US4266876A
Expired / Lapsed
US
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Automatic alignment apparatus
Assignee: Nikon Corp
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Filing: 1978-03-29
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Granted: 1981-05-12
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Expires: 1998-03-29
Abstract
Abstract An alignment apparatus for bringing two objects, each having at least one reference mark, into a predetermined positional relation is disclosed in which the two objects are scanned by a beam of light emitted from a coherent light source, the light coming from the reference marks is received and converted into electrical signals by means of which the amount of deviation between the two objects is detected and the two objects are adjusted to the predetermined positional relation. Repetitively swept light from the light source is divided into two parts which scan the reference marks at different times and along different directions.
Inventors
- 👤 Kiwao Nakazawa
- 👤 Akikazu Tanimoto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 05:11
CPC Classifications
G; G03; G03F; G03F9/00; G03F9/70
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
332 words
An apparatus for determining the positional relationship between two objects, comprising a reference mark on each object, each reference mark having first and second parallel portions and having third and fourth parallel portions, the first, second, third and fourth portions being arranged such that the first and second portions on one object are spaced a predetermined distance from corresponding first and second portions on the other object and the third and fourth portions of one object are spaced a predetermined distance from corresponding third and fourth portions on the other object when the two objects are in a predetermined positional relationship, means for scanning a beam of light past the first and second portions in a first direction, means for thereafter scanning a beam of light past the third and fourth portions in a second direction different from the first direction, means for converting light received from each of the portions during each scan to corresponding electrical signals, and means responsive to the electrical signals for separately determining the relative positions of the two objects in the first and second scan directions, the determining means comprising pulse generating means for producing first, second, third and fourth pulse trains corresponding, respectively, to a first time interval between the electrical signals produced by light received from said first portions, a second time interval between the electrical signals produced by light received from said second portions, a third time interval between the electrical signals produced by light received from said third portions and a fourth time interval between the electrical signals produced by light received from said fourth portions, reversible counter means for counting the first pulse train in one direction and for counting the second pulse train in the opposite direction to determine the difference between the first and second time intervals and for counting the third pulse train in one direction and for counting the fourth pulse train in the opposite direction to determine the difference between the third and fourth time intervals.
Claim 2
Independent Claim
332 words
An apparatus for determining the positional relationship between two objects, comprising a reference mark on each object, each reference mark having first and second parallel portions and having third and fourth parallel portions, the first, second, third and fourth portions being arranged such that the first and second portions on one object are spaced a predetermined distance from corresponding first and second portions on the other object and the third and fourth portions of one object are spaced a predetermined distance from corresponding third and fourth portions on the other object when the two objects are in a predetermined positional relationship, means for scanning a beam of light past the first and second portions in a first direction, means for thereafter scanning a beam of light past the third and fourth portions in a second direction different from the first direction, means for converting light received from each of the portions during each scan to corresponding electrical signals, and means responsive to the electrical signals for separately determining the relative positions of the two objects in the first and second scan directions, the determining means comprising pulse generating means for producing first, second, third and fourth pulse trains corresponding, respectively, to a first time interval between the electrical signals produced by light received from said first portions, a second time interval between the electrical signals produced by light received from said second portions, a third time interval between the electrical signals produced by light received from said third portions and a fourth time interval between the electrical signals produced by light received from said fourth portions, reversible counter means for counting the first pulse train in one direction and for counting the second pulse train in the opposite direction to determine the difference between the first and second time intervals and for counting the third pulse train in one direction and for counting the fourth pulse train in the opposite direction to determine the difference between the third and fourth time intervals.
Claim 3
Dependent Claim
36 words
The apparatus of claim 1 further comprising means for moving the position of one object with respect to the other to position the objects in said predetermined positional relationship, the determining means controlling said moving means.
Claim 4
Dependent Claim
11 words
The apparatus of claim 1, wherein the reference marks are quadrilateral.
Claim 5
Dependent Claim
96 words
The apparatus of claim 1 wherein the determining means comprises means for generating synchronizing signals in response to said scanning, a first latch circuit connected to the reversible counter means, and a second latch circuit connected to the reversible counter means, the synchronizing signals operable to clear said counter means and to control the first and second latch circuits to store the contents of the counter means when the contents of said counter means correspond to the difference between the first and second time intervals and the difference between the third and fourth time intervals, respectively.
Claim 6
Dependent Claim
65 words
The apparatus of claim 1, wherein said means for scanning in said first direction and said means for scanning in said second direction comprises means for sweeping the beam repetitively, and means for dividing the swept beam into first and second parts, the first part being employed to scan in said first direction and the second part being employed to scan in said second direction.
Claim 7
Dependent Claim
37 words
The apparatus of claim 5, wherein said means for scanning in said first direction and said means for scanning in said second direction further comprises means for alternately blocking the light from said first and second parts.
Claim 8
Dependent Claim
11 words
The apparatus of claim 1, wherein the scanning directions are orthogonal.
Claim 9
Dependent Claim
35 words
The apparatus of claim 1, wherein substantially all of the light from a single beam is first utilized in scan in the first direction and is then utilized in a scan in the second direction.
Claim 10
Dependent Claim
38 words
The apparatus of claim 1, including means for directing said light along a first path during the scan in the first direction and for directing said light along a second path during the scan in the second direction.
Claim 11
Dependent Claim
16 words
The apparatus of claim 9, wherein an image rotator is interposed in one of said paths.
Claim 12
Dependent Claim
30 words
The apparatus of claim 1, wherein when the two objects have a predetermined positional relationship, the reference mark of one object fits within the reference mark of the other object.
Claim 13
Dependent Claim
23 words
The apparatus of claim 11, wherein the reference mark of one object and the reference mark of said other object have similar shapes.
Claim 14
Dependent Claim
36 words
The apparatus of claim 12, wherein when the two objects have said predetermined positional relationship, second reference marks on each object have a relationship to one another similar to the relationship between the first-mentioned reference marks.
Claim 15
Dependent Claim
18 words
The apparatus of claim 13, wherein said second reference marks have similar shapes to the first-mentioned reference marks.
Claim 16
Dependent Claim
15 words
The apparatus of claim 1, wherein each light beam is scanned at a uniform rate.
Claim 17
Dependent Claim
20 words
The apparatus of claim 1, wherein the means for converting comprises photoelectric means for receiving light scattered from said portions.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1984-05-11 | 1984-11-10 | 1985-05-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1988-05-11 | 1988-11-10 | 1989-05-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1992-05-11 | 1992-11-10 | 1993-05-12 | $7700.00 | Window Closed / Lapsed |