US6072323A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Temporary package, and method system for testing semiconductor dice having backside electrodes
Assignee: Micron Technology Inc
•
Filing: 1997-03-03
•
Granted: 2000-06-06
•
Expires: 2017-03-03
Abstract
Abstract A temporary package, a method, and a system for testing a semiconductor die having a backside electrode are provided. The temporary package includes a base for retaining the die; a conductive member for electrically contacting the backside electrode on the die; and terminal contacts in electrical communication with the conductive member. The package also includes a force applying mechanism for biasing the conductive member against the backside electrode. A conductive path between the conductive member and terminal contacts can be through a wire, or through the force applying mechanism. In an alternate embodiment the temporary package includes a base and terminal contacts formed in the configuration of a conventional semiconductor package. A cover for the base can include a metal, carbon filled elastomer, conductive foam, or conductive adhesive conductive member. The conductive member can be adapted to simultaneously contact the backside electrode on the die, and a mating contact on the base in electrical communication with the terminal contact. In addition, the conductive member can function as a heat sink for cooling the die during the test procedures.
Inventors
- 👤 David R. Hembree
- 👤 Salman Akram
- 👤 Warren M. Farnworth
- 👤 James M. Wark
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 13:25
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/2851; G01R31/2886
Claims Analysis
Total Claims: 41
Claim 1
Independent Claim
124 words
A temporary package for testing a semiconductor die having a circuit side with a plurality of first contacts thereon, and a backside with a backside electrode thereon, comprising: a base for retaining the die comprising a contact configured for electrical communication with test circuitry; an interconnect on the base comprising a plurality of second contacts configured to electrically contact the first contacts on the circuit side of the die and configured for electrical communication with the test circuitry; a spring member on the base configured to apply a biasing force for biasing the die and the interconnect together; and a conductive member on the base configured to electrically contact the backside electrode and the contact on the base and form an electrical path therebetween.
Claim 2
Dependent Claim
124 words
A temporary package for testing a semiconductor die having a circuit side with a plurality of first contacts thereon, and a backside with a backside electrode thereon, comprising: a base for retaining the die comprising a contact configured for electrical communication with test circuitry; an interconnect on the base comprising a plurality of second contacts configured to electrically contact the first contacts on the circuit side of the die and configured for electrical communication with the test circuitry; a spring member on the base configured to apply a biasing force for biasing the die and the interconnect together; and a conductive member on the base configured to electrically contact the backside electrode and the contact on the base and form an electrical path therebetween.
Claim 3
Dependent Claim
12 words
The package of claim 1 wherein the conductive member comprises a metal.
Claim 4
Dependent Claim
13 words
The package of claim 1 wherein the conductive member comprises a conductive adhesive.
Claim 5
Dependent Claim
15 words
The package of claim 1 wherein the conductive member comprises a carbon filled elastomeric material.
Claim 6
Dependent Claim
126 words
A temporary package for testing a semiconductor die having a circuit side with a plurality of first contacts thereon, and a backside with a backside electrode thereon, comprising: a base comprising a plurality of terminal contacts configured for electrical communication with test circuitry and a contact pad in electrical communication with a selected terminal contact; an interconnect on the base comprising a plurality of second contacts configured to electrically contact the first contacts on the circuit side of the die, the second contacts in electrical communication with selected terminal contacts on the base; and a conductive member on the base configured to electrically contact the backside electrode on the backside of the die and the contact pad on the base and form an electrical path therebetween.
Claim 7
Dependent Claim
126 words
A temporary package for testing a semiconductor die having a circuit side with a plurality of first contacts thereon, and a backside with a backside electrode thereon, comprising: a base comprising a plurality of terminal contacts configured for electrical communication with test circuitry and a contact pad in electrical communication with a selected terminal contact; an interconnect on the base comprising a plurality of second contacts configured to electrically contact the first contacts on the circuit side of the die, the second contacts in electrical communication with selected terminal contacts on the base; and a conductive member on the base configured to electrically contact the backside electrode on the backside of the die and the contact pad on the base and form an electrical path therebetween.
Claim 8
Dependent Claim
39 words
The package of claim 5 further comprising a cover attachable to the base and a spring member between the cover and the die configured to bias the conductive member against the backside electrode and the die against the interconnect.
Claim 9
Dependent Claim
23 words
The package of claim 5 further comprising a cover attachable to the base and the conductive member comprises a layer on the cover.
