a diffusion plate.
Claim 21
Dependent Claim
23 words
An apparatus according to claim 16, wherein said diffusion plate is mounted for vibration in a direction generally perpendicular to the optical path.
Claim 22
Dependent Claim
23 words
An apparatus according to claim 16, wherein said diffusion plate is mounted for rotation about an axis generally parallel to the optical axis.
Claim 23
Dependent Claim
26 words
An apparatus according to claim 13, wherein said laser beam is condensed on the object, when said diffusing means is retracted from the illumination optical path.
Claim 24
Independent Claim
95 words
An apparatus comprising: a light source for producing a laser beam; illumination optical means for illuminating an object with the laser beam, said illumination optical means including at least one optical element movable along an optical axis between a first position to condense the laser beam on the object and a second position to illuminate the object with the laser beam which is diffused thereby: scanning means for scanning the object with the laser beam; means for observing the object; and means for receiving the beam reflected by the object and producing an electric signal.
Claim 25
Independent Claim
95 words
An apparatus comprising: a light source for producing a laser beam; illumination optical means for illuminating an object with the laser beam, said illumination optical means including at least one optical element movable along an optical axis between a first position to condense the laser beam on the object and a second position to illuminate the object with the laser beam which is diffused thereby: scanning means for scanning the object with the laser beam; means for observing the object; and means for receiving the beam reflected by the object and producing an electric signal.
Claim 26
Dependent Claim
26 words
An apparatus according to claim 20, further comprising imaging means mounted along the optical axis for bringing the object and another object into optically conjugate relation.
Claim 27
Dependent Claim
42 words
An apparatus according to claim 20, wherein said optical element is mounted to be placed at its first position when said beam receiving means is operated, and is mounted to be placed at its second position when said observing means is operated.
Claim 28
Independent Claim
58 words
A method comprising: producing a laser beam; constituting a condensing optical path to condense the laser beam onto an object; deflecting the laser beam to scan the object therewith; observing the object; receiving the beam reflected by the object and producing an electric signal; and diffusing the laser beam before the deflection step when the object is observed.
Claim 29
Independent Claim
58 words
A method comprising: producing a laser beam; constituting a condensing optical path to condense the laser beam onto an object; deflecting the laser beam to scan the object therewith; observing the object; receiving the beam reflected by the object and producing an electric signal; and diffusing the laser beam before the deflection step when the object is observed.
Claim 30
Independent Claim
54 words
A method comprising: producing a laser beam; constituting a condensing optical path to condense the laser beam onto an object; deflecting the laser beam to scan the object therewith; observing the object; receiving the beam reflected by the object and producing an electric signal; and diffusing the laser beam when the object is observed.
Claim 31
Independent Claim
54 words
A method comprising: producing a laser beam; constituting a condensing optical path to condense the laser beam onto an object; deflecting the laser beam to scan the object therewith; observing the object; receiving the beam reflected by the object and producing an electric signal; and diffusing the laser beam when the object is observed.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-02-23 | 1990-08-25 | 1991-02-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-02-23 | 1994-08-25 | 1995-02-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-02-23 | 1998-08-25 | 1999-02-24 | $7700.00 | Window Closed / Lapsed |