US6043133A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of photo alignment for shallow trench isolation chemical-mechanical polishing
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1998-07-24
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Granted: 2000-03-28
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Expires: 2018-07-24
Abstract
Abstract The present invention provides a method of removing an shallow trench isolation (STI) oxide layer 38 from over alignment marks 30. The invention has two major features: (1) A STI photoresist mask 42A that is used to etch Alignment area trenches 34 around alignment marks 30 and to etch STI trenches 35 in device areas 14; and (2) A "reverse tone" STI photoresist mask 42B that is used to remove the isolation oxide 38 from over the alignment marks 30 and from over the active areas 37. The method begins by providing a substrate 10 having a device area 14, an alignment mark trench area 16; and an alignment mark area 18. A polish stop layer 20 22 is formed over the substrate 10. A trench isolation resist layer 42A is used to etch alignment area trenches 34 around the alignment marks 34 and STI trenches 35 in the device areas. A dielectric layer 38 is formed over the substrate. In a key step, the reverse tone trench isolation resist layer 42B is used to etch the first dielectric layer 38 from over the alignment marks 30 and the Active areas 27. Next, the remaining first dielectric layer 38 is chemical-mechanical polished thereby planarizing the first dielectric layer 38.
Inventors
- 👤 Syun-Ming Jang
- 👤 Ying-Ho Chen
- 👤 Jui-Yu Chang
- 👤 Chen-Hua Yu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 08:50
CPC Classifications
H; H10; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/014; H10W10/10; H10W10/17
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
271 words
A method of removing a dielectric layer from over alignment marks comprising the steps of: a) providing a substrate having an alignment mark area having alignment marks; said alignment mark area surrounded and adjacent to a device area; said device area having active areas and shallow trench isolation (STI) areas; b) forming a polish stop layer over said substrate; c) forming a trench isolation resist layer on said polish stop layer covering at least said active areas in said device area; said trench isolation resist layer having openings defining said shallow trench isolation (STI) areas in said device areas; d) using said trench isolation resist layer as an etch mask, etching said polish stop layer and said substrate forming shallow trench isolation (STI) trenches in said device area; e) forming a dielectric layer over said substrate and said polish stop layer; f) forming a reverse tone trench isolation resist layer on said dielectric layer; said reverse tone trench isolation resist layer having openings over said active area and said alignment marks; said reverse tone trench isolation resist layer is a reverse image of said trench isolation resist layer; g) using said reverse tone trench isolation resist layer as an etch mask and etching said dielectric layer over said alignment marks thereby totally removing said first dielectric layer over said alignment marks; and totally removing said dielectric layer over said active areas; h) removing said reverse tone trench isolation resist layer; i) chemical-mechanical polish the remaining dielectric layer thereby planarizing said dielectric layer in said alignment area trenches and said shallow trench isolation (STI) trenches; and j) removing said polish stop layer.
Claim 2
Independent Claim
271 words
A method of removing a dielectric layer from over alignment marks comprising the steps of: a) providing a substrate having an alignment mark area having alignment marks; said alignment mark area surrounded and adjacent to a device area; said device area having active areas and shallow trench isolation (STI) areas; b) forming a polish stop layer over said substrate; c) forming a trench isolation resist layer on said polish stop layer covering at least said active areas in said device area; said trench isolation resist layer having openings defining said shallow trench isolation (STI) areas in said device areas; d) using said trench isolation resist layer as an etch mask, etching said polish stop layer and said substrate forming shallow trench isolation (STI) trenches in said device area; e) forming a dielectric layer over said substrate and said polish stop layer; f) forming a reverse tone trench isolation resist layer on said dielectric layer; said reverse tone trench isolation resist layer having openings over said active area and said alignment marks; said reverse tone trench isolation resist layer is a reverse image of said trench isolation resist layer; g) using said reverse tone trench isolation resist layer as an etch mask and etching said dielectric layer over said alignment marks thereby totally removing said first dielectric layer over said alignment marks; and totally removing said dielectric layer over said active areas; h) removing said reverse tone trench isolation resist layer; i) chemical-mechanical polish the remaining dielectric layer thereby planarizing said dielectric layer in said alignment area trenches and said shallow trench isolation (STI) trenches; and j) removing said polish stop layer.
Claim 3
Dependent Claim
36 words
The method of claim 1 wherein said alignment marks having a depth in a range of between about 1500 and 2500 Å and a spacing therebetween in a range of between about 6 and 10 μm.
Claim 4
Dependent Claim
35 words
The method of claim 1 wherein said alignment mark area having a width in a range of between about 0.5 and 2.0 mm and length in a range of between about 0.5 and 2.0 mm.