Claim 10
Dependent Claim
27 words
The package of claim 5 wherein the conductive member comprises an element selected from the group consisting of metal, conductive adhesive, conductive foam, and carbon filled elastomer.
Claim 11
Dependent Claim
132 words
A temporary package for testing a semiconductor die having a circuit side with first contacts thereon and a backside with a backside electrode thereon comprising: a base for retaining the die comprising a plurality of terminal contacts configured for electrical connection to a test apparatus and a contact in electrical communication with a selected terminal contact; an interconnect on the base comprising a plurality of second contacts configured to establish electrical communication between the first contacts on the circuit side of the die and selected terminal contacts on the base; a cover attachable to the base; and a conductive member between the cover and the base configured to electrically contact the backside electrode and the contact on the base and provide an electrical path between the contact and the selected terminal contact.
Claim 12
Dependent Claim
132 words
A temporary package for testing a semiconductor die having a circuit side with first contacts thereon and a backside with a backside electrode thereon comprising: a base for retaining the die comprising a plurality of terminal contacts configured for electrical connection to a test apparatus and a contact in electrical communication with a selected terminal contact; an interconnect on the base comprising a plurality of second contacts configured to establish electrical communication between the first contacts on the circuit side of the die and selected terminal contacts on the base; a cover attachable to the base; and a conductive member between the cover and the base configured to electrically contact the backside electrode and the contact on the base and provide an electrical path between the contact and the selected terminal contact.
Claim 13
Dependent Claim
23 words
The package of claim 9 further comprising a compressible spring member on the cover for biasing the conductive member against the backside electrode.
Claim 14
Dependent Claim
21 words
The temporary package of claim 9 wherein the base and the terminal contacts have a configuration of a conventional semiconductor package.
Claim 15
Dependent Claim
106 words
A temporary package for testing a semiconductor die having a circuit side with a plurality of first contacts thereon and a backside electrode with a backside electrode thereon comprising: a base comprising a plurality of terminal contacts electrically connectable to test circuitry and a contact in electrical communication with a selected terminal contact; an interconnect on the base comprising a plurality of second contacts in electrical communication with selected terminal contacts and configured to electrically contact the first contacts on the die; and a backside connection mechanism on the base configured to electrically contact the backside electrode and the contact and form an electrical path therebetween.
Claim 16
Dependent Claim
106 words
A temporary package for testing a semiconductor die having a circuit side with a plurality of first contacts thereon and a backside electrode with a backside electrode thereon comprising: a base comprising a plurality of terminal contacts electrically connectable to test circuitry and a contact in electrical communication with a selected terminal contact; an interconnect on the base comprising a plurality of second contacts in electrical communication with selected terminal contacts and configured to electrically contact the first contacts on the die; and a backside connection mechanism on the base configured to electrically contact the backside electrode and the contact and form an electrical path therebetween.
Claim 17
Dependent Claim
24 words
The package of claim 12 wherein the backside connection mechanism comprises a cover attachable to the base and a conductive member on the cover.
Claim 18
Dependent Claim
28 words
The package of claim 13 further comprising a spring member between the cover and the backside connection mechanism configured to bias the backside connection mechanism against the contact.
Claim 19
Independent Claim
155 words
A method for testing a semiconductor die having a first side with a plurality of first contacts thereon and a second side with a backside electrode thereon comprising: providing a temporary package for the die comprising a plurality of terminal contacts configured for electrical communication with test circuitry, an interconnect comprising a plurality of second contacts in electrical communication with selected terminal contacts configured to electrically contact the first contacts on the first side of the die, and a backside connection mechanism in electrical communication with a selected terminal contact configured to electrically contact the backside electrode and provide an electrical path from the selected terminal contact to the backside electrode; and applying test signals through the selected terminal contacts and the second contacts on the interconnect to the first contacts on the die; and applying test signals through the selected terminal contact and the backside connection mechanism to the backside electrode on the die.
