Field-effect transistor with a trench isolation structure and a method for manufacturing the same

Claim 1

A method of stabilizing a thickness of a gate insulation film in a field-effect transistor having a trench isolation structure, comprising the steps of: forming a masking film on a surface of a substrate; etching a trench into the substrate using the masking film as a mask; forming an impurity region in sidewalls of the trench by implanting an impurity that is one of argon, boron, phosphorus, and silicon directly into the sidewalls of the trench; removing the masking film; filling the trench with an insulator; forming a gate insulation film on the substrate; and migrating the impurity in the sidewalls of the trench into the gate insulation film adjacent to the sidewalls of the trench, thereby relatively stabilizing a thickness of the gate insulation film adjacent to the sidewalls of the trench to be generally no less than a thickness of the gate insulation film not adjacent to the sidewalls of the trench, the step of forming the impurity region comprising the step of selecting an implant dose of the impurity so that the thickness of the gate insulation layer adjacent to the sidewalls of the trench is no greater than 115% of the thickness of the gate insulation layer not adjacent to the sidewalls of the trench.

Claim 2

A method of stabilizing a thickness of a gate insulation film in a field-effect transistor having a trench isolation structure, comprising the steps of: forming a masking film on a surface of a substrate; etching a trench into the substrate using the masking film as a mask; forming an impurity region in sidewalls of the trench by implanting an impurity that is one of argon, boron, phosphorus, and silicon directly into the sidewalls of the trench; removing the masking film; filling the trench with an insulator; forming a gate insulation film on the substrate; and migrating the impurity in the sidewalls of the trench into the gate insulation film adjacent to the sidewalls of the trench, thereby relatively stabilizing a thickness of the gate insulation film adjacent to the sidewalls of the trench to be generally no less than a thickness of the gate insulation film not adjacent to the sidewalls of the trench, the step of forming the impurity region comprising the step of selecting an implant dose of the impurity so that the thickness of the gate insulation layer adjacent to the sidewalls of the trench is no greater than 115% of the thickness of the gate insulation layer not adjacent to the sidewalls of the trench.

Claim 5

A method of stabilizing a thickness of a gate insulation film in a field-effect transistor having a trench isolation structure, comprising the steps of: forming a masking film on a surface of a substrate; etching a trench into the substrate using the masking film as a mask; removing the masking film; filling the trench with an insulator so that a portion of the insulator extends above the surface of the substrate; forming sidewalls at sides of the insulator that extend above the surface of the substrate; forming an impurity region in the surface of the substrate by implanting nitrogen into the surface of the substrate, the sidewalls preventing nitrogen implantation adjacent to the insulator; removing the sidewalls; forming a gate insulation film on the substrate; and migrating the impurity in the surface of the substrate into the gate insulation film that is not adjacent to the insulator, thereby relatively stabilizing a thickness of the gate insulation film adjacent to the insulator to be generally no less than a thickness of the gate insulation film not adjacent to the sidewalls of the trench, the step of forming the impurity region comprising the step of selecting an implant dose of the impurity so that the thickness of the gate insulation layer adjacent to the sidewalls of the trench is no greater than 110% of the thickness of the gate insulation layer not adjacent to the sidewalls of the trench.

Claim 6

A method of stabilizing a thickness of a gate insulation film in a field-effect transistor having a trench isolation structure, comprising the steps of: forming a masking film on a surface of a substrate; etching a trench into the substrate using the masking film as a mask; removing the masking film; filling the trench with an insulator so that a portion of the insulator extends above the surface of the substrate; forming sidewalls at sides of the insulator that extend above the surface of the substrate; forming an impurity region in the surface of the substrate by implanting nitrogen into the surface of the substrate, the sidewalls preventing nitrogen implantation adjacent to the insulator; removing the sidewalls; forming a gate insulation film on the substrate; and migrating the impurity in the surface of the substrate into the gate insulation film that is not adjacent to the insulator, thereby relatively stabilizing a thickness of the gate insulation film adjacent to the insulator to be generally no less than a thickness of the gate insulation film not adjacent to the sidewalls of the trench, the step of forming the impurity region comprising the step of selecting an implant dose of the impurity so that the thickness of the gate insulation layer adjacent to the sidewalls of the trench is no greater than 110% of the thickness of the gate insulation layer not adjacent to the sidewalls of the trench.