Claim 5
Dependent Claim
15 words
The method of claim 1 wherein said alignment marks are used for aligning optical steppers.
Claim 6
Dependent Claim
66 words
The method of claim 1 wherein said polish stop layer comprised of a lower pad oxide layer and an overlying stop layer; said lower pad oxide layer composed of a silicon oxide having a thickness in a range of between about 100 and 200 Å; and said stop layer composed of silicon nitride having a thickness in a range of between about 500 and 2000 Å.
Claim 7
Dependent Claim
31 words
The method of claim 1 wherein said dielectric layer is composed of silicon oxide; and said dielectric layer having a thickness in a range of between about 5000 and 7000 Å.
Claim 8
Independent Claim
328 words
A method of removing a dielectric layer from over alignment marks comprising the steps of: a) providing a substrate having an alignment mark area having alignment marks; said alignment mark area surrounded and adjacent to an alignment mark trench area; said alignment mark trench area surrounded by a device area; said device area having active areas and shallow trench isolation (STI) areas; b) forming a polish stop layer over said substrate; c) forming a trench isolation resist layer on said polish stop layer covering at least said alignment mark trench area and said active areas in said device area; said trench isolation resist layer having openings defining said alignment mark trench areas and shallow trench isolation (STI) areas in said device areas; d) using said trench isolation resist layer as an etch mask, etching said polish stop layer and said substrate forming an alignment area trench in said alignment mark trench area in said substrate, and forming shallow trench isolation (STI) trenches in said device area; e) forming a dielectric layer over said substrate and said polish stop layer; f) forming a reverse tone trench isolation resist layer on said dielectric layer; said reverse tone trench isolation resist layer covering said alignment mark trench area and shallow trench isolation (STI) isolation areas and said reverse tone trench isolation resist layer having openings over said alignment marks and said active area; said reverse tone trench isolation resist layer is a reverse image of said trench isolation resist layer; g) using said reverse tone trench isolation resist layer as an etch mask and etching said dielectric layer over said alignment marks thereby removing said first dielectric layer over said alignment marks; and removing said dielectric layer over said active area; h) removing said reverse tone trench isolation resist layer; i) chemical-mechanical polish the remaining dielectric layer thereby planarizing said dielectric layer over said alignment area trenches and said shallow trench isolation (STI) trenches; and j) removing said polish step layer.
Claim 9
Independent Claim
328 words
A method of removing a dielectric layer from over alignment marks comprising the steps of: a) providing a substrate having an alignment mark area having alignment marks; said alignment mark area surrounded and adjacent to an alignment mark trench area; said alignment mark trench area surrounded by a device area; said device area having active areas and shallow trench isolation (STI) areas; b) forming a polish stop layer over said substrate; c) forming a trench isolation resist layer on said polish stop layer covering at least said alignment mark trench area and said active areas in said device area; said trench isolation resist layer having openings defining said alignment mark trench areas and shallow trench isolation (STI) areas in said device areas; d) using said trench isolation resist layer as an etch mask, etching said polish stop layer and said substrate forming an alignment area trench in said alignment mark trench area in said substrate, and forming shallow trench isolation (STI) trenches in said device area; e) forming a dielectric layer over said substrate and said polish stop layer; f) forming a reverse tone trench isolation resist layer on said dielectric layer; said reverse tone trench isolation resist layer covering said alignment mark trench area and shallow trench isolation (STI) isolation areas and said reverse tone trench isolation resist layer having openings over said alignment marks and said active area; said reverse tone trench isolation resist layer is a reverse image of said trench isolation resist layer; g) using said reverse tone trench isolation resist layer as an etch mask and etching said dielectric layer over said alignment marks thereby removing said first dielectric layer over said alignment marks; and removing said dielectric layer over said active area; h) removing said reverse tone trench isolation resist layer; i) chemical-mechanical polish the remaining dielectric layer thereby planarizing said dielectric layer over said alignment area trenches and said shallow trench isolation (STI) trenches; and j) removing said polish step layer.
Claim 10
Dependent Claim
36 words
The method of claim 1 wherein said alignment marks having a depth in a range of between about 1500 and 2500 Å and a spacing therebetween in a range of between about 6 and 10 μm.
Claim 11
Dependent Claim
35 words
The method of claim 1 wherein said alignment mark area having a width in a range of between about 0.5 and 2.0 mm and length in a range of between about 0.5 and 2.0 mm.
Claim 12
Dependent Claim
15 words
The method of claim 1 wherein said alignment marks are used for aligning optical steppers.