Claim 20
Independent Claim
155 words
A method for testing a semiconductor die having a first side with a plurality of first contacts thereon and a second side with a backside electrode thereon comprising: providing a temporary package for the die comprising a plurality of terminal contacts configured for electrical communication with test circuitry, an interconnect comprising a plurality of second contacts in electrical communication with selected terminal contacts configured to electrically contact the first contacts on the first side of the die, and a backside connection mechanism in electrical communication with a selected terminal contact configured to electrically contact the backside electrode and provide an electrical path from the selected terminal contact to the backside electrode; and applying test signals through the selected terminal contacts and the second contacts on the interconnect to the first contacts on the die; and applying test signals through the selected terminal contact and the backside connection mechanism to the backside electrode on the die.
Claim 21
Dependent Claim
31 words
The method of claim 15 wherein the backside connection mechanism comprises a contact on the temporary package and a conductive member configured to electrically contact the backside electrode and the contact.
Claim 22
Dependent Claim
27 words
The method of claim 16 wherein the conductive member comprises a material selected from the group consisting of metal, conductive elastomers, carbon filled elastomers, and conductive foam.
Claim 23
Dependent Claim
24 words
The method of claim 17 wherein the temporary package further comprises a force applying mechanism for biasing the conductive member against the backside electrode.
Claim 24
Dependent Claim
16 words
The method of claim 18 wherein the force applying mechanism comprises a cover and a spring.
Claim 25
Independent Claim
202 words
A method for testing a semiconductor die having a first side with a purality of first contacts thereon and a second side with a backside electrode thereon comprising: providing a test circuitry configured to generate test signals; providing a temporary package for the die comprising a base for retaining the die, a plurality of terminal contacts on the base configured for electrical communication with the test circuitry, a contact on the base in electrical communication with a selected terminal contact, an interconnect on the base comprising a plurality of second contacts in electrical communication with selected terminal contacts configured to electrically contact the first contacts on the die, and a conductive member on the base in electrical communication with the selected terminal contact configured to electrically engage and provide an electrical path to the contact on the base; assembling the die in the package with the conductive member electrically engaging the backside electrode and the contact on the base; placing the terminal contacts in electrical communication with the test circuitry; and applying test signals through the terminal contacts on the base, the second contacts on the interconnect, and the conductive member to the first contacts and the backside electrode on the die.
Claim 26
Independent Claim
202 words
A method for testing a semiconductor die having a first side with a purality of first contacts thereon and a second side with a backside electrode thereon comprising: providing a test circuitry configured to generate test signals; providing a temporary package for the die comprising a base for retaining the die, a plurality of terminal contacts on the base configured for electrical communication with the test circuitry, a contact on the base in electrical communication with a selected terminal contact, an interconnect on the base comprising a plurality of second contacts in electrical communication with selected terminal contacts configured to electrically contact the first contacts on the die, and a conductive member on the base in electrical communication with the selected terminal contact configured to electrically engage and provide an electrical path to the contact on the base; assembling the die in the package with the conductive member electrically engaging the backside electrode and the contact on the base; placing the terminal contacts in electrical communication with the test circuitry; and applying test signals through the terminal contacts on the base, the second contacts on the interconnect, and the conductive member to the first contacts and the backside electrode on the die.
Claim 27
Dependent Claim
18 words
The method of claim 20 wherein the conductive member comprises a metal plate wired to the terminal contact.
Claim 28
Dependent Claim
23 words
The method of claim 20 wherein the temporary package comprises a force applying mechanism for biasing the conductive member against the backside electrode.
Claim 29
Dependent Claim
21 words
The method of claim 20 further comprising providing a burn-in board for the package in electrical communication with the test circuitry.
Claim 30
Independent Claim
156 words
A method for testing a semiconductor die having a first side with a plurality of first contacts thereon and a second opposing side with a backside electrode thereon comprising: providing a testing apparatus configured to apply test signals to the die; providing a temporary package for containing and electrically connecting the die to the testing apparatus, the package comprising an interconnect comprising a plurality of second contacts for electrically contacting the first contacts on the die, a backside connection mechanism for electrically contacting the backside electrode, and a plurality of terminal contacts in electrical communication with the backside connection mechanism and with the second contacts on the interconnect; assembling the die in the temporary package; placing the terminal contacts in electrical communication with the testing apparatus; and applying test signals through the terminal contacts through the second contacts, and through the backside connection mechanism to the first contacts and to the backside electrode on the die.
