Method and apparatus for reduction-projection type mask alignment

Claim 2

A mask alignment apparatus of reduction-projection type, comprising: a mask table carrying a mask having an alignment pattern and a circuit pattern formed thereon, said mask table being finely rotatable and movable in two directions along X and Y orthogonal axes; a wafer table for carrying a wafer, having an alignment pattern thereon, disposed at a distance from said mask, said wafer table being finely rotatable and movable in step and repeat movement at a predetermined pitch in two directions of the X and Y axes; a reduction-projection lens interposed between said mask and said wafer so that an image of said circuit pattern is projected onto the chips of said wafer through said lens; means for illuminating said alignment patterns of said mask and said wafer by a light having the same wavelength as an exposure light; displacement detecting means for detecting the relative displacement between both images of said alignment patterns inversely projected through said lens; first alignment means for moving said wafer table in a selected one of the directions of said X and Y axes by a distance between at least two remote chips and rotating said wafer table in accordance with at least two relative displacements obtained from said displacement detecting means thereby to cause the direction of step and repeat movement of said wafer table along the selected one of said X and Y axes to coincide with the direction of arrangement of said chips of said wafer; second alignment means for moving said mask table at least in the two directions of said X and Y axes in accordance with the relative displacement between said predetermined alignment patterns obtained from said displacement detecting means thereby to align said mask and said wafer with each other; at least microscope means for detecting the relative displacement between reference patterns disposed at a predetermined position and respective mask alignment patterns formed at least on both side portions of said mask; and means for rotating said mask table so as to eliminate the difference between both said relative displacements thereby to align said mask in the directions of said X and Y axes.

Claim 3

A mask alignment apparatus according to claim 1, wherein said illumination means comprises: means for illuminating by said exposure light said circuit pattern and said alignment patterns formed on said mask from the opposite side of said mask to said lens; and diaphragm means disposed in the vicinity of said mask and including an opaque base plate of the size corresponding to said circuit pattern region and a transparent window of the size corresponding to said alignment patterns, said diaphragm means being transferred in a light path of said illumination means during alignment operation and transferred out of said light path during an exposure operation.

Claim 4

A mask alignment apparatus according to claim 1, wherein said illumination means comprises spot-lighting means for illuminating only the alignment pattern regions of said mask during the alignment operation.

Claim 5

A mask alignment apparatus according to claim 1, wherein said displacement detecting means comprises slits scanned, and a plurality of photoelectric elements for detecting optical images passing through said slits.

Claim 6

A mask alignment apparatus according to claim 1, wherein said displacement detecting means comprises a semi-transparent mirror disposed above said mask on its opposite side to said lens, and an objective lens for forming the image of said alignment patterns formed on said mask and said wafer.

Claim 7

A projection type alignment apparatus comprising: (a) a mask table for carrying a mask having at least a pair of mask-positioning patterns spaced by a distance on the marginal parts thereof, an alignment pattern and a circuit pattern formed thereon, said mask table being arranged to rotate said mask in a horizontal plane as well as move said mask in the two directions of respective orthogonal X and Y axes; (b) a wafer table carrying a wafer having an alignment pattern disposed thereon, said waver being disposed at a distance in parallel to said mask, said wafer table being movable in step and repeat movement at a predetermined pitch in at least the two directions of said X and Y axes; (c) a projection lens interposed between said mask and said wafer so that a reduced image of said circuit pattern may be projected therethrough onto a chip of said wafer; (d) mask positioning means for positioning said mask with respect to absolute co-ordinates constituting said X and Y axes by optically superimposing said pair of mask-positioning patterns onto at least a pair of reference patterns disposed at predetermined positions of said absolute co-ordinates, including means to detect the respective amounts of relative displacement therebetween and means for rotating and moving said mask table in the two directions of said X and Y axes so as to eliminate said amounts of relative displacement; (e) illuminating means for illuminating only a region of said alignment pattern of said wafer with light defined by a field diaphragm through a region of the alignment pattern of said mask which is relatively and roughly aligned with said wafer by said mask-positioning means said light having the same wavelength as an exposure light; (f) displacement detecting means for detecting the amount of relative displacement between said alignment patterns by forming a reflection image which is derived from superposition of said alignment patterns through said projection lens; and (g) means for making a fine alignment between said mask and wafer in accordance with the amount of relative displacement outputted from said displacement detecting means by moving said wafer table at a predetermined pitch in step and repeat movement thereby to finely and relatively rotate and move said mask and wafer in the two directions of said X and Y axes.

Claim 8

A projection type alignment apparatus comprising: (a) a mask table for carrying a mask having at least a pair of mask-positioning patterns spaced by a distance on the marginal parts thereof, an alignment pattern and a circuit pattern formed thereon, said mask table being arranged to rotate said mask in a horizontal plane as well as move said mask in the two directions of respective orthogonal X and Y axes; (b) a wafer table carrying a wafer having an alignment pattern disposed thereon, said waver being disposed at a distance in parallel to said mask, said wafer table being movable in step and repeat movement at a predetermined pitch in at least the two directions of said X and Y axes; (c) a projection lens interposed between said mask and said wafer so that a reduced image of said circuit pattern may be projected therethrough onto a chip of said wafer; (d) mask positioning means for positioning said mask with respect to absolute co-ordinates constituting said X and Y axes by optically superimposing said pair of mask-positioning patterns onto at least a pair of reference patterns disposed at predetermined positions of said absolute co-ordinates, including means to detect the respective amounts of relative displacement therebetween and means for rotating and moving said mask table in the two directions of said X and Y axes so as to eliminate said amounts of relative displacement; (e) illuminating means for illuminating only a region of said alignment pattern of said wafer with light defined by a field diaphragm through a region of the alignment pattern of said mask which is relatively and roughly aligned with said wafer by said mask-positioning means said light having the same wavelength as an exposure light; (f) displacement detecting means for detecting the amount of relative displacement between said alignment patterns by forming a reflection image which is derived from superposition of said alignment patterns through said projection lens; and (g) means for making a fine alignment between said mask and wafer in accordance with the amount of relative displacement outputted from said displacement detecting means by moving said wafer table at a predetermined pitch in step and repeat movement thereby to finely and relatively rotate and move said mask and wafer in the two directions of said X and Y axes.

Claim 9

A projection type alignment apparatus according to claim 6, wherein said mask-positioning means comprises a pair of microscopes and said reference pattern is disposed in each of said microscopes and used as a reference of said absolute co-ordinates.

Claim 10

A projection type alignment apparatus according to claim 6, wherein said fine alignment between said mask and wafer in two directions of said X and Y axes is made by finely moving said mask table in two directions of said X and Y axes in accordance with an amount of relative displacement in two direction of said X and Y axes which is outputted from said displacement detecting means.

Claim 11

A projection type alignment apparatus according to claim 6, wherein said fine alignment between said mask and wafer in rotational direction is made by finely rotating said wafer table in accordance with an amount of relative displacement in said rotational direction which is outputted from said displacement detecting means.