Claim 13
Dependent Claim
66 words
The method of claim 1 wherein said polish stop layer comprised of a lower pad oxide layer and an overlying stop layer; said lower pad oxide layer composed of a silicon oxide having a thickness in a range of between about 100 and 200 Å; and said stop layer composed of silicon nitride having a thickness in a range of between about 500 and 2000 Å.
Claim 14
Dependent Claim
36 words
The method of claim 1 wherein said alignment area trenches having a depth in a range of between about 3000 and 7000 Å; and a width in a range of between about 0.8 and 2.0 mm.
Claim 15
Dependent Claim
31 words
The method of claim 1 wherein said dielectric layer is composed of silicon oxide; and said dielectric layer having a thickness in a range of between about 5000 and 7000 Å.
Claim 16
Independent Claim
360 words
A method of removing a dielectric layer from over alignment marks comprising the steps of: a) providing a substrate having an alignment mark area having alignment marks; said alignment mark area surrounded and adjacent to an alignment mark trench area; said alignment mark trench area surrounded by a device area; said device area having active areas and shallow trench isolation (STI) areas; b) forming a polish stop layer over said substrate; c) forming a trench isolation resist layer on said polish stop layer covering at least said alignment mark trench area and said active areas in said device area; said trench isolation resist layer having openings defining said alignment mark trench areas and shallow trench isolation (STI) areas in said device areas; d) using said trench isolation resist layer as an etch mask, etching said polish stop layer and said substrate forming an alignment area trench in said alignment mark trench area in said substrate, and forming shallow trench isolation (STI) trenches in said device area; said alignment area trenches having a depth in a range of between about 3000 and 7000 Å; and a width in a range of between about 0.8 and 2.0 mm; e) forming a dielectric layer over said substrate and said polish stop layer; f) forming a reverse tone trench isolation resist layer on said dielectric layer; said reverse tone trench isolation resist layer covering said alignment mark trench area and shallow trench isolation (STI) isolation areas and said reverse tone trench isolation resist layer having openings over said alignment marks and said active area; said reverse tone trench isolation resist layer is a reverse image of said trench isolation resist layer; g) using said reverse tone trench isolation resist layer as an etch mask and etching said dielectric layer over said alignment marks thereby totally removing said first dielectric layer over said alignment marks; and totally removing said dielectric layer over said active area; h) removing said reverse tone trench isolation resist layer; i) chemical-mechanical polish the remaining dielectric layer thereby planarizing said dielectric layer over said alignment area trenches and said shallow trench isolation (STI) trenches; and j) removing said polish step layer.
Claim 17
Independent Claim
360 words
A method of removing a dielectric layer from over alignment marks comprising the steps of: a) providing a substrate having an alignment mark area having alignment marks; said alignment mark area surrounded and adjacent to an alignment mark trench area; said alignment mark trench area surrounded by a device area; said device area having active areas and shallow trench isolation (STI) areas; b) forming a polish stop layer over said substrate; c) forming a trench isolation resist layer on said polish stop layer covering at least said alignment mark trench area and said active areas in said device area; said trench isolation resist layer having openings defining said alignment mark trench areas and shallow trench isolation (STI) areas in said device areas; d) using said trench isolation resist layer as an etch mask, etching said polish stop layer and said substrate forming an alignment area trench in said alignment mark trench area in said substrate, and forming shallow trench isolation (STI) trenches in said device area; said alignment area trenches having a depth in a range of between about 3000 and 7000 Å; and a width in a range of between about 0.8 and 2.0 mm; e) forming a dielectric layer over said substrate and said polish stop layer; f) forming a reverse tone trench isolation resist layer on said dielectric layer; said reverse tone trench isolation resist layer covering said alignment mark trench area and shallow trench isolation (STI) isolation areas and said reverse tone trench isolation resist layer having openings over said alignment marks and said active area; said reverse tone trench isolation resist layer is a reverse image of said trench isolation resist layer; g) using said reverse tone trench isolation resist layer as an etch mask and etching said dielectric layer over said alignment marks thereby totally removing said first dielectric layer over said alignment marks; and totally removing said dielectric layer over said active area; h) removing said reverse tone trench isolation resist layer; i) chemical-mechanical polish the remaining dielectric layer thereby planarizing said dielectric layer over said alignment area trenches and said shallow trench isolation (STI) trenches; and j) removing said polish step layer.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-03-28 | 2003-09-27 | 2004-03-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-03-28 | 2007-09-27 | 2008-03-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-03-28 | 2011-09-27 | 2012-03-28 | $7700.00 | Window Closed / Lapsed |