Claim 31
Independent Claim
156 words
A method for testing a semiconductor die having a first side with a plurality of first contacts thereon and a second opposing side with a backside electrode thereon comprising: providing a testing apparatus configured to apply test signals to the die; providing a temporary package for containing and electrically connecting the die to the testing apparatus, the package comprising an interconnect comprising a plurality of second contacts for electrically contacting the first contacts on the die, a backside connection mechanism for electrically contacting the backside electrode, and a plurality of terminal contacts in electrical communication with the backside connection mechanism and with the second contacts on the interconnect; assembling the die in the temporary package; placing the terminal contacts in electrical communication with the testing apparatus; and applying test signals through the terminal contacts through the second contacts, and through the backside connection mechanism to the first contacts and to the backside electrode on the die.
Claim 32
Dependent Claim
22 words
The method of claim 24 wherein the backside connection mechanism comprises a conductive member formed on a cover of the temporary package.
Claim 33
Dependent Claim
11 words
The method of claim 25 wherein the conductive member comprises metal.
Claim 34
Dependent Claim
29 words
The method as claimed in claim 25 wherein the conductive member comprises a material selected from the group consisting of metal, conductive elastomers, carbon filled elastomers, and conductive foam.
Claim 35
Independent Claim
140 words
A system for testing a semiconductor die having a first side with a plurality of first contacts thereon and a second side with a backside electrode thereon comprising: a testing apparatus in electrical communication with test circuitry configured to apply test signals to the die; and a temporary package for the die comprising a base for retaining the die; plurality of terminal contacts on the base, a contact on the base in electrical communication with a selected terminal contact, an interconnect on the base comprising a plurality of second contacts in electrical communication with selected terminal contacts and configured to electrically contact the first contacts on the die, a conductive member configured to electrically contact the contact and the backside electrode to provide a conductive path therebetween, a spring member configured to bias the conductive member against the backside electrode.
Claim 36
Independent Claim
140 words
A system for testing a semiconductor die having a first side with a plurality of first contacts thereon and a second side with a backside electrode thereon comprising: a testing apparatus in electrical communication with test circuitry configured to apply test signals to the die; and a temporary package for the die comprising a base for retaining the die; plurality of terminal contacts on the base, a contact on the base in electrical communication with a selected terminal contact, an interconnect on the base comprising a plurality of second contacts in electrical communication with selected terminal contacts and configured to electrically contact the first contacts on the die, a conductive member configured to electrically contact the contact and the backside electrode to provide a conductive path therebetween, a spring member configured to bias the conductive member against the backside electrode.
Claim 37
Dependent Claim
13 words
The system of claim 28 wherein the conductive member comprises a metal plate.
Claim 38
Dependent Claim
13 words
The system of claim 28 wherein the conductive member comprises a conductive adhesive.
Claim 39
Independent Claim
143 words
A system for testing a semiconductor die having a first side with a Plurality of first contacts thereon and a second side with a backside electrode thereon comprising: a testing apparatus in electrical communication with test circuitry configured to apply test signals to the die; and a temporary package for establishing electrical communication between the die and the test circuitry, the package comprising: a base for retaining the die comprising a plurality of terminal contacts configured for electrical communication with the test circuitry and a contact in electrical communication with a selected terminal contact; an interconnect on the base comprising a plurality of second contacts in electrical communication with selected terminal contacts and configured to electrically contact the first contacts on the die; and a conductive member on the base configured to electrically contact the backside electrode and the contact on the base.
Claim 40
Independent Claim
143 words
A system for testing a semiconductor die having a first side with a Plurality of first contacts thereon and a second side with a backside electrode thereon comprising: a testing apparatus in electrical communication with test circuitry configured to apply test signals to the die; and a temporary package for establishing electrical communication between the die and the test circuitry, the package comprising: a base for retaining the die comprising a plurality of terminal contacts configured for electrical communication with the test circuitry and a contact in electrical communication with a selected terminal contact; an interconnect on the base comprising a plurality of second contacts in electrical communication with selected terminal contacts and configured to electrically contact the first contacts on the die; and a conductive member on the base configured to electrically contact the backside electrode and the contact on the base.
Claim 41
Dependent Claim
27 words
The system of claim 31 wherein the conductive member comprises an element selected from the group consisting of metal, conductive adhesive, conductive foam, and carbon filled elastomer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-06-06 | 2003-12-06 | 2004-06-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-06-06 | 2007-12-06 | 2008-06-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-06-06 | 2011-12-06 | 2012-06-06 | $7700.00 | Window Closed / Lapsed |