High resolution projection means for printing micro circuits on photoresist material

Claim 1

Monochromatic ultraviolet projection means for high resolution printing on photoresist material comprising a sheet of photoresist material having a predetermined sensitivity curve and responsive to ultraviolet radiation; a nonmonochromatic source of coherent radiation exhibiting one or several sharp peaks of emission in the ultraviolEt spectrum adapted to transmit along an axis; a narrow band pass filter comprising a block of quartz with dielectric layers mounted on said axis adapted to pass a narrow band of light centered about one of the peaks of emission in the ultraviolet spectrum, which also falls within the sensitivity curve of said photoresist material; a quartz condenser lens mounted on said axis below said band pass filter; a quartz plate mounted on said axis below said condenser lens, said plate being adapted to mount the image to be projected; a quartz objective lens mounted on said axis below said plate; and said photoresist material being mounted on said axis at the focal point of said quartz objective lens.